Boron Trichloride Industrial Gases
Description
Boron Trichloride is a chemical compound that exists as a gas under standard conditions. It is known for its flammable properties and is derived from petroleum hydrocarbon cracking. This compound is utilized in various industrial processes due to its chemical characteristics.
Working Principle
Boron Trichloride operates by interacting with other chemical substances, often serving as a reagent in chemical reactions. Its utility stems from its ability to act as a catalyst or reactant in processes that require the introduction of boron or the removal of oxygen from metal oxides. The gas's reactivity with moisture and its ability to form complex compounds make it valuable in specific industrial applications.
Applications
Boron Trichloride is used extensively in the semiconductor industry for plasma etching of silicon, silicon dioxide, and silicon nitride. It is also employed in the production of boron-containing compounds and in the refining of aluminum, magnesium, zinc, and copper alloys. Its role in these processes is crucial due to its ability to effectively remove oxides from metal surfaces.
Advantages over other Industrial Gases
One of the primary advantages of Boron Trichloride over other industrial gases is its effectiveness in the etching process within the semiconductor industry. Its ability to precisely etch silicon-based materials without causing significant damage to the underlying structures makes it superior in applications where precision is critical. Additionally, its role in metal refining processes is enhanced by its capacity to efficiently remove oxides, which is not as effectively achieved by other gases.
Limitations
Boron Trichloride is highly reactive with moisture, which can lead to the formation of corrosive by-products. This reactivity necessitates careful handling and storage conditions to prevent unwanted reactions. Additionally, its flammable nature poses safety risks that require stringent control measures during its use and transportation.
Considerations
When considering the use of Boron Trichloride, it is important to account for the initial costs associated with its procurement and the infrastructure required for its safe handling and storage. Operating expenses may include costs related to safety equipment and monitoring systems to prevent exposure and manage its reactivity with moisture. Durability and accuracy in its application are contingent upon maintaining controlled environments to prevent contamination and ensure consistent performance. Replacement and maintenance costs can be significant, particularly in settings where the gas is used extensively, necessitating regular checks and equipment updates to maintain safety and efficiency.
from Kin-Tek Laboratories Inc.
Used for generating moderate concentrations of low vapor pressure compounds such as C2H5SH, benzene, and water, and for generating high concentration mixtues of SO2, CH,3SH and other moderate vapor pressure compounds. Typical emission rate is 1 to 10 ppm, depending on the compound and the operating... [See More]
- Industrial Gases: Boron Trichloride; Boron-based; Boron trichloride
- Composition: Pure
- Application / Function: Calibration Gas / Gas Standard; Laboratory / Analytical
- Product Form: Liquid
from Linde North America, Inc.
Boron Trifluoride ( 10BF3) proportional counters are largely sensitive to thermal neutrons. Typical applications include: Thermal Neutron Diffraction, Spectroscopy, Density Gauges, and Neutron Monitoring. Compared to 3He, 10B has a lower cross section for thermal neutrons, making 10BF3 detectors... [See More]
- Industrial Gases: Boron Trichloride
- Composition: Trace Gas
- Application / Function: Specialty Application; Thermal Neutron Diffraction, Spectroscopy, Density Gauges, and Neutron Monitoring.
- Concentration: 99.99
from Kin-Tek Laboratories Inc.
Generate moderate concentrations of low vapor pressure compounds such as acrylonitrile, benzene, styrene, etc. and high concentrations of SO2, CH3SH and other moderate vapor compounds. [See More]
- Industrial Gases: Boron Trichloride; Boron-based; Boron trichloride
- Composition: Pure
- Application / Function: Calibration Gas / Gas Standard; Laboratory / Analytical
- Product Form: Liquid
from Linde North America, Inc.
11Boron Trifluoride Electronic Grade. 11BF3 has applications in silicon semiconductor manufacturing as a P-type dopant. It is used where shallow, high concentration boron doping is needed. It can be applied via ion implantation or chemical vapor deposition(CVD). 11BF3 is a colorless, toxic,... [See More]
- Industrial Gases: Boron Trichloride
- Composition: Pure
- Application / Function: Specialty Application; Thermal Neutron Diffraction, Spectroscopy, Density Gauges, and Neutron Monitoring
- Concentration: 99.99
from Kin-Tek Laboratories Inc.
Generate moderate concentrations of high vapor pressure compounds such as SO2, H2S, NH3, Cl2, etc. and very low concentrations of low vapor pressure compounds such as carbon disulfide, methylene chloride, nitric acid, etc. [See More]
- Industrial Gases: Boron Trichloride; Boron-based; Boron trichloride
- Composition: Pure
- Application / Function: Calibration Gas / Gas Standard; Laboratory / Analytical
- Product Form: Liquid
from Kin-Tek Laboratories Inc.
Generates high concentration mixtures of high vapor pressure gases CO, CO2, NO, N2O, CH4, etc. Typical concentrations: 10 ppm to over 1,000 ppm. Tube dimensions: 1 ¾ inches diameter by 6 inches long [See More]
- Industrial Gases: Boron Trichloride; Boron-based; Boron trichloride
- Composition: Pure
- Application / Function: Calibration Gas / Gas Standard; Laboratory / Analytical
- Product Form: Bulk Gaseous
from Kin-Tek Laboratories Inc.
Generates low concentration gas standards of high vapor pressure gases such as CO, CO2, NO, CH4 etc. Typical concentrations: ppb to 10 ppm. Tube dimensions: 1 ¾ inches diameter by 6 inches long [See More]
- Industrial Gases: Boron Trichloride; Boron-based; Boron trichloride
- Composition: Pure
- Application / Function: Calibration Gas / Gas Standard; Laboratory / Analytical
- Product Form: Bulk Gaseous
from Kin-Tek Laboratories Inc.
Generates extremely low concentration mixtures of Cl2, NO2, COCl2, SO2, H2S. Features long life for service in remote areas where the use of disposable permeation tubes is impractical. Tube dimensions: 1 inch diameter by 6 inches long. [See More]
- Industrial Gases: Boron Trichloride; Boron-based; Boron trichloride
- Composition: Pure
- Application / Function: Calibration Gas / Gas Standard; Laboratory / Analytical
- Product Form: Liquid