Products & Services
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Supplier: Instrumentation Northwest, Inc.
Description: Available in either a weatherproof box or 316 stainless tube, INW's AquiStar® PT12-BV barometric pressure sensor represents the latest in state-of-the-art pressure measurement technology. This sensor features an SDI12 (v.1.3) interface and a Modbus® RTU interface that makes this
- Device Category: Sensor
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Supplier: Fredericks Company - Televac
Description: Cold Cathode Sensor Range: (10-11 to 10-2 Torr) Patented Double-Inverted Magnetron technology Increased sensitivity - 6.5 amps/Torr at 10-6 Torr Fast restart at high vacuum Reduced external magnetic field
- Additional Pressure Reading: Gauge
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Vacuum Range: 0.1000 torr
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Supplier: Filter Minder®
Description: The sensor monitors vacuum and/or pressure on filter systems or virtually anywhere vacuum or pressure needs to be monitored. It gives a progressive output from .5 to 4.5 volts full scale. It is an absolute sensor not vented to atmosphere and can measure vacuum
- Additional Pressure Reading: Absolute
- Device Category: Sensor
- Features: Other
- Operating Temperature: -40 to 284 F
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Supplier: Fredericks Company - Televac
Description: 1E/1F Piezo Diaphragm Vacuum Sensor Range 1E (1 Torr to 1,000 Torr) Range 1F (1 to 7,600 Torr) Fast response, direct reading sensor Gas independent Available end connections (NPT, NW, CF, 3/8", and 1/2" tube, VCO, VCR) The
- Additional Pressure Reading: Absolute, Gauge
- Device Category: Sensor
- Features: Temperature Compensation
- Operating Temperature: 32 to 212 F
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Supplier: Fredericks Company - Televac
Description: 1E/1F Piezo Diaphragm Vacuum Sensor Range 1E (1 Torr to 1,000 Torr) Range 1F (1 to 7,600 Torr) Fast response, direct reading sensor Gas independent Available end connections (NPT, NW, CF, 3/8", and 1/2" tube, VCO, VCR) The
- Additional Pressure Reading: Absolute, Gauge
- Device Category: Sensor
- Features: Temperature Compensation
- Operating Temperature: 32 to 212 F
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Supplier: Instrumentation Northwest, Inc.
Description: . Features Measures temperature in addition to barometric and vacuum pressures Comes with easy-to-use Aqua4Plus control software Aqua4Push Data Upload Utility available for automatic scheduled data collection from multiple sensors with optional FTP upload Two
- Device Category: Sensor
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Supplier: Fredericks Company - Televac
Description: Thermocouple Gauge Sensors Range: 0 to 20,000 microns Calibration Medium: Dry Air Dimension: w1-1/4 " diameter x 3" high Operating Temperature: 1°C to 65°C End connection: NPT, NW, CF, 3/8", and 1/2" VCO and VCR fittings
- Additional Pressure Reading: Gauge
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Signal Output: Analog Voltage
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Supplier: MFP Automation Engineering
Description: MFP offers Parker sensors, electronic components and controls for a broad range of mobile equipment applications. Parker sensors and controls are known for their ruggedness. Parker has experience developing and manufacturing all of the following sensors: Optical sensors
- Additional Pressure Reading: Absolute
- Device Category: Sensor
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Supplier: Thyracont Vacuum Instruments GmbH
Description: Absolute Pressure 1000...100 mbar to 1 x 10-3 mbar, 750...75 Torr to 1 x 10-3 Torr The VSP841 and VSP842 Pirani half bridges measure absolute pressure in the fine vacuum range. The robust heat conduction sensor is compact, pre-adjusted and temperature compensated
- Device Category: Sensor
- Operating Temperature: 50 to 104 F
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Supplier: ASCO
Description: Numatics DPS / DVS 280 series digital sensors can be used as a digital pressure / vacuum gauge for accurate visual display of the current value. It can also be used as a controls device designed for applications requiring extremely accurate measurement of a specific value, then
- Device Category: Sensor
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Supplier: Thyracont Vacuum Instruments GmbH
Description: Absolute Pressure 1400 mbar to 1 mbar (=hPa), 1050 Torr to 1 Torr The compact VSC43 piezo transducer is used for measuring absolute pressure in the rough vacuum range. Due to its durable ceramic sensor it is nearly insensitive to dirt and contamination. Benefits
- Device Category: Sensor
- Operating Temperature: 41 to 140 F
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Supplier: VACUUBRAND, Inc.
