Ultra-high Vacuum (< 10-8 torr) Vacuum Valves
from VACUUBRAND, Inc.
High vacuum, helium leak-tested right angle valves VE have stainless steel bellows which seals the drive mechanism without any gap on the vacuum. Due to the screw-thread mechanism, these valves offer a certain control of conductance and are mountable in any position because of their air tightness in... [See More]
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV, < 10-8 torr)
- Port OD: 0.6299
- Type: Angle
- ISO Port Flange Size: NW 16
from Edwards Vacuum
Edwards backing/roughing valves with ISO NW roughing and forepump terminations feature manual or pneumatic actuation. They combine the function of separate backing/roughing valves in one integral 3 port unit. A flexible neoprene connector is supplied for the backing connection. The roughing and... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Type: Angle
- Temperature Range: 158
from Nor-Cal Products, Inc. - The Vacuum Experts
Genesis valves offer million cycle reliability combined with a highly configurable valve body. Aluminum modular valves have a small footprint, allowing them to be placed where they are needed. Available with an integrated low cost soft-start option. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 2
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50
from VAT, Inc.
All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring closing actuator. Manual closing is performed with a specified torque. Bakeable to 300... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Type: Angle
- Temperature Range: 842
from Edwards Vacuum
Edwards backing/roughing valves with ISO NW roughing and forepump terminations feature manual or pneumatic actuation. They combine the function of separate backing/roughing valves in one integral 3 port unit. A flexible neoprene connector is supplied for the backing connection. The roughing and... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Type: Angle
- Temperature Range: 158
from Nor-Cal Products, Inc. - The Vacuum Experts
Genesis stainless steel valves offer million cycle reliability, combined with an integrated low cost soft start option. Genesis stainless steel valves are electropolished to optimize conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 4
- Type: Angle; Poppet Valve
- Leak Rate: 1.00E-9
from VAT, Inc.
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic actuator. Bakeable to 300 °C in open and closed position. Self-locking in closed position. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 10
- Type: Gate
- Temperature Range: 572
from Edwards Vacuum
The Edwards GV range of stainless steel bellows sealed gate valves are designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere. These superior quality valves offer high vacuum integrity coupled with maximum conductance. [See More]
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV, < 10-8 torr)
- Port OD: ? to 1.5
- Type: Gate
- Temperature Range: 302 to 482
from Nor-Cal Products, Inc. - The Vacuum Experts
Genesis stainless steel valves offer million cycle reliability, combined with an integrated low cost soft start option. Genesis stainless steel valves are electropolished to optimize conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 4
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50; NW 80; NW 100
from VAT, Inc.
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic actuator. Bakeable to 300 °C in open and closed position. Self-locking in closed position. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Type: Gate
- Temperature Range: 572
from Edwards Vacuum
The Edwards GV range of stainless steel bellows sealed gate valves are designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere. These superior quality valves offer high vacuum integrity coupled with maximum conductance. This product is... [See More]
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV, < 10-8 torr)
- Port OD: ? to 1.5
- Type: Gate
- ISO Port Flange Size: NW 40
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal's bakeable all-metal seal angle valves are intended for use in UHV or cryogenic applications where temperature extremes preclude the use of our elastomer seal valves. Approved for use in beamline facilities, these valves have a temperature operating range from -250c to 400c and a vacuum... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 1.5
- Type: Leak
- Leak Rate: 1.00E-10
from VAT, Inc.
DN 25 - 160. These products are subject to the Non Proliferation Treaty (NPT). Body made of aluminum or stainless steel. Bellows feedthrough with additional shaft seal for safety. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Temperature Range: 248
- Type: Angle
- Port Flange & Seal Type: Elastomeric / O-ring
from Edwards Vacuum
The PVMK is a quick acting, in-line or right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to operate... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 10
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed manual valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 3
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80
from VAT, Inc.
Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stoppers for protecting experiments from beam load. Power consumption up to 6 kW due to watercooled copper plate. No welded or soldered seam between water pipes and... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Type: Shutter Valve
- Temperature Range: 482
from Edwards Vacuum
The PVMKA (aluminum body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed manual valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 3
- Type: Angle; Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stopper without body for direct integration into vacuum systems. For protecting experiments from beam load. Power consumption up to 6 kW due to watercooled copper plate. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Type: Shutter Valve
- Temperature Range: 482
from Edwards Vacuum
The PVMKA (aluminum body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed manual valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 3
- Type: Angle; Poppet Valve
- Temperature Range: 302 to 399
from VAT, Inc.
