Reflectometer Semiconductor Metrology Instruments Datasheets

Candela -- CS20
from KLA-Tencor Corporation

The Candela CS20 system simultaneously measures surface reflectivity and topography for automatic defect detection and classification. The system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for... [See More]

  • Technology: Ellipsometer; Reflectometer; Optical / Imaging
  • Mounting / Loading: Floor
  • Form Factor: ProbingSystem
  • Applications: Wafer; CVD / PVD
Process XRR, XRF, and XRD Metrology FAB Tool -- MFM65
from Rigaku Corporation

The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]

  • Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Texture Measurement System -- Microscan
from ULVAC Technologies, Inc.

Provides a broad range of specs suitable for various R & D applications [See More]

  • Technology: Reflectometer; Optical / Imaging
  • Applications: Wafer; CVD / PVD
  • Form Factor: Monitor or instrument; Controller
  • Measurements: Defects, dimples or film residues; FilmThickness; Roughness / Waviness