Description: The DVR 2 is a fully electronic, versatile vacuum gauge for the measuring range from atmospheric pressure to 1 mbar/torr. The DVR 2 has an integrated pressure transducer made of alumina ceramic with outstanding corrosion resistance and superior long-term stability. A particular advantage is
- Additional Pressure Reading: Absolute
- Device Category: Sensor, Transducer
- Features: Other
- Operating Temperature: 50 to 104 F
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Supplier: ANVER Corporation
Description: Digital Vacuum Switch -- JTZSE
- Additional Pressure Reading: Gauge
- Device Category: Sensor
- Operating Temperature: 14 to 122 F
- Signal Output: Analog Voltage
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Supplier: ANVER Corporation
Description: Electronic Vacuum Switch -- JTSE
- Additional Pressure Reading: Gauge
- Device Category: Sensor
- Operating Temperature: -4 to 158 F
- Signal Output: Analog Current
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Supplier: ANVER Corporation
Description: Electronic Vacuum Switch -- JTSED
- Additional Pressure Reading: Gauge
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Signal Output: Analog Current
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Supplier: VACUUBRAND, Inc.
Description: the model, a ceramic diaphragm vacuum sensor and venting valve are already integrated (or externally connectable). The ceramic vacuum sensor is chemically highly resistant, measures gas-type independent and accurately. Ten fully configurable programs (with up to ten time
- Additional Pressure Reading: Absolute
- Device Category: Sensor, Transducer
- Features: Alarm Indicator, Other
- Operating Temperature: 50 to 104 F
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Supplier: VACUUBRAND, Inc.
Description: The DCP 3000 is an electronic vacuum gauge for rough and fine vacuum. Simultaneous connection of up to eight external vacuum sensors (four VSK 3000 and four VSP 3000) allows flexible measuring on the spot. A large illuminated display shows the measuring values of all
- Device Category: Sensor, Transducer
- Features: Other
- Operating Temperature: 50 to 104 F
- Signal Output: RS232 / RS485
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Supplier: Palomar Technologies, Inc
Description: , which can load parts onto the wire bonder while it is bonding. High Vacuum Furnace Applications MEMS Package Sealing Infrared Sensor Package Sealing Crystal Oscillator Package Sealing Hermetic Package Sealing Wafer Level Packaging Void-Free Eutectic Die Attach Low Moisture Package
- Application: Brazing / Soldering, Curing, Industrial, Other
- Computer Interface: Yes
- Configuration: Top Loading
- Controller Type: Programmable
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Supplier: BMT USA, LLC
Description: The Vacucell vacuum drying oven is ideal for safe heating of oxygen-sensitive materials, quick drying of complicated parts, drying or heating of powders, heating in inert gas atmosphere and gentle drying at lower temperatures. The innovative, patented SERVOTHERM shelf system allows effective
- Application: Sterilizing, Industrial, Laboratory
- Capacity: 3.92 cubic feet
- Controller Type: Programmable
- External Configuration: Bench / Cabinet
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Supplier: BMT USA, LLC
Description: The Vacucell vacuum drying oven is ideal for safe heating of oxygen-sensitive materials, quick drying of complicated parts, drying or heating of powders, heating in inert gas atmosphere and gentle drying at lower temperatures. The innovative, patented SERVOTHERM shelf system allows effective
- Application: Sterilizing, Industrial, Laboratory
- Capacity: 1.94 cubic feet
- Controller Type: Programmable
- External Configuration: Bench / Cabinet
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Supplier: BMT USA, LLC
Description: The Vacucell vacuum drying oven is ideal for safe heating of oxygen-sensitive materials, quick drying of complicated parts, drying or heating of powders, heating in inert gas atmosphere and gentle drying at lower temperatures. The innovative, patented SERVOTHERM shelf system allows effective
- Application: Sterilizing, Industrial, Laboratory
- Capacity: 0.7700 cubic feet
- Controller Type: Programmable
- External Configuration: Bench / Cabinet
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Supplier: United Electric Controls Company
Description: Approved for Division 2, Zone 2 hazardous and corrosive atmospheres, and with optional Zone 0 intrinsic safety compliance, the 117 Series can be used to measure vacuum, pressure, differential pressure, or temperature in a variety of applications. The rugged, one piece enclosure features a
- Additional Pressure Reading: Differential, Gauge
- Device Category: Sensor
- Features: Temperature Output
- Operating Temperature: -40 to 160 F
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Supplier: Allied Electronics, Inc.
