Reflectometer Semiconductor Metrology Instruments
from Rigaku Corporation
The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]
- Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Applications: Wafer
from StellarNet, Inc.
TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 µm for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]
- Technology: Reflectometer
- Applications: Wafer (optional feature); CVD / PVD (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
- Form Factor: Monitor or instrument
- Measurements: FilmThickness (optional feature); WaferThickness (optional feature)
from Rigaku Corporation
TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 3760 can measure elements from Na through U with a single-target, 3-beam X-ray system and a solid-state detector system. The TXRF 3760 includes Rigaku's patented XY θ... [See More]
- Technology: Reflectometer; TXRF
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Applications: Wafer
from Rigaku Corporation
TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 3800e can measure elements from S through U with a single-target, dual-beam X-ray system and a new liquid nitrogen-free detector system. The TXRF 3800e includes Rigaku's patent... [See More]
- Technology: Reflectometer; TXRF
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Applications: Wafer