Wafer Probing System Semiconductor Metrology Instruments Datasheets

NWL200 Wafer Loading System
from Nikon Metrology

The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions... [See More]

  • Form Factor: ProbingSystem; Wafer Loading System
  • Technology: Optical / Imaging
  • Mounting / Loading: Floor
  • Applications: Wafer
Wafer Test Module
from Technic, Inc.

Designer for laboratory testing and sampling, Technic ’s portable tabletop wafer plating test cell features all the tools needed to simulate full scale production. Specifications. 16 ” long, 12 ” wide, 14 ” deep. constructed from ½ ” thick natural polypropylene... [See More]

  • Form Factor: ProbingSystem
  • Applications: Wafer
  • Technology: Wafer sorter or prober
LumiMap Electroluminescence System
from Bruker Corporation

Most Accurate, Reliable Epi Quality Inspection. Accurate and repeatable forward and reverse IV characteristics at Epi wafer stage. Characterizes current-induced spectral intensity, wave length, and spectral width. Provides long-term Vf accuracy and repeatability via patent-pending probe and edge... [See More]

  • Form Factor: ProbingSystem
  • Technology: Wafer sorter or prober
  • Mounting / Loading: Manual loading
  • Applications: Wafer
11000 Series -- 1110XB
from Cascade Microtech, Inc.

Features high-temperature ceramic low-noise probes [See More]

  • Form Factor: ProbingSystem
  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Applications: Wafer
Candela -- CS20
from KLA-Tencor Corporation

The Candela CS20 system simultaneously measures surface reflectivity and topography for automatic defect detection and classification. The system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for... [See More]

  • Form Factor: ProbingSystem
  • Technology: Ellipsometer; Reflectometer; Optical / Imaging
  • Mounting / Loading: Floor
  • Applications: Wafer; CVD / PVD
Semi-Automated Wafer Measurement System -- Proforma™ 200SA
from MTI Instruments Inc.

The Proforma 200SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 75 to 200 mm. wafers, the 200SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Applications: Wafer
Automated Optical Inspection System -- nSPEC™
from Nanotronics Imaging

The Nanotronics Imaging nSpec ® is an inspection device designed for high resolution microscopy and detection of wafer defects. With particular application in silicon carbide and Galium Nitride epi wafers, the nSpec ® offers fast quantification and qualification of defects with detailed... [See More]

  • Form Factor: ProbingSystem
  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Applications: Wafer
IRIS DIE & Wafer Inspection Systems -- EVA Semiautomatic Align, Stepping & Inspection
from SemiProbe

SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]

  • Form Factor: ProbingSystem
  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Applications: Wafer (optional feature)
Laser Diode Bar Tester
from TELOPS, Inc.

The laser diode bar tester picks up each laser diode bar from the tape and measures LIV, wavelength and FFP characteristics for each die. [See More]

  • Form Factor: Monitor or instrument; ProbingSystem
  • Technology: Optical / Imaging; IV system or SMU; Wafer sorter or prober
  • Mounting / Loading: Floor
  • Applications: Packaged IC or substrate; Laser Diode Bar Tester