DC Brushless Servo Z-Axis Stages
from Aerotech, Inc.
Design Features. Designed for high-performance scanning and inspection. Active air preload on all air-bearing surfaces. Linear encoder feedback provides subnanometer resolution. High stiffness for heavy loads and excellent geometrical performance. Four models with travels from 50 to 200 mm. Integral... [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 33.08
- Z-Axis Travel: 1.97
- Rated Speed: 11.81
from Aerotech, Inc.
Design Features. Unique Z stage design incorporates fully preloaded air bearings. Less than or equal to ??2 arc sec roll, pitch and yaw over full travel. Submicron closed-loop positioning. Travel options from 50 to 150 mm. Precision-ground ball-screw-drive eliminates the need for special... [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 33.08
- Z-Axis Travel: 1.97 to 5.91
- Rated Speed: 1.97
from Aerotech, Inc.
Design Features. Long-life linear guide bearing system. Submicron closed-loop positioning. Low-cost, high-performance stage. 6, 13 and 25 mm travel models. Precision-ground ball screw. Integral or removable motor [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 55.12
- Z-Axis Travel: 0.2362 to 0.9843
- Rated Speed: 1.97
from Aerotech, Inc.
Design Features. High-load lift stage with aperture. Submicron closed-loop positioning. Excellent pitch and yaw characteristics over full travel. 5 mm or 10 mm travel; custom designs for alternate travels available. Optional cleanroom and ESD protection. Precision-ground ball screw for high... [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 298
- Z-Axis Travel: 0.1969 to 0.3937
- Rated Speed: 0.7874
from Aerotech, Inc.
Design Features. Nanometer performance with 5 mm vertical travel. High resolution (2 nm), repeatability (100 nm) and accuracy (200 nm). In-position stability of <2 nm. Anti-creep crossed-roller bearings. High dynamic performance [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 6.62
- Z-Axis Travel: 0.1969
- Rated Speed: 2.95
from Aerotech, Inc.
Design Features. Nanometer performance with 3 mm vertical travel. High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm). In-position stability of <1 nm. Anti-creep crossed-roller bearings. High dynamic performance [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 3.31
- Z-Axis Travel: 0.1181
- Rated Speed: 2.95 to 5.91
from Aerotech, Inc.
Design Features. High load-carrying capability. High stiffness. Noncontact direct-drive. High accuracy. Integral pneumatic counterbalance. Easily configured with ARA1000 for multi-axis applications [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 110
- Z-Axis Travel: 0.0394 to 0.0787
- Base Length: 14.13
from Aerotech, Inc.
Design Features. Low profile for space-conscious applications. Noncontact direct-drive. High repeatability. Integral pneumatic counterbalance. Easily configured with WaferMax T for multi-axis applications [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 33.08
- Z-Axis Travel: 0.1969
- Rated Speed: 0.1575
from Aerotech, Inc.
Design Features. Nanometer performance in a large travel format (35 and 60 mm). High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm). In-position stability of <2 nm. Anti-creep crossed-roller bearings. High dynamic performance [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 22.05
- Z-Axis Travel: 1.38 to 2.36
- Rated Speed: 7.87
from Aerotech, Inc.
Design Features. Nanometer performance in a large travel format (25 and 50 mm). High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm). In-position stability of <2 nm. Anti-creep crossed-roller bearings. High dynamic performance [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 11.03
- Z-Axis Travel: 0.9843 to 1.97
- Rated Speed: 7.87
from Aerotech, Inc.
Design Features. Extreme load carrying capability, up to 450 kg, in a compact package. Small stage footprint. High resolution to 0.064 µm. Lead screw does not back-drive, allowing "set and forget" operation and excellent in-position stability. Vacuum compatible [See More]
- Motor Type: DC Brushless Servo
- Carriage Load: 66.15 to 992
- Z-Axis Travel: 1.97 to 7.87
- Rated Speed: 0.1969