Etching - Plasma / Wet Semiconductor Metrology Instruments
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Litmas® Integrated Plasma Source and Power-Delivery System -- RPS 1501
from Advanced Energy Industries, Inc.
from Advanced Energy Industries, Inc.
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch ™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution. Highly reliable, effective abatement with minimum utilities usage. Lower cost of ownership than... [See More]
- Form Factor: Controller
- Applications: Wafer; Photolithography
- Mounting / Loading: Floor