Permanent Installation High Vacuum Pumps

ET-WS Series Turbo Pump -- ET-300WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • Configuration: Combination
  • Pumping Speed: 636 to 3390
  • Ultimate Vacuum: 1.00E-6
  • UHV / High Vacuum: Turbomolecular
MODION® Modular Ion Pump -- C-0609M
from Kernco, Inc.

The Kernco MODION appendage pump/gauge system was originally developed for in-house space qualified long-lived hardware. In the field, MODION pump systems have accumulated years of unmatched performance and reliability both in ground-based applications and in multiple satellite and manned space... [See More]

  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1.06
  • Ultimate Vacuum: 1.00E-8 to 1.00E-4
  • UHV / High Vacuum: Ion
High Vacuum Pump and Blower Package -- DuoVac-3000
from HullVac Pump Corporation

Whole package speed control, motor can be mounted on either side [See More]

  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 300 to 2765
  • Ultimate Vacuum: 10
  • Backing Pump: Cooling Booster/Backing Pump
Cryo Cooled Diffstak Vapor Pump -- CR100/300M
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a manually operated... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 487 to 1907
  • Backing Pump: Backing Pump Required (Sold Separately)
DIVAC Three Stages Diaphragm Vacuum Pump -- 1.4 HV3C
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 0.7644
  • Ultimate Vacuum: 1.5
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR100/300P
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 487 to 1907
  • Backing Pump: Backing Pump Required (Sold Separately)
DIVAC Two Stages Diaphragm Vacuum Pumps -- 0.6 L
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 0.3528
  • Ultimate Vacuum: 6
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR160/700M
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 1271 to 4238
  • Backing Pump: Backing Pump Required (Sold Separately)
DIVAC Two Stages Diaphragm Vacuum Pumps -- 1.2 L
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 0.7056
  • Ultimate Vacuum: 6
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR160/700P
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 1271 to 4238
  • Backing Pump: Backing Pump Required (Sold Separately)
DIVAC Two Stages Diaphragm Vacuum Pumps -- 2.2 L
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1.18
  • Ultimate Vacuum: 6
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR250/2000M
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a manually operated... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 3602 to 12713
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- 1500 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR250/2000P
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 3602 to 12713
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 1300 C
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR63/150M
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a manually operated... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 254 to 403
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 2800 C/CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4450 to 5615
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
Cryo Cooled Diffstak Vapor Pump -- CR63/150P
from Edwards Vacuum

The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 254 to 403
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 3200 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 6780
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
EPX On-tool High Vacuum Pump -- EPX180L
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
  • Ultimate Vacuum: 7.50E-5
  • UHV / High Vacuum: Molecular Drag
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 1300 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2225 to 2585
  • Ultimate Vacuum: 7.50E-10
  • UHV / High Vacuum: Turbomolecular
EPX On-tool High Vacuum Pump -- EPX180LE
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
  • Ultimate Vacuum: 7.50E-5
  • UHV / High Vacuum: Molecular Drag
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 1600 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3115 to 3750
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
EPX On-tool High Vacuum Pump -- EPX180N
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
  • Ultimate Vacuum: 7.50E-5
  • UHV / High Vacuum: Molecular Drag
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 1700 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3136 to 3623
  • Ultimate Vacuum: 7.50E-10
  • UHV / High Vacuum: Turbomolecular
EPX On-tool High Vacuum Pump -- EPX180NE
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
  • Ultimate Vacuum: 7.50E-5
  • UHV / High Vacuum: Molecular Drag
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 2200 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4026 to 4450
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
EPX On-tool High Vacuum Pump -- EPX500L
from Edwards Vacuum

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 294
  • Ultimate Vacuum: 7.50E-7
  • UHV / High Vacuum: Molecular Drag
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 300 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 403 to 636
  • Ultimate Vacuum: 7.50E-11
  • UHV / High Vacuum: Turbomolecular
EPX On-tool High Vacuum Pump -- EPX500LE
from Edwards Vacuum

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 294
  • Ultimate Vacuum: 7.50E-7
  • UHV / High Vacuum: Molecular Drag
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 400 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 424 to 773
  • Ultimate Vacuum: 7.50E-11
  • UHV / High Vacuum: Turbomolecular
EXT Compound Turbomolecular Vacuum Pump -- EXT75DX
from Edwards Vacuum

The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible without TIC... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 88.99 to 140
  • Ultimate Vacuum: 3.75E-10 to 3.75E-8
  • UHV / High Vacuum: Turbomolecular
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 600 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 869 to 1208
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
HT Series -- HT10
from Edwards Vacuum

The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT10 (ANSI10/ISO320 inlet) diffusion pump is designed for all light and heavy duty industrial applications. The robust construction gives high pumping speed... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 6357 to 9853
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC MAGiNTEGRA Turbomolecular Pump -- W 700 iP
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 911 to 1271
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
nEXT Turbomolecular Pump -- nEXT240D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 350 to 509
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC Mechanical Rotor Suspension -- 1000 C
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1801 to 2331
  • Ultimate Vacuum: 7.50E-11
  • UHV / High Vacuum: Turbomolecular
Standard Diffstak Vapor Pump -- 63/150M
from Edwards Vacuum

The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 63 (ISO63 inlet) design has been proven over many... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 286 to 424
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC Mechanical Rotor Suspension -- 1100C
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2225
  • Ultimate Vacuum: 2.20E-10
  • UHV / High Vacuum: Turbomolecular
Unvalved Diffstak Vapor Pump -- 63/150C
from Edwards Vacuum

The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 63 (ISO63 inlet) design has been proven over many... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Diffusion or Vapor
  • Pumping Speed: 318 to 477
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC Mechanical Rotor Suspension -- 151 C
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 244 to 318
  • Ultimate Vacuum: 7.50E-11
  • UHV / High Vacuum: Turbomolecular