Semiconductor Manufacturing High Vacuum Pumps
from Agilent Technologies - Vacuum Products
The Agilent AX-65 Oil diffusion pump is the smallest diffusion pump available in the market and the only pump that is air-cooled. Its vertical finned boiler and high power provide stable pumping and high helium pumping speed. This pump can be ordered with a cold cap or a dense baffle. The pump... [See More]
- Application: Industrial; Scientific; Manufacturing; Semiconductor
- Ultimate Vacuum: 4.88E-8 to 0.0029
- Configuration: Individual Vacuum Pump
- Pumping Speed: 138 to 191
from Agilent Technologies - Vacuum Products
The Agilent HS-16 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 6000 L/s. With its fully optimized vapor jet, the robust boiler design and the thermal protection switches the pump will run without any maintenance for many years. It is available with 16 in. ASA or ISO... [See More]
- Application: Industrial; Manufacturing; Semiconductor
- Ultimate Vacuum: 4.88E-8 to 9.75E-4
- Configuration: Individual Vacuum Pump
- Pumping Speed: 12713 to 15892
from Agilent Technologies - Vacuum Products
The Agilent HS-2 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 160 L/s air, 200 L/s He, H2. With its fully optimized vapor jet and the robust boiler design, the pump will run without any maintenance for many years. It is available with an ASA inlet flange and with 120V... [See More]
- Application: Industrial; Scientific; Manufacturing; Semiconductor
- Ultimate Vacuum: 4.88E-8 to 0.0037
- Configuration: Individual Vacuum Pump
- Pumping Speed: 339 to 424
from Agilent Technologies - Vacuum Products
The Agilent HS-20 Oil Diffusion Pump is a pump with a high throughput and high pumping speed of 10,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 20 in. ASA or ISO 630K... [See More]
- Application: Industrial; Manufacturing; Semiconductor
- Ultimate Vacuum: 4.88E-8 to 0.0013
- Configuration: Individual Vacuum Pump
- Pumping Speed: 21189 to 26486
from Agilent Technologies - Vacuum Products
The Agilent HS-32 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 32,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 32 in. ASA or ISO 800F... [See More]
- Application: Industrial; Manufacturing; Semiconductor
- Ultimate Vacuum: 4.88E-8 to 0.0013
- Configuration: Individual Vacuum Pump
- Pumping Speed: 36657 to 45821
from Agilent Technologies - Vacuum Products
The Agilent Ion CombiNEG 150-1000 and 150-2000 pumps integrate high-capacity D1000 or D2000 non-evaporable getter cartridges inside the 150 L/s VacIon pump. The StarCell or diode ion pump provides high pumping speed for argon and other residual noble gases, while the NEG cartridge provides high... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-11
- Configuration: Individual Vacuum Pump; Combination
- Pumping Speed: 265
from Agilent Technologies - Vacuum Products
The Agilent Ion CombiNEG 40-400 integrates the high-capacity D400-2 non-evaporable cartridge inside the 40 L/s VacIon pump. The NEG cartridge provides extra pumping speed for active gases (up to 400 L/s hydrogen) and the StarCell ion pump provides high pumping speed for argon and other residual... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-11
- Configuration: Individual Vacuum Pump; Combination
- Pumping Speed: 82.64
from Agilent Technologies - Vacuum Products
Agilent Miniature VacIon pumps, often called appendage ion pumps, are offered in a diode or noble diode configuration and provide a pumping speed of 0.4 L/s. These small ion pumps are lightweight, emit a very low magnetic field, and have a maximum baking temperature of 400 °C. Since the... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-9
- Configuration: Individual Vacuum Pump
- Pumping Speed: 0.8476
from Agilent Technologies - Vacuum Products
The Agilent NHS-35 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 50,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 35 in. ASA or ISO 1000F... [See More]
- Application: Industrial; Manufacturing; Semiconductor
- Ultimate Vacuum: 4.88E-8 to 0.0013
- Configuration: Individual Vacuum Pump
- Pumping Speed: 59329 to 74161
from Agilent Technologies - Vacuum Products
Agilent VacIon 10 L/s pumps feature a noble gas optimized diode or noble diode configuration with a high efficiency for residual gases such as hydrogen. These pumps are commonly used in applications where the added pumping speed and ability to handle noble gas loads are important, but a compact size... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-11
- Configuration: Individual Vacuum Pump
- Pumping Speed: 21.19
from Agilent Technologies - Vacuum Products
Agilent VacIon 2 L/s pumps offer effective and vibration-free UHV pumping for maintaining microwave and radio frequency tubes over the operational life of the device. These small, diode element, 2 L/s ion pumps are also used in a wide range of applications in sensitive compact systems or with... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-9
- Configuration: Individual Vacuum Pump
- Pumping Speed: 4.24
from Agilent Technologies - Vacuum Products
The VacIon Plus 1000 L/s pump provides exceptional speed for large systems. Used where ultra high and extreme high vacuum are crucial, it is the choice for particle accelerators and gravitational wave interferometers. This pump is available with three types of elements. Diode elements are for... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-11
- Configuration: Individual Vacuum Pump
- Pumping Speed: 2331
from Agilent Technologies - Vacuum Products
The CombiTSP 150 integrates the VacIon 150 L/s pump, TSP cartridge, and TSP cryopanel to increase pumping speed in the same footprint. The gettering properties of the TSP cartridge deliver faster pump down to ultrahigh and extreme high vacuum (UHV/XHV) enabling lower ultimate base pressure. The... [See More]
- Application: Scientific; Medical / Laboratory; Semiconductor
- Ultimate Vacuum: 7.50E-11
- Configuration: Individual Vacuum Pump; Combination
- Pumping Speed: 1293 to 2924
from EBARA Technologies, Inc.