Butterfly pressure control valves for downstream applications. Very fast and strong actuator. Powerful integrated controller. Automatic maintenance indication. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 1.5 to 8
- Type: Butterfly
- Temperature Range: 302
from Edwards Vacuum
The PVMKA (aluminum body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are designed to... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 40
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed manual valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.6500 to 1.38
- Type: Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
Area of application: Semiconductors, FPD and industrial processes, particularly CVD systems. Description: Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance. Nominal inside diameters (ID): 40 (1... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 1.5 to 4
- Type: Butterfly
- Temperature Range: 248
from Edwards Vacuum
The PVMKS (stainless steel body) is a quick acting, right-angled lever operated valve. The lever, connected to a self-lubricating plastic cam-piston, actuates the valve stem and valve plate through PTFE bearings. The valve plate 'O' ring groove is vented to prevent gas bursts. The valves are... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 50
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed manual valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 3
- Type: Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
DN 16 - 100. These products are subject to the Non Proliferation Treaty (NPT). Control and leaktight closing. Selection of flow range by replaceable needle/nozzle unit. Increased safety by evacuation of bellows interior. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Temperature Range: 248
- Type: Angle
- Port Flange & Seal Type: Metal Seal
from Edwards Vacuum
The range of single acting cylinder, spring return pipeline valves is designed for high speed actuation from standard pneumatic lines, and are offered in sizes NW10, 16, 25, 40 and 50. The NW16, 25, 40 and 50 versions of the valve are available in both right-angle and in-line styles, to give you... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 10
- Type: Inline
- Temperature Range: 41 to 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed pneumatic gate valves have a vacuum range of 1x10-10 Torr. Nor-Cal gate valves have a slim profile, shorting the gas path. Nor-Cal gate valves are electropolished inside and out to improve corrosion resistance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Leak Rate: 2.00E-9
- Type: Gate
- Temperature Range: 302 to 392
from VAT, Inc.
Manually operated diaphragm valves with forged body and robust actuator. Features. Diaphragm made of FKM (VITON). Easy replacement of the diaphragm [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 1.5
- Type: Diamphragm
- Temperature Range: 212
from Edwards Vacuum
The QSB quarter swing valves are compact, quick acting, high conductance isolation valves. The QSB valves have a polished, stainless steel, ISO flanged body with fluoroelastomer 'O' ring sealed valve plate and shaft. The valve plate 'O' ring groove is vented to help maintain a stable high vacuum. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: ? to 4.02
- Type: Butterfly
- Temperature Range: ? to 32
from Nor-Cal Products, Inc. - The Vacuum Experts
The N Series Valves feature high cycle life and a small footprint in right-angle and in-line body styles. Constructed of Stainless Steel with NW16, 25, 40 and 50 flanges. All N-series valves are pneumatically actuated and are available with optional air solenoids and three types of open/close... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 1.5
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50
from VAT, Inc.
All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 300 °C in the open and... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 2.5
- Type: Angle
- Temperature Range: 572
from Edwards Vacuum
The QSB quarter swing valves are compact, quick acting, high conductance isolation valves. The QSB valves have a polished, stainless steel, ISO flanged body with fluoroelastomer 'O' ring sealed valve plate and shaft. The valve plate 'O' ring groove is vented to help maintain a stable high vacuum. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: ? to 2.48
- Type: Butterfly
- Temperature Range: ? to 32
from Nor-Cal Products, Inc. - The Vacuum Experts
The N Series Valves feature high cycle life and a small footprint in right-angle and in-line body styles. Constructed of Stainless Steel with NW16, 25, 40 and 50 flanges. All N-series valves are pneumatically actuated and are available with optional air solenoids and three types of open/close... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 1.5
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 16; NW 25; NW 40 ; NW 50
from VAT, Inc.
Fast closing slot shutter for protecting storage rings of synchrotrons and particle accelerators from air inrush. Closing to a small leak in milliseconds. For UHV and extreme UHV systems. Electropneumatic actuator designed for smooth closing. Controlled via controller. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 1.5 to 6
- Type: Shutter Valve
- Temperature Range: 572
from Edwards Vacuum
Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination. Slave and master valve combination allows slow initial pumping to minimise disturbance. Both slave and master... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Type: Inline
- Temperature Range: 41 to 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 4
- Type: Angle; Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80; NW 100
from VAT, Inc.
