Turbomolecular High Vacuum Pumps

High Vacuum, Turbomolecular Vacuum Pump -- Turbo TM 1100, 1600, 2200 A
from Busch Vacuum Solutions

Turbo is the new range of turbomolecular vacuum pumps from Busch. Turbo vacuum pumps are designed for use in a wide range of industrial applications, rom glass coating to vacuum furnaces. In these industries, manufacturers share a need for robust, reliable, production friendly vacuum technology. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-11
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2288 to 4662
DIVAC Backing Pumps for Turbomolecular Pumps -- 0.8 LT
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 0.3528
  • Ultimate Vacuum: 0.3800
  • Lubrication Style: Dry or Oil-less
High Vacuum Turbo Pump -- Turbo-V 1001 Navigator
from Agilent Technologies - Vacuum Division

The Turbo-V 1001 Navigator pump provides pumping speeds from 790-1,050 liters/sec (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio for low base pressure, high-pressure differential for high-throughput and high... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 1674 to 2225
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
EMT Series Turbomolecular Pump -- EMT390
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 3
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 340 to 720
EXT Compound Turbomolecular Vacuum Pump -- EXT556H
from Edwards Vacuum

The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumping technologies with turbomolecular pump stages on a single rotor. The result is a highly reliable pump well suited to applications requiring excellent light gas performance and ultimate pressures <10-10 mbar. With the... [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 7.50E-10
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1059 to 1229
Compound Molecular Pump -- FF-100 / 110E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 233
DIVAC Backing Pumps for Turbomolecular Pumps -- 0.8 T
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 0.3528
  • Ultimate Vacuum: 2.25
  • Lubrication Style: Dry or Oil-less
High Vacuum Turbo Pump -- Turbo-V 1K-G
from Agilent Technologies - Vacuum Division

The Turbo-V 1K-G is more than a pump. It is a dedicated pumping system, designed specifically for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, there is a... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 24.01 to 40.61
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
ET-WS Series Turbo Pump -- ET-300WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 1.00E-6
  • Configuration: Combination
  • Pumping Speed: 636 to 3390
EXT Compound Turbomolecular Vacuum Pump -- EXT75DX
from Edwards Vacuum

The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible without TIC... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 3.75E-10 to 3.75E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 88.99 to 140
Compound Molecular Pump -- FF-160 / 620 NE
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1271
DIVAC Backing Pumps for Turbomolecular Pumps -- 1.4 HV3
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 0.7644
  • Ultimate Vacuum: 1.13
  • Lubrication Style: Dry or Oil-less
High Vacuum Turbo Pump -- Turbo-V 2300 TwisTorr
from Agilent Technologies - Vacuum Division

The Turbo-V 2300 TwisTorr pump offers the highest pumping speeds in its category for N2. Utilizing leading-edge Twistorr technology, the pump achieves higher compression ratios for light gases in a commercially available turbo molecular pump. The pump is designed for scientific and research... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 3178 to 4344
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
nEXT Turbomolecular Pump -- nEXT240D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 350 to 509
  • Configuration: Individual Vacuum Pump
  • Backing Pump: Backing Pump Required (Sold Separately)
Compound Molecular Pump -- FF-160 / 620E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice. Compact series allow for dry backing pumps [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1271
DIVAC Backing Pumps for Turbomolecular Pumps -- 3.8 HV3
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 2
  • Ultimate Vacuum: 0.7500
  • Lubrication Style: Dry or Oil-less
High Vacuum Turbo Pump -- Turbo-V 2K-G
from Agilent Technologies - Vacuum Division

The Turbo-V 2K-G is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 3390
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
nEXT Turbomolecular Pump -- nEXT300D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 593 to 720
  • Configuration: Individual Vacuum Pump
  • Backing Pump: Backing Pump Required (Sold Separately)
Compound Molecular Pump -- FF-160 / 700E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1483
DIVAC Backing Pumps for Turbomolecular Pumps -- 4.8 VT
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 2.76
  • Ultimate Vacuum: 1.5
  • Lubrication Style: Dry or Oil-less
High Vacuum Turbo Pump -- Turbo-V 3K-G
from Agilent Technologies - Vacuum Division

