27.1 INTRODUCTION

Since the successful continuous-wave operation of semiconductor lasers in 1970, optoelectronic devices based on III-V semiconductors have received increasing attention. Discrete optoelectronic devices have thus become the key to optical telecommunications, data processing, and sensing systems. To meet increases in information transmission and processing capacity, optoelectronic devices must be enhanced to provide better performance, a broader range of functions, improved reliability, and lower cost. The throughput in optical transmission systems, for example, is already beyond 10 Gb/s in installed systems and is expected to advance to the 1 Tb/s to 10 Tb/s level by the early 2000s.1

Optoelectronic integrated circuits (OEICs) help provide the above enhancements by integrating multiple optical and electronic functions. The first experiment demonstrating OEIC was done in 1978-79 by integrating GaAs-based lasers and driver diodes and transistors.2 Since then, many advances have been made in many different areas of device and circuit fabrication and their integration technology. Not only have OEIC transmitters and receivers been developed for telecommunications,3 but novel optical functional devices and photonic integrated circuits have been investigated and developed for advanced telecommunication networks and data processing and sensing systems.

This chapter reviews current technology in semiconductor-based opto electronic integration which incorporates both optical and electronic devices. Since detailed descriptions of the technology can be found in prior publications,4 ^,5 we will briefly review it and describe more recent advances. In what follows, categories and features of optoelectronic integration are first explained. Basic integration techniques, including materials, basic devices...