Description: Sensor, Pressure, Vacuum Gage, Signal Conditionings, Unamplified
- Device Category: Sensor
- Pressure Reading: Gauge
- Sensor Technology: Semiconductor Piezoresistive
- Working Pressure Range: 15 psi
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Supplier: DigiKey
Description: SENSOR DIGITAL VACUUM NPN
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Signal Output: Other
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Supplier: VACUUBRAND, Inc.
Description: The DCP 3000 is an electronic vacuum gauge for rough and fine vacuum. Simultaneous connection of up to eight external vacuum sensors (four VSK 3000 and four VSP 3000) allows flexible measuring on the spot. A large illuminated display shows the measuring values of all
- Additional Pressure Reading: Absolute
- Device Category: Sensor, Transducer
- Features: Other
- Operating Temperature: 50 to 104 F
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Supplier: Clark Solutions
Description: , and ATEX standards, the 120 Series is the choice where potentially explosive or highly corrosive atmospheres exist. The 120 Series offers a variety of pressure, differential pressure, vacuum and temperature ranges, as well as port connections, wetted materials and sensor types. With
- Additional Pressure Reading: Gauge, Compound
- Number of Throws: Double Throw
- Number of Poles: Single Pole
- Operating Temperature: -58 to 160 F
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Supplier: Terra Universal, Inc.
Description: Automatically controls pump operation to maintain stable vacuum levels inside a vacuum chamber Includes easy-to-read digital vacuum gauge and piezo-resistive pressure sensor for outstanding accuracy, stability and repeatability Enhances pump life and efficiency
- Accuracy: 1 ±% FS
- Control Technique: Limit / Set Point Control
- Form Factor: Stand-Alone
- Number of Control Outputs: 1 outputs
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Supplier: Thyracont Vacuum Instruments GmbH
Description: transducers automatically control the appropriate interaction of both vacuum sensors regarding measurement ranges and switching points to achieve high accuracy. Benefits Combination sensor with wide measuring range Patented pulsed Pirani sensor with extended range allows
- Device Category: Sensor
- Operating Temperature: 41 to 122 F
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Supplier: Thyracont Vacuum Instruments GmbH
Description: Absolute Pressure 200 mbar to 0.1 mbar (=hPa), 150 Torr to 0.1 Torr The VCC200 capacitance vacuum transducer is used for measuring absolute pressure with high accuracy and independent of gas type even below 20 mbar. Due to its durable ceramic sensor it is nearly insensitive to dirt and
- Device Category: Sensor
- Operating Temperature: 41 to 122 F
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Supplier: DigiKey
Description: SENSOR HEAD VACUUM PRESSURE
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Signal Output: Analog Voltage
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Supplier: DigiKey
Description: SENSOR HEAD VACUUM PRESSURE
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Signal Output: Analog Voltage
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Supplier: CiMa-Pak Corporation
Description: This big capacity vacuum chamber has two sealbars under the domed lid, making this machine a must when it comes to packaging multiple and/or large packages. • Stainless steel machine • Auto weight protector, will detect when moist and fluid products start to boil when
- Machine Type: Vacuum Chamber Machines
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Supplier: CiMa-Pak Corporation
Description: • A midsize floor standing model with domed plexi lid and 2 sealbars ideal for multiple smaller packages. • Stainless steel machine. • Auto weight protector, will detect when moist and fluid products start to boil when under vacuum and will stop the vacuum cycle
- Machine Type: Vacuum Chamber Machines
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Supplier: ANVER Corporation
Description: Electric Vacuum Switch -- A-3116040
- Additional Pressure Reading: Gauge
- Device Category: Sensor
- Signal Output: Analog Current
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Supplier: CS UNITEC
Description: operation: regular vacuum, power tool activation, auto-clean and auto-clean with power tool activation. 99.93% filtration efficiency of particles of 0.3 microns. Wet vacuuming capability with sensor for automatic shut-off to protect motor and filters. Includes a 15' hose and 25'
- Airflow: 130 SCFM
- Applications: General Cleaning
- Capacity: 6.6 gallons
- Media: Dry, Wet
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Supplier: Norgren - Material Handling
Description: Vaccon’s ultra-mini electronic vacuum sensors provide continuous voltage output (1-5v) proportional to the system vacuum level. Connected to a feedback interface such as a digital display or PLC, the VTMV is a cost effective, reliable sensor that maintains application
- Device Category: Sensor
- Features: Temperature Compensation, Other
- Operating Temperature: 15 to 140 F
- Signal Output: Analog Voltage
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Supplier: Palomar Technologies, Inc
Description: Overview The SST 3250 is a high vacuum multi-atmosphere furnace that has been designed for soldering and bonding components and wafers up to 8-inch (200 mm) diameter. The system is fully operational at vacuum levels of 10-7 Torr and pressures up to 12 psig with automatic
- Application: Brazing / Soldering, Curing, Industrial, Other
- Computer Interface: Yes
- Configuration: Top Loading
- Controller Type: Programmable
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Supplier: Vulcan Electric Co.
