27.1 Introduction to Semiconductor Test Instrumentation

At the beginning of the semiconductor age, devices were simple two- or three-pin components, such as diodes and transistors, most of which could be readily tested with general-purpose electronic instruments. Today, after 50 years of ever-accelerating technical advancement, semiconductor devices are among the most complex creations of mankind. A modern microprocessor, for example, requires the coordinated contributions of thousands of technologists working together for several years to design and manufacture the many millions of devices per year that are routinely used in computers, communications systems, automobiles, and games.

Along with the growth in semiconductor complexity, it was necessary to invent new test instruments, and combinations of instruments (referred to as semiconductor test systems), capable of coping with the testing needs of ever-increasing performance and variety of devices. This chapter describes the most common instruments and test system types in use in the design and manufacture of semiconductors today. Of necessity, the level of detail must be restricted while examining this area because the variety of instruments and systems on the market today would require volumes, if described in detail. In the following sections the term Semiconductor Test Equipment, STE is used to refer to semiconductor test instruments and systems as a whole.