X-ray Diffractometer Semiconductor Metrology Instruments

2 Results
Process XRR, XRF, and XRD Metrology FAB Tool -- MFM65
from Rigaku Corporation

The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]

  • Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Microspot XRF Ultra Thin Coating Analyzer -- FT160
from Hitachi High-Tech America

Microspot XRF coating thickness and materials analyzers for rapid quality control and validation testing, making it easy to get the right results in seconds. Coating thickness and materials analysis based on X-ray fluorescence (XRF) is a widely accepted and industry-proven analytical technique,... [See More]

  • Technology: X-ray Diffractometer
  • Mounting / Loading: Manual loading
  • Form Factor: Monitor or instrument
  • Applications: Wafer; Electroplate