ISO Vacuum Valves
from Nor-Cal Products, Inc. - The Vacuum Experts
Traditional 3-position valves accomplish vacuum isolation and rough pressure control via an adjustable air cylinder. Unfortunately, the single, mid-open set point is neither accurate nor repeatable. Nor-Cal?s 3-position throttling pendulum valve uses the patented Intellisys? closed loop control... [See More]
- Port Flange & Seal Type: ISO flange; JIS
- ISO Port Flange Size: NW 160; NW 200; NW 250; NW 320
- Type: Pendulum Valve
- Valve Actuation: Pneumatic
from Edwards Vacuum
The AV10K is manufactured in aluminum alloy. It has a control knob attached to a screw-actuated plunger: turn the control knob clockwise to close the valve. A nitrile 'O' ring seals the plunger to the valve body. The valve can be pipeline supported only, and is connected to the vacuum system with an... [See More]
- Port Flange & Seal Type: ISO flange
- ISO Port Flange Size: NW 10
- Type: Screw Valve
- Temperature Range: ? to 32
from VACUUBRAND, Inc.
The VS B series valves are butterfly-type valves. A circular valve plate with a sealing ring on the circumference rotates around an axis at right angle to the valve axis. As a result, the valves leave virtually the entire cross section free, offering very good conductance. The valve bodies are made... [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 2.48
- Type: Butterfly; Inline; Straight Through
- ISO Port Flange Size: NW 50; NW 63
from VAT, Inc.
Butterfly pressure control valves for downstream applications. Very fast and strong actuator. Powerful integrated controller. Automatic maintenance indication. [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 1.5 to 8
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Genesis stainless steel valves offer million cycle reliability, combined with an integrated low cost soft start option. Genesis stainless steel valves are electropolished to optimize conductance. [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.7500 to 4
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50; NW 80; NW 100
from Edwards Vacuum
The IPVA10EK is a solenoid operated valve designed for automatic admit tance of air or vent gas into a vacuum system. The valve has two ports with NW flanges. One of the valve ports is connected to the vacuum system, the other port can be left open to atmosphere or connected to a vent gas... [See More]
- Port Flange & Seal Type: ISO flange
- ISO Port Flange Size: NW 10
- Type: Relief
- Temperature Range: -4 to 131
from VAT, Inc.
Area of application: Semiconductors, FPD and industrial processes, particularly CVD systems. Description: Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance. Nominal inside diameters (ID): 40 (1... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 1.5 to 4
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal?s 3-position gate valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed, and an adjustable third position. One solenoid controls the fully open and fully closed positions, while a second solenoid controls the third... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 50; NW 63; NW 80; NW 100; NW 160
- Type: Gate
- Valve Actuation: Pneumatic
from Edwards Vacuum
Edwards backing/roughing valves with ISO NW roughing and forepump terminations feature manual or pneumatic actuation. They combine the function of separate backing/roughing valves in one integral 3 port unit. A flexible neoprene connector is supplied for the backing connection. The roughing and... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 16
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc. [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange
- Port OD: 2.5 to 6
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal aluminum bodied pendulum valves offer the user an alternative to traditional linear gate valves. Fewer moving parts and less metal to metal contact means reduced particle generation and wear. Isolation pendulum valves are also often possible to install in tighter spaces due to their compact... [See More]
- Port Flange & Seal Type: ISO flange
- ISO Port Flange Size: NW 160; NW 200; NW 250; NW 320
- Type: Pendulum Valve
- Leak Rate: 1.00E-9
from Edwards Vacuum
Edwards backing/roughing valves with ISO NW roughing and forepump terminations feature manual or pneumatic actuation. They combine the function of separate backing/roughing valves in one integral 3 port unit. A flexible neoprene connector is supplied for the backing connection. The roughing and... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 25
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange; Metal Seal
- Port OD: 2.5 to 8
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed manual valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 3
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80
from Edwards Vacuum
Ball valves are popular in applications where fast action and full bore pumping are needed. The Edwards IBV series valves combine these practical everyday features plus ease of use and economy in a high specification design. Manufactured in 316L stainless steel with PTFE seats they deliver robust... [See More]
- Port Flange & Seal Type: ISO flange; BSP
- ISO Port Flange Size: NW 16
- Type: Ball
- Vacuum / Pressure Range: Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
High vacuum angle valves with bellows feedthrough. Modular design. Features. Modular design. Very low outgassing rate due to body machined from extruded aluminum. Easy cleaning [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 3
- Type: Angle
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Quarter-turn actuation, small footprint and the shortest possible gas path make manual butterfly valves the preferred choice for many applications. O-ring sealed plate and stem provide a low-cost alternative to bellows sealed gate valves. Manual butterfly valves have a vacuum range of 1x10-9 Torr. [See More]
- Port Flange & Seal Type: Proprietary ConflatTM type flange or fitting; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.7500 to 1.5
- Type: Butterfly
- ISO Port Flange Size: NW 16; NW 40
from Edwards Vacuum
The Edwards GV range of stainless steel bellows sealed gate valves are designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere. These superior quality valves offer high vacuum integrity coupled with maximum conductance. [See More]
- Port Flange & Seal Type: ISO flange; ISO-CF (Metal Seal)
- Port OD: ? to 1.5
- Type: Gate
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV, < 10-8 torr)
from VAT, Inc.