Analysis of the residual gases at base pressure with the gate valve open. Line of sight between analyzer and process chamber. With bypass valves. Pressure reduction of the process gas by means of two bypass valves with orifice. Analysis of the residual gases at base pressure with the gate valve... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port Flange & Seal Type: Elastomeric / O-ring; Metal Seal
- Type: Gate
- Valve Seat Seal: Elastomeric / O-ring; Metal
from Edwards Vacuum
Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Type: Inline
- Temperature Range: 41 to 212
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed pneumatic valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 4
- Type: Angle; Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
Analysis of the residual gases at base pressure with the gate valve open. Very compact. Gate valve: see section «A », Mini UHV gate valves Series 010. Bypass valves exchangeable: type NUPRO with seat made of Kel-F (bakeable to 90 °C), with manual actuator: type SS-4BKT, with... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port Flange & Seal Type: Elastomeric / O-ring; Metal Seal
- Type: Gate
- Valve Seat Seal: Elastomeric / O-ring; Metal
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 10
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 50 to 122
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed manual valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 3
- Type: Angle; Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Type: Gate
- Temperature Range: 302
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 16
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 50 to 122
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed pneumatic valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 4
- Type: Angle; Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 8
- Type: Gate
- Temperature Range: 482
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 25
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 50 to 122
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed pneumatic valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.7500 to 1.5
- Type: Angle; Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
Insertable gate valves are space saving due to direct mounting between DIN flanges. Features. Flanges with DIN centering insert. VATLOCK configuration [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 4
- Type: Gate
- Temperature Range: 248
from Edwards Vacuum
The Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valves suitable for use in vacuum pipeline systems down to 1 x 10-9 mbar. A double wound coil combined with an electronic switching circuit ensures low energy consumption, low operating temperatures and extended... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- ISO Port Flange Size: NW 40
- Type: Inline (optional feature); Angle (optional feature)
- Temperature Range: 50 to 122
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed pneumatic valves have a vacuum range of 1x10-10 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance and optimal conductance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 4
- Type: Angle; Poppet Valve
- Port Flange & Seal Type: None; Proprietary ConflatTM type flange or fitting
from VAT, Inc.
These valves are for various applications. Mostly, they are used for vacuum pump isolation (cryo pumps, oil diffusion pumps). Features. Proved VATLOCK configuration. Assembly in cleanroom according to UHV quality standards. DN 900 - 1250 HV with split body: hence extremely short height for... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 16 to 50
- Type: Gate
- Temperature Range: 302
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal elastomer sealed pneumatic valves have a vacuum range of 1x10-9 Torr. Nor-Cal poppet valves are fully opening for increased conductance. Valve bodies are electropolished for better corrosion resistance. Viton seals are standard, other elastomers are available upon request. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Port OD: 0.3750 to 4
- Type: Poppet Valve
- ISO Port Flange Size: NW 10; NW 16; NW 25; NW 40 ; NW 50; NW 63; NW 80; NW 100
from VAT, Inc.
These large pendulum valves are for many applications. Besides the main field of application - FPD (Flat Panel Display) production systems - they are often used in the coating industry. Key features are compactness, low vibration during opening and closing, low price. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 16 to 20
- Type: Pendulum
- Temperature Range: 248
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal copper sealed pneumatic gate valves have a vacuum range of 1x10-10 Torr. Nor-Cal gate valves have a slim profile, shorting the gas path. Nor-Cal gate valves are electropolished inside and out to improve corrosion resistance. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
- Leak Rate: 2.00E-9
- Type: Gate
- Temperature Range: 392
from VAT, Inc.
Mini vacuum gate valves are small, light-weight and low-priced. Features. VATLOCK configuration. O-ring shaft seal. Vulcanized gate seal [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 0.6250 to 2
- Type: Gate
- Temperature Range: 212
from VAT, Inc.
Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants. Features. MONOVAT configuration. Bellows-sealed. Mechanism free of lubricants [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 1 to 2
- Type: Gate
- Temperature Range: 482
from VAT, Inc.
The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the same proved sealing principle and quality as the previous types, they are lower-priced. Further features are low... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 16
- Type: Pendulum
- Temperature Range: 248
from VAT, Inc.
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free... [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 4 to 16
- Type: Control Valve
- Temperature Range: 302
from VAT, Inc.
Offers reduced turbulence during initial pump down giving low particle count. Adjustable soft-pump opening to reduce the turbulences during pump-down and venting [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Port OD: 2.5 to 6
- Type: Angle
- Temperature Range: 302
from VAT, Inc.
Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber. [See More]
- Vacuum / Pressure Range: (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
- Temperature Range: 392
- Type: Transfer Valve
- Port Flange & Seal Type: Elastomeric / O-ring