The Turbo-V 3K-G Turbomolecular Pump (like V 2K-G) is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 4026 to 4662
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
nEXT Turbomolecular Pump -- nEXT400D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 689 to 848
  • Configuration: Individual Vacuum Pump
  • Backing Pump: Backing Pump Required (Sold Separately)
Compound Molecular Pump -- FF-200 / 1200 NE
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2543
DIVAC Three Stages Diaphragm Vacuum Pump -- 1.4 HV3C
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 1.5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 0.7644
High Vacuum Turbo Pump -- Turbo-V 551 Navigator
from Agilent Technologies - Vacuum Division

The Turbo-V 551 Navigator turbomolecular vacuum pump with MacroTorr drag technology delivers high compression ratios, high throughput, and high discharge pressures for a wide-range of high vacuum applications. The unique bearing and permanent dry lubrication in the V 551 eliminate oil and... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 742 to 1271
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
STP Turbomolecular Pump -- STP-L301
from Edwards Vacuum

Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 551 to 614
Compound Molecular Pump -- FF-200 / 1200E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2543
DIVAC Two Stages Diaphragm Vacuum Pumps -- 0.6 L
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 6
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 0.3528
High Vacuum Turbo Pump -- Turbo-V 701 Navigator
from Agilent Technologies - Vacuum Division

The Turbo-V 701 Navigator pump provides pumping speeds from 510-690 liters/sec (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio for low base pressure, high-pressure differential for high-throughput and high foreline... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 1081 to 1462
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
STP Turbomolecular Pump -- STP301
from Edwards Vacuum

Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9 to 4.88E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 636
Compound Molecular Pump -- FF-200 / 1300E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2755
DIVAC Two Stages Diaphragm Vacuum Pumps -- 1.2 L
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 6
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 0.7056
High Vacuum Turbo Pump -- TwisTorr 304 FS
from Agilent Technologies - Vacuum Division

The Agilent TwisTorr 304 FS turbomolecular high-vacuum pump combines Twistorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 466 to 530
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
STP-XA Turbomolecular Pump -- STP-XA2703C
from Edwards Vacuum

The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4344 to 5615
Compound Molecular Pump -- FF-250 / 1600E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Ultimate Vacuum: 7.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3390
DIVAC Two Stages Diaphragm Vacuum Pumps -- 2.2 L
from Leybold USA Inc.

The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 6
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1.18
High Vacuum Turbo Pump -- TwisTorr 84 FS
from Agilent Technologies - Vacuum Division

The Agilent TwisTorr 84 FS turbomolecular high-vacuum pump combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 76.28 to 142
  • Configuration: Individual Vacuum Pump
  • Application: Industrial
STP-XA Turbomolecular Pump -- STP-XA3203C
from Edwards Vacuum

The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4873 to 6780
Oil-Free Turbomolecular Pumping Station -- FJ-700E
from Drytek Distribution

FJ –700E pumping station is a ready-to-run pumping system with oil-free design. It consists of a KYKY 700 turbomolecular pump (grease lubrication bearing), a scroll pump (oil-free backing pump), a controller system, a vacuum measurement ,valves and pipelines. Applications: surface... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1483
TURBOLAB Smart High Vacuum Pump Systems -- 350 Table Top
from Leybold USA Inc.

The RUTA pump systems described here are vacuum pump systems consisting of Roots vacuum pumps from the RUVAC series in combination with a fore vacuum pump. They have been designed for rough and medium vacuum operation, i.e. for the pressure range from atmospheric pressure down to 10-4 mbar (7.5... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-11
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 614
High Vacuum Turbo Pumping System -- TPS Compact
from Agilent Technologies - Vacuum Division

The new Dry TPS-compact is a portable, fully integrated turbo pumping system powered by the Turbo-V 81 MacroTorr or Turbo-V 301 Navigator pumps, backed by the Agilent (formerly Varian) 60 l/ min IDP-3 Dry Scroll new generation primary pump. The TPS-compact is the most innovative product of the new... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Application: Industrial
  • Configuration: Vacuum Pump System or Station
STPA Turbomolecular Pump -- STPA1603C
from Edwards Vacuum

The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2543 to 3390
Turbomolecular Pump -- F-100 / 110E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 233
TURBOLAB Smart High Vacuum Pump Systems -- 450 Table Top
from Leybold USA Inc.

