Electric - Motorized Vacuum Valves
from VAT, Inc.
Butterfly pressure control valves for downstream applications. Very fast and strong actuator. Powerful integrated controller. Automatic maintenance indication. [See More]
- Valve Actuation: Motorized
- Port OD: 1.5 to 8
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Area of application: Semiconductors, FPD and industrial processes, particularly CVD systems. Description: Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance. Nominal inside diameters (ID): 40 (1... [See More]
- Valve Actuation: Motorized
- Port OD: 1.5 to 4
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
DN 16 - 100. These products are subject to the Non Proliferation Treaty (NPT). Control and leaktight closing. Selection of flow range by replaceable needle/nozzle unit. Increased safety by evacuation of bellows interior. [See More]
- Valve Actuation: Manual; Motorized
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Type: Angle
- Temperature Range: 248
from VAT, Inc.
High vacuum angle valve with bellows feedthrough and large conductance. Features. Modular design. Robust, compact. Easy cleaning [See More]
- Valve Actuation: Motorized
- Port OD: 0.3750 to 1.5
- Type: Angle
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
High vacuum inline valve with bellows feedthrough and large conductance. Differential pressure resistant [See More]
- Valve Actuation: Motorized
- Port OD: 0.6250 to 1.5
- Type: Inline
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free... [See More]
- Valve Actuation: Motorized
- Port OD: 4 to 16
- Type: Control Valve
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)