Semiconductor Manufacturing Rotary Vane Vacuum Pumps and Systems
Description
Rotary vane vacuum pumps are devices designed to create a vacuum by removing gas molecules from a sealed volume. They are characterized by their compact size and ability to achieve deep ultimate vacuum levels. These pumps are particularly effective in handling vapors from aqueous samples and solvents with high boiling points.
Working Principle
Rotary vane vacuum pumps operate using a rotor with sliding vanes that are mounted eccentrically within a cylindrical housing. As the rotor turns, the vanes slide out due to centrifugal force, creating variable volume compartments. Gas enters the enlarging suction chamber and is then compressed as the rotor continues to turn, eventually being expelled through the outlet valve. This mechanism allows the pump to achieve high vacuum levels and makes it suitable for a wide range of vacuum applications.
Applications
Rotary vane vacuum pumps are used in various applications, including freeze drying, vacuum filtering, vacuum impregnation, materials handling, meat packing, and "house" vacuum systems. In semiconductor manufacturing, they are often employed as backing pumps for high vacuum systems, where precise control of vacuum levels is critical.
Advantages over other Rotary Vane Vacuum Pumps and Systems
Rotary vane vacuum pumps offer several advantages, such as high vacuum levels, robustness, and reliability. They are particularly well-suited for conveying acid vapors and monomers, which can lead to polymerization when other vacuum technologies are used. Additionally, they are easy to service and maintain, making them a practical choice for many industrial applications.
Limitations
One of the primary limitations of rotary vane vacuum pumps is the need for proper disposal or treatment of operating fluids. This requirement can add complexity and cost to their operation. Additionally, while they are robust, they may not be the ideal solution for all applications, particularly those requiring extremely high vacuum levels or specific environmental conditions.
Considerations
When selecting a rotary vane vacuum pump, it is important to consider factors such as initial costs, operating expenses, durability, and maintenance requirements. These pumps generally have a lower up-front cost compared to other types, but regular maintenance is necessary due to their internal oil circuit. The durability and reliability of these pumps make them a cost-effective choice in the long run, provided that proper maintenance protocols are followed.
from Agilent Technologies - Vacuum Products
The DS-102 is a dual-stage oil-sealed rotary vane pump that delivers a pumping speed of 5.0 m3/hr at 50 Hz, or 3.5 CFM at 60 Hz, with a base pressure of < 2 x 10-3 mbar. The DS-102 has a 'universal-voltage' single-phase electric motor rated for < 0.55 kW, with integral power switch. An inlet... [See More]
- Application: Industrial; Scientific; Manufacturing; Medical / Laboratory; Semiconductor
- Pumping Speed: 3.47
- Ultimate Vacuum: 0.0015
- Pump Stages: Two Stage
from Busch Vacuum Solutions
With the invention of the R5 oil-lubricated rotary vane vacuum pump, Dr Karl Busch has revolutionized food packaging. And today, we are the market leader in vacuum packaging. However, the R5 is not limited to this application but represents the industry standard for a wide range of applications. [See More]
- Application: Industrial; Chemical; Food; Manufacturing; Packaging; Semiconductor
- Pump Stages: Single Stage
from Agilent Technologies - Vacuum Products
The DS-202 is a dual-stage oil-sealed rotary vane pump that delivers a pumping speed of 8.3 m3/hr at 50 Hz, or 5.8 CFM at 60 Hz, and a base pressure of < 2 x 10-3 mbar. The DS-102 has a low sound pressure, and has a 'universal-voltage' single-phase electric motor rated for < 0.55 kW, with... [See More]
- Application: Industrial; Scientific; Manufacturing; Medical / Laboratory; Semiconductor
- Pumping Speed: 5.82
- Ultimate Vacuum: 0.0015
- Pump Stages: Two Stage
from Agilent Technologies - Vacuum Products
The DS-302 is a dual-stage oil-sealed rotary vane pump that delivers a pumping speed of 11.6 m3/hr at 50 Hz, or 8.2 CFM at 60 Hz, and a base pressure of < 2 x 10-3 mbar. The DS-302 operates at a very quiet sound pressure, with a 'universal-voltage' single-phase electric motor, rated for < 0.55... [See More]
- Application: Industrial; Scientific; Manufacturing; Medical / Laboratory; Semiconductor
- Pumping Speed: 8.17
- Ultimate Vacuum: 0.0015
- Pump Stages: Two Stage
from Agilent Technologies - Vacuum Products
The DS-402 is a dual-stage oil-sealed rotary vane pump that delivers a pumping speed of 17.4 m3/hr / 12.3 CFM, and a base pressure of < 2 x 10-3 mbar. The DS-is available with a 'universal-voltage' single-phase motor rated for < 0.9 kW, with integral power switch a 3 Ф motor is also... [See More]
- Application: Industrial; Scientific; Manufacturing; Medical / Laboratory; Semiconductor
- Pumping Speed: 12.29
- Ultimate Vacuum: 0.0015
- Pump Stages: Two Stage
from Agilent Technologies - Vacuum Products
The DS-602 is a dual-stage, oil-sealed rotary vane pump that delivers a pumping speed of 25.0 L/min / 17.6 CFM, and a base pressure of < 2 x 10-3 mbar. The DS-602 operates at a very quiet sound pressure, and is available with either a 'universal-voltage' single-phase 0.9 kW motor, with integral... [See More]
- Application: Industrial; Scientific; Manufacturing; Medical / Laboratory; Semiconductor
- Pumping Speed: 17.58
- Ultimate Vacuum: 0.0015
- Pump Stages: Two Stage
from Tuthill Corporation / Vacuum & Blower Systems
Kinney oil-flooded, multi-vane vacuum pumps are single stage, air cooled and direct driven. This simple design ensures the reliability and durability that is required in the vacuum industry. Applications: Vacuum Packaging. Meat Packing. Vacuum Chucking & Holding. Central Vacuum Systems. [See More]
- Application: Industrial; Food; Manufacturing; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
- Pump Stages: Single Stage
- Ultimate Vacuum: 0.5000
- Mounting: Benchtop