High vacuum angle valve with bellows feedthrough and large conductance. Features. Modular design. Robust, compact. Easy cleaning [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 1.5
- Type: Angle
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed manual valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 3
- Type: Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80
from Edwards Vacuum
The Edwards GV range of stainless steel bellows sealed gate valves are designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere. These superior quality valves offer high vacuum integrity coupled with maximum conductance. This product is... [See More]
- Port Flange & Seal Type: ISO flange
- Port OD: ? to 1.5
- Type: Gate
- ISO Port Flange Size: NW 40
from VAT, Inc.
The HV stainless steel gate valve with bellows is designed for harsh process conditions. The grease free wedge valve design allows multiple differential pressure (1 bar) openings even in a dirty and a dusty environment. Further features are the quick and easy cleaning of the gate seal and the... [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 2 to 6
- Type: Gate
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed manual valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ISO flange
- Port OD: 0.7500 to 3
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 63; NW 80
from Edwards Vacuum
The LV10K needle valve provides fine control of gas bleed into a vacuum chamber or a regulated leak to control pressure in a vacuum system and is suitable for gas admission down to 10- 5 mbar / 8 x 10-6 Torr. Suitable for pipeline or panel mounting. [See More]
- Port Flange & Seal Type: ISO flange
- ISO Port Flange Size: NW 10
- Type: Needle Valve
- Vacuum / Pressure Range: Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These HV gate valves are well suited for process systems. Key features are compactness, high cycle life due to the rotary feedthrough, proved VATLOCK sealing principle, six possible actuator positions, low particle count. [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange
- Port OD: 2.5 to 16
- Type: Gate
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed manual valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 3
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80
from Edwards Vacuum
The PVMK is a quick acting, in-line or right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to operate... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 10
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Area of application: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications. Description: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications. Nominal inside diameters (ID): 200 (8" ) - 320 (12"). Body material: Stainless steel [See More]
- Port Flange & Seal Type: ISO flange
- Port OD: 8 to 12
- Type: Gate
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed manual valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 3
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80
from Edwards Vacuum
The PVMKA (aluminum body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 16
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Standard HV inline valve with bellows feedthrough. For large gas flows we recommend Series 24. Features. Modular design. Robust, compact. Easy cleaning [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.6250 to 4
- Type: Inline
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic gate valves have a vacuum range of 1x10-9 Torr. Nor-Cal gate valves have a slim profile, shorting the gas path. Nor-Cal gate valves are electropolished inside and out to improve corrosion resistance. [See More]
- Port Flange & Seal Type: Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 40 ; NW 50; NW 63; NW 80; NW 100; NW 160; NW 200; NW 250; NW 320
- Type: Gate
- Leak Rate: 2.00E-9
from Edwards Vacuum
The PVMKA (aluminum body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 25
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
High vacuum inline valve with bellows feedthrough and large conductance. Differential pressure resistant [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.6250 to 1.5
- Type: Inline
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
The N Series Valves feature high cycle life and a small footprint in right-angle and in-line body styles. Constructed of Stainless Steel with NW16, 25, 40 and 50 flanges. All N-series valves are pneumatically actuated and are available with optional air solenoids and three types of open/close... [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.7500 to 1.5
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50
from Edwards Vacuum
The PVMKA (aluminum body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 40
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These valves are for various applications. Mostly, they are used for vacuum pump isolation (cryo pumps, oil diffusion pumps). Features. Proved VATLOCK configuration. Assembly in cleanroom according to UHV quality standards. DN 900 - 1250 HV with split body: hence extremely short height for... [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 16 to 50
- Type: Gate
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
The N Series Valves feature high cycle life and a small footprint in right-angle and in-line body styles. Constructed of Stainless Steel with NW16, 25, 40 and 50 flanges. All N-series valves are pneumatically actuated and are available with optional air solenoids and three types of open/close... [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.7500 to 1.5
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50
from Edwards Vacuum
The PVMKS (stainless steel body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 50
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These valves are for various applications. Mostly, they are used for vacuum pump isolation (cryo pumps, oil diffusion pumps). Features. Proved VATLOCK configuration. Assembly in cleanroom according to UHV quality standards. DN 900 - 1250 HV with split body: hence extremely short height for... [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 16 to 50
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 4
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80; NW 100
from Edwards Vacuum
The range of single acting cylinder, spring return pipeline valves is designed for high speed actuation from standard pneumatic lines, and are offered in sizes NW10, 16, 25, 40 and 50. The NW16, 25, 40 and 50 versions of the valve are available in both right-angle and in-line styles, to give you... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 10
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These large pendulum valves are for many applications. Besides the main field of application - FPD (Flat Panel Display) production systems - they are often used in the coating industry. Key features are compactness, low vibration during opening and closing, low price. [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange
