Autoloading / In-line Semiconductor Metrology Instruments
from Filmetrics, Inc.
The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]
- Mounting / Loading: In-line
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Form Factor: Monitor or instrument
- Applications: Wafer; CVD / PVD
from SemiProbe
SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]
- Mounting / Loading: In-line
- Technology: Optical / Imaging
- Form Factor: ProbingSystem
- Applications: Wafer (optional feature)
from KEYENCE
SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]
- Mounting / Loading: In-line; Floor
- Technology: Interferometer
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Applications: Wafer; Packaged IC or substrate
from Filmetrics, Inc.
Measure film thickness in-line and in real-time at up to seven locations with the F37. Example Layers. Almost any smooth and at-least-partially transparent films may be measured. This includes virtually any semiconducting material, including those used in thin-film photovoltaics. Example Layers. MBE... [See More]
- Mounting / Loading: In-line
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Form Factor: Monitor or instrument
- Applications: Wafer; CVD / PVD
from SemiProbe
The ONLY production vacuum probing system designed to grow with your requirements and your business. • Probing modules can be added or exchanged with no. interruption to your test operation. • Ideal for MEMS, Microbolometers, or any product that. is vacuum packaged. [See More]
- Mounting / Loading: In-line
- Technology: Optical / Imaging
- Form Factor: ProbingSystem
- Applications: Wafer (optional feature)
from KEYENCE
LT-9000 Surface Scanning Laser Confocal Sensor. The LT-9000 Surface Scanning Laser Confocal Displacement Meter excels in measuring micron-level defects or thicknesses without being affected by target color or angle. The confocal principle requires only that the light reflect off a surface and be... [See More]
- Mounting / Loading: In-line; Floor
- Technology: Confocal
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Applications: Wafer; Packaged IC or substrate
from KEYENCE
LK-G5000 High-Speed / High-Accuracy Laser Displacement Sensor. The LK-G5000 is a High-Speed 1D Laser Displacement Sensor for precision displacement measurement. With a sampling speed of 392 kHz, this sensor is able keep up with just about any inline process as well as account for vibration for... [See More]
- Mounting / Loading: In-line; Floor
- Technology: Laser Triangulation
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Applications: Wafer; Packaged IC or substrate