Description: Vulcan Electric Vacuum Process Line of temperature sensors using the latest seal fitting technologies that can be designed to seal pressures ranging from vacuum up to 30,000 psi (2067 bars) and designed for durability and reliability in high temperature applications to 4200° F
- Measurement/Display Range (°F): Up to 4172 F
- Measurement/Display Range (°C): Up to 2300 C
- Sensor Type: Temperature Probe
- Thermocouple Type: K (-270°C - 1372°C), N (-270°C - 1300°C), B (0°C - 1820°C), S (-50°C - 1768°C), R (-50°C - 1768°C), C (0°C - 2320°C), Other
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Supplier: Acme Chip Technology Co., Limited
Description: VACUUM A.D.RED.DIFF.1B
- Device Category: Sensor
- Operating Temperature: -13 to 158 F
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Supplier: DigiKey
Description: Pressure Sensor 14.5PSI ~ 145.0PSI (100kPa ~ 1000kPa) Vacuum Male - M12 x 1.0 Cylinder, Threaded
- Device Category: Sensor
- Operating Temperature: -13 to 176 F
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Supplier: Palomar Technologies, Inc
Description: Overview The SST 518 Vacuum/Pressure furnace provides the right combination of performance and value for use in R&D labs to high mix/low volume production environments. Void-free, flux-free solder joints are reliably obtained through a carefully controlled and sequenced combination
- Application: Brazing / Soldering, Curing, Industrial, Other
- Configuration: Top Loading
- Controller Type: Programmable
- Height: 1067 mm
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Supplier: Acme Chip Technology Co., Limited
Description: SENSOR 14.65PSI 1/4
- Device Category: Sensor
- Operating Temperature: 32 to 122 F
- Signal Output: Other
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Supplier: Acme Chip Technology Co., Limited
Description: SENSOR 145.0PSI M12
- Device Category: Sensor
- Operating Temperature: -13 to 176 F
- Signal Output: Other
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Supplier: Acme Chip Technology Co., Limited
Description: SENSOR 145.0PSI 1/4
- Device Category: Sensor
- Operating Temperature: 32 to 158 F
- Signal Output: Other
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Supplier: OMEGA Engineering, Inc.
