Vacuum Chambers and Components Specifications

Help with Vacuum Chambers and Components specifications:

Chamber / Component Type

	Your choices are...
	Baseplate		A baseplate is a large flanged adapter that connects the lower section of a chamber or bell jar to the pumping stack or system. Baseplates usually have a centrally located port or flange connection that may be connected to a vacuum pumping system.  The upper portion has a large flange to accommodate the large diameter of the bell jar (typically 12", 14", 18", 24").  Baseplates are flatter and have fewer feedthrough ports compared to service or base wells.
	Box / Degassing Chamber		Box shaped chamber usually with a hinged access door for applications that do not require a high vacuum, such as the outgassing of samples including plastics, blood, adhesives, chemicals, or other liquids.
	Base / Service Well		Service wells are components that provide a transition stage between the pumping stack or system and the bell jar or chamber.  Base wells integrate the features of both a baseplate and a feedthrough collar. They provide the functionality of both components while replacing one vacuum seal with a weld joint.   Baseplates also provide the same transition function, but service wells have wider bore, greater height and more feedthrough ports compared to baseplates.  Service wells do not normally contain feedthroughs as supplied, rather the ports or opening for mounting the required fluid, electrical or mechanical feedthroughs.
	Custom / Specialty Chamber		Chamber specially customized or designed shape or port openings for a specific manufacturing process or analysis application.  Surface analysis or universal chambers are often the starting point for a custom configured chamber design.
	Glovebox / Weld Chamber		Specialized chambers for manual or experimental melting, welding or processing of titanium, zirconium, or other atmosphere sensitive materials.
	Feedthrough Collar		Feedthrough collars are a transition component between the baseplate and the bell jar or chamber.  Feedthrough collars provide additional height and more feedthrough ports.  Feedthrough collars do normally contain feedthroughs as supplied, rather the ports or opening for mounting the required fluid, electrical, or mechanical feedthroughs.
	Load Lock Chamber		A specialized, small chamber that is built onto a main chamber to allow movement of samples, wafers or process components from atmosphere to high vacuum without breaking the main vacuum.  Small load lock chambers are usually employed since they can be cycled faster from atmospheric pressure to high vacuum compared to a large chamber.
	Surface Analysis / Universal		Chambers designed for surface analysis and other research applications.  Universal or surface analysis chambers usually have a variety or ports or openings that can be designed to accommodate a variety or surface analysis instruments such as SIMS, SNMS, Auger, WDS or other spectrometers.  Surface analysis or universal chambers are often the starting point for a custom configured chamber design.
	Other		Other unlisted, specialized, or proprietary chamber or chamber component types.
	Search Logic:		All products with ANY of the selected attributes will be returned as matches. Leaving all boxes unchecked will not limit the search criteria for this question; products with all attribute options will be returned as matches.

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Specifications

	Vacuum / Pressure Range:
	Your choices are...
	Rough / Low (< 760, > 1 torr)		Chambers suitable for use under low vacuum (less than 760 torr and greater than 1 torr).  Low or rough vacuum chambers are suitable for outgassing organic and biological samples, vacuum drying, and certain welding and processing applications.
	Medium (< 1, >10-3 torr)		Chambers suitable for use under medium vacuum (less than 1 torr and greater than 10-3 torr).  Medium vacuum chambers are suitable for certain welding and processing applications.
	High Vacuum (< 10-3, >10-8 torr)		Chambers suitable for use under high vacuum (less than 10-3 torr and greater than 10-8 torr).
	Ultra-high Vacuum (< 10-8 torr)		Chambers suitable for use under ultra-high vacuum (less than 10-8 torr).  UHV chambers often employ heaters to bakeout surface contamination and liners that can be cleaned and replaced.
	Elevated Pressures (> 760 torr)		Chambers suitable for processing or analysis with gases or internal atmospheres at positive pressures or above atmospheric pressure.
	Other		Other unlisted, specialized, or proprietary pressure ranges.
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	Nominal Size (OD / Width):		The nominal size, width or outer diameter of the chamber.  Standard diameters for bell jars and cylindrical chambers are 12", 14", 18" and 24".
	Your choices are...
	12 inch
	14 inch
	18 inch
	24 inch
	36 inch
	Other		Other unlisted, specialized, or proprietary chamber sizes.
	Search Logic:		Products with the selected attribute will be returned as matches. Leaving or selecting "No Preference" will not limit the search criteria for this question; products with all attribute options will be returned as matches.
	Height / Length:		The overall height of the chamber from below the lower flange.
	Search Logic:		User may specify either, both, or neither of the "At Least" and "No More Than" values. Products returned as matches will meet all specified criteria.

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Materials of Construction

	Chamber Material
	Your choices are...
	Aluminum		A ductile, lightweight metal that has good electrical and thermal conductivity, high reflectivity, and resistance to oxidation.
	Plastic		Any of numerous organic, synthetic, or processed materials that consisting mainly of thermoplastic or thermosetting polymers of high molecular weight and that can be made into objects, films, or filaments.
	Stainless Steel		Stainless steel is rust and corrosion resistant and can have relatively high-pressure ratings.  Stainless steel contains a base of iron with additions of chromium and nickel and other elements depending on the specific alloy.
	Steel		A commercial iron alloy that contains carbon in any amount up to about 1.7 percent as an essential alloying constituent.  Steel is formable in the annealed or unhardened condition.  Steel can develop high strength and hardness after heat treatment or work hardening.  Steel is distinguished from cast iron by its ductility and lower carbon content.
	Glass		Glass is a clear, amorphous material made by melting a mixture of sand (silicon dioxide) along with the addition of other nonmetallic materials or minerals, such as aluminum oxide, sodium oxide and calcium oxide.  Glass has good chemical and thermal resistance.  In bulk form, glass is brittle compared to many metals and plastics.
	Other		Other unlisted, specialized, or proprietary materials.
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Features

