Semiconductor Manufacturing High Vacuum Pumps

EPX On-tool High Vacuum Pump -- EPX180L
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
EMT Series Turbomolecular Pump -- EMT390
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 3
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 340 to 720
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- 1500 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
Oil-Free Turbomolecular Pumping Station -- FJ-700E
from Drytek Distribution

FJ –700E pumping station is a ready-to-run pumping system with oil-free design. It consists of a KYKY 700 turbomolecular pump (grease lubrication bearing), a scroll pump (oil-free backing pump), a controller system, a vacuum measurement ,valves and pipelines. Applications: surface... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1483
EPX On-tool High Vacuum Pump -- EPX180LE
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
ET-WS Series Turbo Pump -- ET-300WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 1.00E-6
  • Configuration: Combination
  • Pumping Speed: 636 to 3390
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 1300 C
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Application: Scientific; Manufacturing; Semiconductor
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
Turbomolecular Pumping Station -- FJ-110E
from Drytek Distribution

FJ –100E pumping station is a ready-to-run pumping system. It consists of a KYKY 100 turbomolecular pump, a rotary pump, a controller system, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research & development and other vacuum... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Ultimate Vacuum: 4.50E-9 to 4.50E-8
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 233
EPX On-tool High Vacuum Pump -- EPX180N
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 2800 C/CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4450 to 5615
Turbomolecular Pumping Station -- FJ-620E
from Drytek Distribution

FJ –620E pumping station is a ready-to-run pumping system. It consists of a KYKY 620 turbomolecular pump, a rotary pump, a controller system, water break protector, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research &... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1271
EPX On-tool High Vacuum Pump -- EPX180NE
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 3200 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 6780
EPX On-tool High Vacuum Pump -- EPX500L
from Edwards Vacuum

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-7
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 294
TURBOVAC Mechanical Rotor Suspension -- 1100C
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Application: Industrial; Scientific; Manufacturing; Semiconductor
  • Ultimate Vacuum: 2.20E-10
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2225
EPX On-tool High Vacuum Pump -- EPX500LE
from Edwards Vacuum

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-7
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 294
TURBOVAC Mechanical Rotor Suspension -- 361
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Application: Industrial; Scientific; Manufacturing; Semiconductor
  • Ultimate Vacuum: 7.50E-11
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 848
EPX On-tool High Vacuum Pump -- EPX500N
from Edwards Vacuum

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-7
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 294
TURBOVAC Mechanical Rotor Suspension -- 50
from Leybold USA Inc.

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller... [See More]

  • Application: Industrial; Scientific; Manufacturing; Semiconductor
  • Ultimate Vacuum: 1.50E-10
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 117
EPX On-tool High Vacuum Pump -- EPX500NE
from Edwards Vacuum

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-7
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 294
STP Turbomolecular Pump -- STP-L301
from Edwards Vacuum

Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. [See More]

  • Application: Industrial; Scientific; Semiconductor; Ultrahigh Vacuum Applications
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 551 to 614
STP Turbomolecular Pump -- STP301
from Edwards Vacuum

Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic... [See More]

  • Application: Industrial; Semiconductor; Ultrahigh Vacuum Applications
  • Ultimate Vacuum: 7.50E-9 to 4.88E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 636
STP-XA Turbomolecular Pump -- STP-XA2703C
from Edwards Vacuum

The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
  • Ultimate Vacuum: 7.50E-8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4344 to 5615