Description: • Reads Vacuum in 7 Units of Measure • Reads 12,000 to 0 microns 12 to 0 Torr • Auto Shut-off • Built in Hanger • Cleanable Sensor
- Media: Liquid, Gas
- Operating Temperature: 35 to 125 F
- Scale Units: psi, inches of Hg, Other
- Type: Digital, Video
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Supplier: Busch Vacuum Solutions
Description: The mobile gauge TTP 900 is a battery operated handheld solution with an external detachable Pirani sensor. Equipped with a robust spiral coil filament, this vacuum gauge provides a wide range of pressure measurement from 100 to 1 · 10-3 mbar. Excellent measurement
- Media: Gas
- Operating Temperature: 41 to 122 F
- Scale Units: bar
- Type: Digital
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Supplier: Cole-Parmer
Description: • Replaces Hastings
, Televac , and Varian • Measure 1 to 1,000 mTorr with DV-6M connectors and 1 to 2,000 mTorr with 531 & 536 connectors These thermocouple vacuum gauges and controllers are a simple and low cost instrument for vacuum - Signal Output: Analog Voltage
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Supplier: Cole-Parmer
Description: • Replaces Hastings
, Televac , and Varian • Measure 1 to 1,000 mTorr with DV-6M connectors and 1 to 2,000 mTorr with 531 & 536 connectors These thermocouple vacuum gauges and controllers are a simple and low cost instrument for vacuum - Signal Output: Analog Voltage
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Supplier: Cole-Parmer
Description: • Replaces Hastings
, Televac , and Varian • Measure 1 to 1,000 mTorr with DV-6M connectors and 1 to 2,000 mTorr with 531 & 536 connectors These thermocouple vacuum gauges and controllers are a simple and low cost instrument for vacuum - Signal Output: Analog Voltage
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Supplier: Norgren - Material Handling
Description: The VDM Series compact all-in-one output device and digital gauge reduces the number of components in your system. Because the VDM Series offers a choice of 2 switched outputs or 1 switched output and 1 analog output it’s possible to monitor the high and low limits for vacuum control and
- Device Category: Sensor
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Supplier: OMEGA Engineering, Inc.
Description: • High Accuracy ±0.08% BSL Includes Linearity, Hysteresis, and Repeatability • Broad Temperature Compensated Range -29 to 85°C (-20 to 185°F) • Premium Temperature Performance Span: ±0.5% Over Compensated Range • 5-Point NIST Traceable Calibration Included • Now Available with M12 Connector, Order
- Additional Pressure Reading: Gauge, Compound
- Device Category: Transducer
- Features: Temperature Compensation
- Operating Temperature: -49 to 250 F
Find Suppliers by Category Top
Featured Products Top
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TorqSense, a non-contact digital torque monitoring system that could guarantee an infinite lightness of touch has proven to be the only way to test the seals of super high performance vacuum systems. FerThe ultimate fields of precision manufacture, such as electronics (read more)
Browse Torque Sensors Datasheets for Sensor Technology, Ltd. -
Advantages of capacitive ceramic pressure sensors in rough vacuum technology (read more)
Browse Pressure Sensors Datasheets for Endress + Hauser – Sensors & Components -
Kaeser’s new redesigned ASV, BSV, and CSV rotary screw vacuum packages offer capacities from 141 to 554 acfm at 99% vacuum. Featuring a completely new cabinet and air flow design, these 10-40 hp units offer exceptionally quiet operation in a compact footprint. ASV, BSV and (read more)
Browse Vacuum Pumps and Vacuum Generators Datasheets for Kaeser Compressors, Inc. -
outstanding vacuum resistance of the capacitive ceramic pressure sensor. For additional information such as an dimensional drawing please look at the technical information (TI) of the (read more)
Browse Vacuum Sensors Datasheets for Endress + Hauser – Sensors & Components -
pressure and vacuum seal fitting assemblies to carry probes, sensors, wires, electrodes and other elements, satisfying diverse application requirements across a broad (read more)
Browse Sealing Glands Datasheets for Conax Technologies -
and moisture resistant. Compact for tool box storage. Includes bleeder screw and convenient hanger. Built-in pressure sensor protects low range gauges from high pressure. Compatible with most hydraulic fluids (read more)
Browse Leak Testing Equipment Datasheets for HydraCheck Inc. -
of 17.5 mm The sensor is vacuum-resistant (read more)
Browse Vacuum Switches Datasheets for Endress + Hauser – Sensors & Components -
KRYTAR Announces a New, Compact, Directional Coupler for Thermal Vacuum Applications Over the Frequency Range of 2.0 to 8.6 GHz KRYTAR, Inc., a leader in the design and production of ultra-broadband microwave components and test equipment announces a new (read more)
Browse RF Couplers Datasheets for KRYTAR, Inc. -
quality sensors, including several varieties of inductive sensors. Each of our inductive sensors are vacuum sealed to protect the ultra-important electronics inside from variables such as: debris vibrations shock dirt moisture Thanks (read more)
Browse Inductive Proximity Sensors Datasheets for Locon Sensor Systems, Inc. -
insulation structure can be easily installed and embedded in a narrow space, and can be appropriately shaped and bent according to the coil without damaging the winding, avoiding inter tie short circuits, and ensuring its extremely fast thermal response speed. 3. The perfluorinated sensor has vacuum (read more)
Browse Temperature Sensors Datasheets for Hengxin Precision Electrical Equipment Co., Ltd.