- Port OD: 16 to 20
- Type: Pendulum
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 4
- Type: Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80; NW 100
from Edwards Vacuum
The QSB quarter swing valves are compact, quick acting, high conductance isolation valves. The QSB valves have a polished, stainless steel, ISO flanged body with fluoroelastomer 'O' ring sealed valve plate and shaft. The valve plate 'O' ring groove is vented to help maintain a stable high vacuum. [See More]
- Port Flange & Seal Type: ISO flange; ISO100
- Port OD: ? to 4.02
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Mini vacuum gate valves are small, light-weight and low-priced. Features. VATLOCK configuration. O-ring shaft seal. Vulcanized gate seal [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.6250 to 2
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting; ASA; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 0.3750 to 4
- Type: Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80; NW 100
from Edwards Vacuum
The QSB quarter swing valves are compact, quick acting, high conductance isolation valves. The QSB valves have a polished, stainless steel, ISO flanged body with fluoroelastomer 'O' ring sealed valve plate and shaft. The valve plate 'O' ring groove is vented to help maintain a stable high vacuum. [See More]
- Port Flange & Seal Type: ISO flange; ISO63
- Port OD: ? to 2.48
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants. Features. MONOVAT configuration. Bellows-sealed. Mechanism free of lubricants [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2"); Metal Seal
- Port OD: 1 to 2
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic gate valves have a vacuum range of 1x10-9 Torr. Nor-Cal gate valves have a slim profile, shorting the gas path. Nor-Cal gate valves are electropolished inside and out to improve corrosion resistance. [See More]
- Port Flange & Seal Type: ASA; ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 16; NW 40 ; NW 50; NW 63; NW 80; NW 100; NW 160; NW 200; NW 250; NW 320; NW 400
- Type: Gate
- Leak Rate: 2.00E-9
from Edwards Vacuum
Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination. Slave and master valve combination allows slow initial pumping to minimise disturbance. Both slave and master... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 16
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the same proved sealing principle and quality as the previous types, they are lower-priced. Further features are low... [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange
- Port OD: 2.5 to 16
- Type: Pendulum
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination. [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 25
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free... [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 4 to 16
- Type: Control Valve
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
Edwards' aluminum LCPVEK valves are designed for vacuum applications which need a compact, simple, solenoid operation valve to control gas flow. These economical valves are ideal for a number of duties ranging from simple laboratory pump isolation to OEM vacuum system integration and design. Their... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 16
- Type: Angle
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr)
from VAT, Inc.
Offers reduced turbulence during initial pump down giving low particle count. Adjustable soft-pump opening to reduce the turbulences during pump-down and venting [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2")
- Port OD: 2.5 to 6
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
Edwards' aluminum LCPVEK valves are designed for vacuum applications which need a compact, simple, solenoid operation valve to control gas flow. These economical valves are ideal for a number of duties ranging from simple laboratory pump isolation to OEM vacuum system integration and design. Their... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 25
- Type: Angle
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr)
from VAT, Inc.
These standard UHV gate valves are for many applications. They are bellows sealed and their mechanism is free of lubricants. The approved VATLOCK sealing principle ensures a virtually shock-free locking. [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ASA; ISO flange; Metal Seal
- Port OD: 2.5 to 12
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 10
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Vacuum angle valves with shaft feedthrough. No actuator parts in the vacuum. Therefore, low particle. Modular design. Angle valve with shaft feedthrough for large gas flows [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 0.3750 to 3
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 16
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
These low-cost gate valves are designed for very easy maintenance. Features. High quality shaft feedthrough. VATLOCK configuration. Low shock during operation [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 2.5 to 12
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 25
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Inline valve with shaft feedthrough for large gas flows. Features. Modular design. Robust, compact. Easy cleaning [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 0.6250 to 4
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 40
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Vatterfly valves designed for a high conductance. No mechanism in the vacuum. Pneumatic actuator, with rotary feedthrough. For contaminating and aggressive applications, mechanism in the actuator. Compact alternative to gate valves [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 2.5 to 8
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
from Edwards Vacuum
Edwards SP Speedivalves are diaphragm sealed in-line, isolation valves. The construction consists essentially of a flexible elastomer dia phragm which is sealed onto a lightly polished seat by a screw thread mechanism. The mechanism is isolated from the system by the diaphragm resulting in an... [See More]
- Port Flange & Seal Type: ISO flange; ISO-KF (Small Clamped, <2")
- ISO Port Flange Size: NW 10
- Type: Diamphragm
- Vacuum / Pressure Range: Elevated or positive pressures (>> 760 torr)
from VAT, Inc.
Vatterfly valves with extended body designed for a high conductance. No mechanism in the vacuum. Pneumatic actuator, with rotary feedthrough. For contaminating and aggressive applications, mechanism in the actuator. Compact alternative to gate valves [See More]
- Port Flange & Seal Type: Elastomeric / O-ring; ISO flange
- Port OD: 2.5 to 8
- Type: Butterfly
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)