Actuator Shaft / Stem Bellows Vacuum Valves
from Edwards Vacuum
Edwards backing/roughing valves with ISO NW roughing and forepump terminations feature manual or pneumatic actuation. They combine the function of separate backing/roughing valves in one integral 3 port unit. A flexible neoprene connector is supplied for the backing connection. The roughing and... [See More]
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Temperature Range: 158
from VAT, Inc.
All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring closing actuator. Manual closing is performed with a specified torque. Bakeable to 300... [See More]
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Temperature Range: 842
from Edwards Vacuum
Edwards backing/roughing valves with ISO NW roughing and forepump terminations feature manual or pneumatic actuation. They combine the function of separate backing/roughing valves in one integral 3 port unit. A flexible neoprene connector is supplied for the backing connection. The roughing and... [See More]
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Temperature Range: 158
from VAT, Inc.
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic actuator. Bakeable to 300 °C in open and closed position. Self-locking in closed position. [See More]
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 10
- Temperature Range: 572
from Edwards Vacuum
The Edwards GV range of stainless steel bellows sealed gate valves are designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere. These superior quality valves offer high vacuum integrity coupled with maximum conductance. [See More]
- Type: Gate
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV, < 10-8 torr)
- Port OD: ? to 1.5
- Temperature Range: 302 to 482
from VAT, Inc.
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic actuator. Bakeable to 300 °C in open and closed position. Self-locking in closed position. [See More]
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Temperature Range: 572
from Edwards Vacuum
The Edwards GV range of stainless steel bellows sealed gate valves are designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere. These superior quality valves offer high vacuum integrity coupled with maximum conductance. This product is... [See More]
- Type: Gate
- ISO Port Flange Size: NW 40
- Port OD: ? to 1.5
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV, < 10-8 torr)
from VAT, Inc.
DN 25 - 160. These products are subject to the Non Proliferation Treaty (NPT). Body made of aluminum or stainless steel. Bellows feedthrough with additional shaft seal for safety. [See More]
- Type: Angle
- Temperature Range: 248
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port Flange & Seal Type: Elastomeric / O-ring
from Edwards Vacuum
The range of single acting cylinder, spring return pipeline valves is designed for high speed actuation from standard pneumatic lines, and are offered in sizes NW10, 16, 25, 40 and 50. The NW16, 25, 40 and 50 versions of the valve are available in both right-angle and in-line styles, to give you... [See More]
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 10
- Temperature Range: 41 to 212
from VAT, Inc.
Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stoppers for protecting experiments from beam load. Power consumption up to 6 kW due to watercooled copper plate. No welded or soldered seam between water pipes and... [See More]
- Type: Shutter Valve
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Temperature Range: 482
from Edwards Vacuum
Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination. Slave and master valve combination allows slow initial pumping to minimise disturbance. Both slave and master... [See More]
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Temperature Range: 41 to 212
from VAT, Inc.
Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stopper without body for direct integration into vacuum systems. For protecting experiments from beam load. Power consumption up to 6 kW due to watercooled copper plate. [See More]
- Type: Shutter Valve
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Temperature Range: 482
from Edwards Vacuum
Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination. [See More]
- Type: Inline
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Temperature Range: 41 to 212
from VAT, Inc.
DN 16 - 100. These products are subject to the Non Proliferation Treaty (NPT). Control and leaktight closing. Selection of flow range by replaceable needle/nozzle unit. Increased safety by evacuation of bellows interior. [See More]
- Type: Angle
- Temperature Range: 248
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port Flange & Seal Type: Metal Seal
from Edwards Vacuum
Edwards' aluminum LCPVEK valves are designed for vacuum applications which need a compact, simple, solenoid operation valve to control gas flow. These economical valves are ideal for a number of duties ranging from simple laboratory pump isolation to OEM vacuum system integration and design. Their... [See More]
- Type: Angle
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr)
- ISO Port Flange Size: NW 16
- Temperature Range: 41 to 113
from VAT, Inc.
All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 300 °C in the open and... [See More]
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 2.5
- Temperature Range: 572
from Edwards Vacuum
Edwards' aluminum LCPVEK valves are designed for vacuum applications which need a compact, simple, solenoid operation valve to control gas flow. These economical valves are ideal for a number of duties ranging from simple laboratory pump isolation to OEM vacuum system integration and design. Their... [See More]
- Type: Angle
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr)
- ISO Port Flange Size: NW 25
- Temperature Range: 41 to 113
from VAT, Inc.