	Flange / Fitting Types
	Your choices are...
	Elastomeric (O-ring / Gasket)		A flange or fitting type using an elastomeric seal such as an o-ring or gasket.  Elastomeric seals are not typically suitable for extremely high vacuum levels due to outgassing of volatile compounds from the seal.  O-ring seals can be useful where movement of the joint is required.
	Metal Seal (Wire / Copper Gasket)		A flange or fitting type using a metal seal such as a copper gasket.  Metal seals are suitable for extremely high vacuum levels since they do not contain volatile compounds. Examples of flanges or fittings using an all-metal seal are ISO-CF (copper ring seal), VSR (Swagelok fitting) or wire sealed flanges.
	Bolted		A bolted flange connection such as ISO-BF, Conflat®, ANSI ASA, ISO-LF and ISO-NW.  The bolts in the flange pull the flanged ends together and forming a seal between the central o-ring and flange faces.  The o-ring is held in place by a central retainer or center ring. Conflat is a registered trademark of Varian Associates.
	Threaded / NPT		A fitting type using male and female threaded pipe, tubing or fittings such as NPT, NPTF or BSPT fittings.  Threaded metal connection are not suitable for high vacuum levels since the small spaces between the threads and blind holes can cause virtual leaks and they joint may contain volatile compounds or elastomeric sealants.  Threaded connections with venting slot and Teflon® tape seal may be suitable down to 10-6 torr at low temperatures (bakeout <260oC).  For very high vacuum (10-9 torr), a clamped or bolted connection with a metal seal should be chosen. NPT is the designation for American Standard Taper Pipe Threads for General Use.  NPTF stands for Dryseal American Standard Taper Pipe Threads.  Teflon is a registered trademark of Dupont.
	Weld / Braze Stub		Fitting designed for connection by a welding or brazing process.
	ISO-BF (Bolted)		A bolted flange connection.  ISO-BF is a bolted flange connection with interface dimensions made to International Standards Organization (ISO) specifications. The bolts in the flange pull the flanged ends together and forming a seal between the central o-ring and flange faces.  The o-ring is held in place by a central retainer or center ring.  Conflat® is a registered trademark of Varian Associates.
	ISO-CF (Metal Seal)		Flange connection using an all-metal copper ring seal.  The connection uses knife edged flanges with a raised nib or edge that digs into a central copper ring forming a seal suitable for high vacuum.  ISO-CF is a copper seal flange connection with interface dimensions made to International Standards Organization (ISO) specifications. OFHC copper is typically used, although other soft, low vapor pressure metals can be substituted.
	ISO-KF / ISO-NW (Small Clamped, <2")		ISO-KF, ISO-QF, ISO-Pneurop and ISO-NW are designations for a small, clamped connection with interface dimensions made to International Standards Organization (ISO) specifications.  ISO-KF connections are less than 2" in diameter.  The clamp or clamping ring fits around the joint pulling the flanged ends together and forming a seal between the central o-ring and flange faces.  The o-ring is held in place by a central retainer or center ring.  KF is a German acronym for Kleinflansch or small flange.
	ISO-MF (Multi-fastener / Universal)		The ISO-MF or ISO-Universal flanging system is a bolted or clamped connection with interface dimensions made to International Standards Organization (ISO) specifications.  The single or double claw clamps or band clamps pull the flanged ends together and forming a seal between the central o-ring and flange faces.  The o-ring is held in place by a central retainer or center ring. The single claw clamp is used to connect join an MF flange to a BF or bolted flange.  ISO-Pneurop, ISO-PF, ISO-LF and ISO-K are also designations used for the ISO Universal flanges.
	ANSI ASA		ANSI ASA is a bolted flange connection with interface dimensions made to American National Standards Institute (ANSI) specifications. The bolts in the flange pull the flanged ends together and forming a seal between the o-ring and flange faces.  ASA flanges are used in pairs with one smooth, flat faced flange and flange with a groove face for retaining the o-ring.
	Conflat®		Conflat® connections are a proprietary bolted connection of Varian Associates.  The bolts in the flange pull the flanged ends together and forming a seal between the central o-ring and flange faces.  The o-ring is held in place by a central retainer or center ring.
	Other		Other unlisted, specialized, or proprietary flange or fitting type.
	Search Logic:		Products with the selected attribute will be returned as matches. Leaving or selecting "No Preference" will not limit the search criteria for this question; products with all attribute options will be returned as matches.
	Polished / Electro-polished Surfaces?		The internal surfaces of the chamber have been polished or electro-polished to a mirror or high surface finish level.
	Search Logic:		"Required" and "Must Not Have" criteria limit returned matches as specified. Products with optional attributes will be returned for either choice.
	Openings / Feedthrough Ports?		Ports that provide visual or optical access to internal processes or experiments.
	Search Logic:		"Required" and "Must Not Have" criteria limit returned matches as specified. Products with optional attributes will be returned for either choice.
	Heaters?		Integral or optional heaters to provide degassing of internal surfaces or defrosting of external cooling lines or components.
	Search Logic:		"Required" and "Must Not Have" criteria limit returned matches as specified. Products with optional attributes will be returned for either choice.
	Cooling?		Features such as double walls or water-cooling units to facilitate cooling of vessel walls or to provide thermal protection to pumps, seals or components near heaters or evaporators.
	Search Logic:		"Required" and "Must Not Have" criteria limit returned matches as specified. Products with optional attributes will be returned for either choice.

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