Conduct Research Top
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Vacuum Motors
or position samples, products, mirrors and sensors in a vacuum area (some of the most common requirements) has been accomplished with drive mechanisms and motors located outside the vacuum chamber. In this type of control solution, the drive mechanism transmits its motion through the vacuum chamber
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Low Outgassing Accelerometers and Cables for Thermal Vacuum and Vibration Test Environments
impossible to remove the accelerometers. Sensors installed for ground vibration testing may, therefore, remain on the structure even if they are no longer needed for testing purposes. In any application involving a thermal vacuum environment care must be taken to select the. proper accelerometers
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Tips for Selecting the Right Inductive Sensor
vacuum-sealed electronics and metal housings designed to protect against shock, vibrations, dirt, and moisture - which means you can use these sensors reliably under a variety of conditions.
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Z-Height Measurement with Noncontact Sensors
and implementation problems caused by limited space, temperature changes, vacuum, target surface interference, and damage to measurement probes resulting from incidental contact with the target. Capacitive and eddy-current noncontact displacement sensors are becoming a standard technology for z-height
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Not All Interfaces Are Created Equal
Engineered Products Company (Filter Minder) has recently added to its portfolio a line of Electronic Pressure/Vacuum Sensors suitable for a broad range of transportation and industrial applications. The following Technical Article discusses matters for consideration when designing the interface
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Automacad Concrete Lends A Helping Arm to Concrete Production
Automacad Concrete (Québec, Canada) designed an automated conveying system equipped with an ABB industrial articulated robot to pick and place hardened concrete. Automacad worked with ifm efector (Exton, PA) to equip the ABB robot with vacuum sensors, pneumatic controls and the AS-i networking
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ifm Sensors in pmd's New Cleanroom Lab
The completely new cleanroom lab of pmdtechnologies ag is used to develop and test the 3D image and distance sensors from pmd. ifm sensors are used to monitor the function of the compressed air system and the vacuum pump.
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How to Measure Negative Pressure Using a Gauge Pressure Sensor
There are two types of pressure sensors used for negative pressure or vacuum pressure applications: gauge sensors or absolute pressure sensors. The reference pressure is the differentiating factor between these 2 types of sensors. The diagram below illustrates how the different methodologies work.
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The Power of PicoQ (R): No Performance Loss in Vacuum
Read about the comparison of PicoQ (R) sensor technology to capacitive sensors operating in UHV
More Information Top
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Encyclopedia of Structural Health Monitoring Complete Document
Goutham R.
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http://dspace.mit.edu/bitstream/handle/1721.1/87419/53473553-MIT.pdf?sequence=2
Vacuum packaging involves implementing a bonding method that can provide a hermetic seal, incorporating a getter material that can absorb residual gases inside the package after bonding, and designing a vacuum sensor with adequate sensitivity in the range of interest in order …
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Vacuum-sealed silicon micromachined pressure sensors
The devices are a capacitive vacuum sensor , a surface-micromachined microdi- aphragm pressure sensor, and a resonant pressure sensor.
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Fiber Bragg grating sensors for real-time monitoring of evacuation process
Proposed FBG based vacuum sensor has potential applications in vacuum systems involving hazardous environment such as chemical and gas plants, automobile industries, aeronautical establishments and leak monitoring in process industries, where the electrical or MEMS based sensors are prone to explosion and …
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On-line monitoring of pressure in vacuum interrupters
According to the experimental results, a kind of vacuum chamber with intellectualized vacuum sensor was developed to implement the on-line monitoring of pressure in vacuum interrupters.
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Handbook of Modern Sensors
445 11.10 Vacuum Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Wafer-level reliability characterization for wafer-level-packaged microbolometer with ultrasmall array size
Abstract For the development of a small and low-cost microbolometer, wafer-level reliability characterization techniques for vacuum-level packaged wafers are intro- duced. amorphous-silicon-based microbolometer-type vacuum sensors fabricated on an 8-inch wafer are bonded with a cap …