Magnetic Bearing High Vacuum Pumps

EMT Series Turbomolecular Pump -- EMT390
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 340 to 720
  • Ultimate Vacuum: 3
  • UHV / High Vacuum: Turbomolecular
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- 1500 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
EXT Compound Turbomolecular Vacuum Pump -- EXT556H
from Edwards Vacuum

The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumping technologies with turbomolecular pump stages on a single rotor. The result is a highly reliable pump well suited to applications requiring excellent light gas performance and ultimate pressures <10-10 mbar. With the... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1059 to 1229
  • Ultimate Vacuum: 7.50E-10
  • UHV / High Vacuum: Turbomolecular; Molecular Drag
ET-WS Series Turbo Pump -- ET-300WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • Configuration: Combination
  • Pumping Speed: 636 to 3390
  • Ultimate Vacuum: 1.00E-6
  • UHV / High Vacuum: Turbomolecular
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 1300 C
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
EXT Compound Turbomolecular Vacuum Pump -- EXT75DX
from Edwards Vacuum

The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible without TIC... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 88.99 to 140
  • Ultimate Vacuum: 3.75E-10 to 3.75E-8
  • UHV / High Vacuum: Turbomolecular
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 2800 C/CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4450 to 5615
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
nEXT Turbomolecular Pump -- nEXT240D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 350 to 509
  • Backing Pump: Backing Pump Required (Sold Separately)
TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- W 3200 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 6780
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
nEXT Turbomolecular Pump -- nEXT300D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 593 to 720
  • Backing Pump: Backing Pump Required (Sold Separately)
nEXT Turbomolecular Pump -- nEXT400D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Turbomolecular; Molecular Drag
  • Pumping Speed: 689 to 848
  • Backing Pump: Backing Pump Required (Sold Separately)
STP Turbomolecular Pump -- STP-L301
from Edwards Vacuum

Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 551 to 614
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular
STP Turbomolecular Pump -- STP301
from Edwards Vacuum

Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 636
  • Ultimate Vacuum: 7.50E-9 to 4.88E-8
  • UHV / High Vacuum: Turbomolecular
STP-XA Turbomolecular Pump -- STP-XA2703C
from Edwards Vacuum

The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4344 to 5615
  • Ultimate Vacuum: 7.50E-8
  • UHV / High Vacuum: Turbomolecular
STP-XA Turbomolecular Pump -- STP-XA3203C
from Edwards Vacuum

The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4873 to 6780
  • Ultimate Vacuum: 7.50E-8
  • UHV / High Vacuum: Turbomolecular
STPA Turbomolecular Pump -- STPA1603C
from Edwards Vacuum

The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2543 to 3390
  • Ultimate Vacuum: 7.50E-8
  • UHV / High Vacuum: Turbomolecular
STPA Turbomolecular Pump -- STPA2203C
from Edwards Vacuum

Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3602 to 4662
  • Ultimate Vacuum: 7.50E-7
  • UHV / High Vacuum: Turbomolecular
STPA Turbomolecular Pump -- STPA2503C
from Edwards Vacuum

The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor design, half rack controller and battery free d.c. drive operation provide considerable space saving and class... [See More]

  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3390 to 5297
  • Ultimate Vacuum: 7.50E-9
  • UHV / High Vacuum: Turbomolecular