The RUTA pump systems described here are vacuum pump systems consisting of Roots vacuum pumps from the RUVAC series in combination with a fore vacuum pump. They have been designed for rough and medium vacuum operation, i.e. for the pressure range from atmospheric pressure down to 10-4 mbar (7.5... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-11
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 911
High Vacuum Turbo Pumping System -- TPS Mobile
from Agilent Technologies - Vacuum Division

Roll-around cart, high capacity systems, with higher compression ratio and wide pumping speed range. Fourteen possible configurations, with Varian Turbo-V 81, 301, 551 Navigator pumps & Dry Scroll (New unique IDP-3, SH-110, TS 300/600) or DS Mechanical Pumps. Features. Fast, clean, dry pump down... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Application: Industrial
  • Configuration: Vacuum Pump System or Station
STPA Turbomolecular Pump -- STPA2203C
from Edwards Vacuum

Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-7
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3602 to 4662
Turbomolecular Pump -- FF-250 / 1500E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3178
TURBOLAB Smart High Vacuum Pump Systems -- 80 Table Top
from Leybold USA Inc.

The RUTA pump systems described here are vacuum pump systems consisting of Roots vacuum pumps from the RUVAC series in combination with a fore vacuum pump. They have been designed for rough and medium vacuum operation, i.e. for the pressure range from atmospheric pressure down to 10-4 mbar (7.5... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 138
Turbo Pumping Systems -- TPS-flexy
from Agilent Technologies - Vacuum Division

The Agilent TPS-flexy Turbo Pumping System is a powerful do-it-yourself high vacuum system suitable for a wide array of challenging applications. The TPS-flexy package allows you to create a specialized turbo pumping system by combining our high quality components in the best configuration for your... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 0.8475 to 1.84
  • Configuration: Vacuum Pump System or Station
  • Application: Industrial
STPA Turbomolecular Pump -- STPA2503C
from Edwards Vacuum

The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor design, half rack controller and battery free d.c. drive operation provide considerable space saving and class... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3390 to 5297
Turbomolecular Pump -- FF-400 / 3500E
from Drytek Distribution

These turbo pumps are ideal for economical standard applications requiring simple and reliable high vacuum. Features. Economical. Ceramic ball bearings. ISO/CF flange choice [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 4.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 7416
Turbomolecular Pump Systems -- HV-Pump system PT 50
from Leybold USA Inc.

The RUTA pump systems described here are vacuum pump systems consisting of Roots vacuum pumps from the RUVAC series in combination with a fore vacuum pump. They have been designed for rough and medium vacuum operation, i.e. for the pressure range from atmospheric pressure down to 10-4 mbar (7.5... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Application: Industrial
  • Configuration: Individual Vacuum Pump
Turbo Pumping Systems -- TPS-mini
from Agilent Technologies - Vacuum Division

A small and compact, easy-to-use, integrated dry vacuum system, featuring the new Agilent TwisTorr 84 FS Turbo Pump with improved vacuum performance, backed by a dry 10 l/min diaphragm pump. Operability in any position, no maintenance required. Active Gauge capability, large pressure display, PC... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Pumping Speed: 0.8475 to 1.84
  • Configuration: Vacuum Pump System or Station
  • Application: Industrial
STPA Turbomolecular Pump -- STPA3003C
from Edwards Vacuum

The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor design, half rack controller and battery free d.c. drive operation provide considerable space saving and class... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3390 to 5297
Turbomolecular Pumping Station -- FJ-110E
from Drytek Distribution

FJ –100E pumping station is a ready-to-run pumping system. It consists of a KYKY 100 turbomolecular pump, a rotary pump, a controller system, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research & development and other vacuum... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 233
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- 1500 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
STPA Turbomolecular Pump -- STPA3503C
from Edwards Vacuum

The new Edwards STPA3503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor design, half rack controller and battery free d.c. drive operation provide considerable space saving and class... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3390 to 7416
Turbomolecular Pumping Station -- FJ-620E
from Drytek Distribution

FJ –620E pumping station is a ready-to-run pumping system. It consists of a KYKY 620 turbomolecular pump, a rotary pump, a controller system, water break protector, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research &... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1271
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 2800 C/CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4450 to 5615
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 3200 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • UHV / High Vacuum: Turbomolecular
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 6780