Optical / Imaging System Semiconductor Metrology Instruments Datasheets

Wafer Edge Inspection
from Micro-Epsilon Group

The wafer edge inspection system measures the surface of the wafer with high precision using three image processing cameras. Defects larger than 300 nm are thus reliably detected. Defective wafers can significantly affect later process steps and result in shutdown of the production. Details. [See More]

  • Technology: Optical / Imaging
  • Applications: Wafer
  • Form Factor: Sensor or sensing element
  • Measurements: Defects, dimples or film residues; Flatness
NWL200 Wafer Loading System
from Nikon Metrology

The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions... [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: Floor
  • Form Factor: ProbingSystem; Wafer Loading System
  • Applications: Wafer
11000 Series -- 1110XB
from Cascade Microtech, Inc.

Features high-temperature ceramic low-noise probes [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem
  • Applications: Wafer
2360
from KLA-Tencor Corporation

Uses a shorter wavelength light source and smaller pixel size to provide the improved imaging inspection sensitivity needed for 90-nm node and below design rules. Selectable UV illumination (Broadband UV, I-Line and G-Line) combines with high numerical aperture to deliver superior resolution and... [See More]

  • Technology: Optical / Imaging; Ultraviolet Illumination
  • Applications: Wafer
  • Form Factor: ProbingSystem
  • Measurements: Defects, dimples or film residues
SigmaTech Wafer Metrology Systems -- UltraMap-100B
from MicroSense, LLC

Benchtop, automated Thickness measurement systems. Cassette to cassette or manual loading. Exclusive sensing technology with dual White light chromatic coding probes (10nm resolution). Wafer 2 ” to 4 ” (50 to 100mm). Thickness range: 50um to 3mm. Throughput up to 100W/hours. 2D & 3D... [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Automated Optical Inspection System -- nSPEC™
from Nanotronics Imaging

The Nanotronics Imaging nSpec ® is an inspection device designed for high resolution microscopy and detection of wafer defects. With particular application in silicon carbide and Galium Nitride epi wafers, the nSpec ® offers fast quantification and qualification of defects with detailed... [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem
  • Applications: Wafer
Wafer Inspection System -- MX51
from Olympus America Inc.

The Olympus MX51 industrial inspection microscope is optimized for the inspection requirements of a variety of electronic components including semiconductor wafer inspection. Its compact size, ease of operation, 6"x6" stage travel and cost effectiveness make the MX51 an ideal inspection microscope... [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: In-line (optional feature); Manual loading
  • Form Factor: Monitor or instrument
  • Applications: Wafer
IRIS DIE & Wafer Inspection Systems -- EVA Semiautomatic Align, Stepping & Inspection
from SemiProbe

SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem
  • Applications: Wafer (optional feature)
Laser Diode Bar Tester
from TELOPS, Inc.

The laser diode bar tester picks up each laser diode bar from the tape and measures LIV, wavelength and FFP characteristics for each die. [See More]

  • Technology: Optical / Imaging; IV system or SMU; Wafer sorter or prober
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument; ProbingSystem
  • Applications: Packaged IC or substrate; Laser Diode Bar Tester
MS Series -- E1S
from ULVAC Technologies, Inc.

High temperature heating imaging system, radiant heating generates no dust [See More]

  • Technology: Optical / Imaging
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer; CVD / PVD
Mask Aligner -- 15912
from Unitron Ltd.

Modular microscope system that readily adapts to instrumentation [See More]

  • Technology: Optical / Imaging
  • Applications: Wafer
  • Form Factor: Mask Aligner
  • Features: Noncontact; Non-destructive
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Technology: Optical / Imaging
  • Applications: Wafer; CVD / PVD; Photolithography
  • Form Factor: Sensor or sensing element
  • Features: Noncontact; Non-destructive