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]
- Application: Industrial; Semiconductor
- Ultimate Vacuum: 3
- Configuration: Individual Vacuum Pump
- Pumping Speed: 340 to 720
from Edwards Vacuum
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]
- Application: Semiconductor
- Ultimate Vacuum: 7.50E-5
- Configuration: Individual Vacuum Pump
- Pumping Speed: 99.96
from Drytek Distribution
FJ –700E pumping station is a ready-to-run pumping system with oil-free design. It consists of a KYKY 700 turbomolecular pump (grease lubrication bearing), a scroll pump (oil-free backing pump), a controller system, a vacuum measurement ，valves and pipelines. Applications: surface... [See More]
- Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
- Ultimate Vacuum: 4.50E-10 to 4.50E-9
- Configuration: Vacuum Pump System or Station
- Pumping Speed: 1483
from EBARA Technologies, Inc.
The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]
- Application: Industrial; Semiconductor
- Ultimate Vacuum: 1.00E-6
- Configuration: Combination
- Pumping Speed: 636 to 3390
from Edwards Vacuum
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]
- Application: Semiconductor
- Ultimate Vacuum: 7.50E-5
- Configuration: Individual Vacuum Pump
- Pumping Speed: 99.96
from Drytek Distribution
FJ –100E pumping station is a ready-to-run pumping system. It consists of a KYKY 100 turbomolecular pump, a rotary pump, a controller system, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research & development and other vacuum... [See More]
- Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
- Ultimate Vacuum: 4.50E-9 to 4.50E-8
- Configuration: Vacuum Pump System or Station
- Pumping Speed: 233
from Edwards Vacuum
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]
- Application: Semiconductor
- Ultimate Vacuum: 7.50E-5
- Configuration: Individual Vacuum Pump
- Pumping Speed: 99.96
from Drytek Distribution
FJ –620E pumping station is a ready-to-run pumping system. It consists of a KYKY 620 turbomolecular pump, a rotary pump, a controller system, water break protector, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research &... [See More]
- Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
- Ultimate Vacuum: 4.50E-10 to 4.50E-9
- Configuration: Vacuum Pump System or Station
- Pumping Speed: 1271
from Edwards Vacuum
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]
- Application: Semiconductor
- Ultimate Vacuum: 7.50E-7
- Configuration: Individual Vacuum Pump
- Pumping Speed: 294
from Edwards Vacuum
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]
- Application: Semiconductor
- Ultimate Vacuum: 7.50E-7
- Configuration: Individual Vacuum Pump
- Pumping Speed: 294
from Edwards Vacuum
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]
- Application: Semiconductor
- Ultimate Vacuum: 7.50E-7
- Configuration: Individual Vacuum Pump
- Pumping Speed: 294
from Edwards Vacuum
Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. [See More]
- Application: Industrial; Scientific; Semiconductor; Ultrahigh Vacuum Applications
- Ultimate Vacuum: 7.50E-9
- Configuration: Individual Vacuum Pump
- Pumping Speed: 551 to 614
from Edwards Vacuum
Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic... [See More]
- Application: Industrial; Semiconductor; Ultrahigh Vacuum Applications
- Ultimate Vacuum: 7.50E-9 to 4.88E-8
- Configuration: Individual Vacuum Pump
- Pumping Speed: 636
from Edwards Vacuum
The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]
- Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
- Ultimate Vacuum: 7.50E-8
- Configuration: Individual Vacuum Pump
- Pumping Speed: 4344 to 5615
from Edwards Vacuum
The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]
- Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
- Ultimate Vacuum: 7.50E-8
- Configuration: Individual Vacuum Pump
- Pumping Speed: 4873 to 6780
from Edwards Vacuum
The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller... [See More]
- Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
- Ultimate Vacuum: 7.50E-8
- Configuration: Individual Vacuum Pump
- Pumping Speed: 2543 to 3390
from Edwards Vacuum
Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for... [See More]
- Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
- Ultimate Vacuum: 7.50E-7
- Configuration: Individual Vacuum Pump
- Pumping Speed: 3602 to 4662
from Edwards Vacuum
The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor design, half rack controller and battery free d.c. drive operation provide considerable space saving and class... [See More]
- Application: Industrial; Scientific; Semiconductor
- Ultimate Vacuum: 7.50E-9
- Configuration: Individual Vacuum Pump
- Pumping Speed: 3390 to 5297