Fast closing slot shutter for protecting storage rings of synchrotrons and particle accelerators from air inrush. Closing to a small leak in milliseconds. For UHV and extreme UHV systems. Electropneumatic actuator designed for smooth closing. Controlled via controller. [See More]
- Type: Shutter Valve
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 1.5 to 6
- Temperature Range: 572
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 10
- Temperature Range: 50 to 122
from VAT, Inc.
Analysis of the residual gases at base pressure with the gate valve open. Line of sight between analyzer and process chamber. With bypass valves. Pressure reduction of the process gas by means of two bypass valves with orifice. Analysis of the residual gases at base pressure with the gate valve... [See More]
- Type: Gate
- Port Flange & Seal Type: Elastomeric / O-ring; Metal Seal
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Valve Seat Seal: Elastomeric / O-ring; Metal
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Temperature Range: 50 to 122
from VAT, Inc.
Analysis of the residual gases at base pressure with the gate valve open. Very compact. Gate valve: see section «A », Mini UHV gate valves Series 010. Bypass valves exchangeable: type NUPRO with seat made of Kel-F (bakeable to 90 °C), with manual actuator: type SS-4BKT, with... [See More]
- Type: Gate
- Port Flange & Seal Type: Elastomeric / O-ring; Metal Seal
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Valve Seat Seal: Elastomeric / O-ring; Metal
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Temperature Range: 50 to 122
from VAT, Inc.
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc [See More]
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 8
- Temperature Range: 482
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Type: Inline (optional feature); Angle (optional feature)
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 40
- Temperature Range: 50 to 122
from VAT, Inc.
High vacuum angle valves with bellows feedthrough. Modular design. Features. Modular design. Very low outgassing rate due to body machined from extruded aluminum. Easy cleaning [See More]
- Type: Angle
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.3750 to 3
- Temperature Range: 302
from VAT, Inc.
High vacuum angle valve with bellows feedthrough and large conductance. Features. Modular design. Robust, compact. Easy cleaning [See More]
- Type: Angle
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.3750 to 1.5
- Temperature Range: 122
from VAT, Inc.
The HV stainless steel gate valve with bellows is designed for harsh process conditions. The grease free wedge valve design allows multiple differential pressure (1 bar) openings even in a dirty and a dusty environment. Further features are the quick and easy cleaning of the gate seal and the... [See More]
- Type: Gate
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2 to 6
- Temperature Range: 302
from VAT, Inc.
Area of application: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications. Description: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications. Nominal inside diameters (ID): 200 (8" ) - 320 (12"). Body material: Stainless steel [See More]
- Type: Gate
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 8 to 12
- Temperature Range: 302
from VAT, Inc.
Standard HV inline valve with bellows feedthrough. For large gas flows we recommend Series 24. Features. Modular design. Robust, compact. Easy cleaning [See More]
- Type: Inline
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 4
- Temperature Range: 302
from VAT, Inc.
High vacuum inline valve with bellows feedthrough and large conductance. Differential pressure resistant [See More]
- Type: Inline
- Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 1.5
- Temperature Range: 122
from VAT, Inc.
These valves are for various applications. Mostly, they are used for vacuum pump isolation (cryo pumps, oil diffusion pumps). Features. Proved VATLOCK configuration. Assembly in cleanroom according to UHV quality standards. DN 900 - 1250 HV with split body: hence extremely short height for... [See More]
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 16 to 50
- Temperature Range: 302
from VAT, Inc.
Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants. Features. MONOVAT configuration. Bellows-sealed. Mechanism free of lubricants [See More]
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 1 to 2
- Temperature Range: 482
from VAT, Inc.
Offers reduced turbulence during initial pump down giving low particle count. Adjustable soft-pump opening to reduce the turbulences during pump-down and venting [See More]
- Type: Angle
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Temperature Range: 302
from VAT, Inc.
Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber. [See More]
- Type: Transfer Valve
- Temperature Range: 392
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port Flange & Seal Type: Elastomeric / O-ring
from VAT, Inc.
Transfer valves for load lock / process module isolation. The valves work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. [See More]
- Type: Transfer Valve
- Temperature Range: 392
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port Flange & Seal Type: Elastomeric / O-ring
from VAT, Inc.
These standard UHV gate valves are for many applications. They are bellows sealed and their mechanism is free of lubricants. The approved VATLOCK sealing principle ensures a virtually shock-free locking. [See More]
- Type: Gate
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 12
- Temperature Range: 482