Sensor / Sensing Element Semiconductor Metrology Instruments Datasheets

Semi-Automated Wafer Measurement System -- Proforma™ 300SA
from MTI Instruments Inc.

The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII ’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning for thickness, thickness variation, bow,... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Applications: Wafer
Wafer Reader -- In-Sight® 1740 series
from Cognex Corporation

The intensely competitive global semiconductor industry demands ever more rigorous control of increasingly complex processes in order to maximize tool utilization and production yield; there is zero margin for error. The need to track wafers throughout back-end processing has never been more vital... [See More]

  • Form Factor: Sensor or sensing element
  • Measurements: Automatic Identification for Wafer Traceability
  • Applications: Wafer
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Technology: Interferometer
  • Mounting / Loading: In-line; Floor
  • Applications: Wafer; Packaged IC or substrate
from KLA-Tencor Corporation

EtchTemp, the next-generation in-situ plasma etch wafer temperature measurement product, captures the effect of the process environment on production wafers and offers unique new capabilities to robustly characterize the high-power, high-frequency etch wafer recipes proliferating at 65nm nodes and... [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer; Temperature
  • Technology: 65-Point Temperature Sensorwafer
  • Measurements: Temperature
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer; CVD / PVD; Photolithography
  • Technology: Optical / Imaging
  • Features: Noncontact; Non-destructive