Diffusion / Vapor Vacuum Pumps and Vacuum Generators
Last Updated: April 1, 2025
Description
Diffusion and vapor vacuum pumps are devices designed to create high vacuum environments by removing gas molecules from a sealed volume. They achieve this by using high-speed jets of vapor to sweep gas molecules out of the system, effectively lowering the pressure within the chamber.
Working Principle
Diffusion pumps operate by heating oil to create a vapor, which is then expelled at high speed through nozzles. This vapor stream entrains gas molecules and directs them towards the foreline port, where they are removed by a backing pump. The process relies on the momentum transfer from the vapor to the gas molecules, effectively pushing them out of the system. These pumps are particularly useful for achieving high vacuum levels, as they can reach ultimate vacuums of 10^-10 torr under optimal conditions. Their reliability and lack of moving parts contribute to their long service life.
Applications
Diffusion pumps are widely used in applications requiring high vacuum conditions. Specific examples include semiconductor manufacturing, where they are used in processes such as chemical vapor deposition and ion implantation. They are also employed in research laboratories for experiments that require ultra-high vacuum environments, such as surface science studies and electron microscopy.
Advantages over other Vacuum Pumps and Vacuum Generators
Diffusion pumps offer several advantages over other types of vacuum pumps. They provide the highest pumping speed for lighter gases like helium and hydrogen, making them ideal for applications where these gases are prevalent. Additionally, their lack of moving parts results in minimal maintenance and long service life, which can be a significant advantage in industrial settings where downtime is costly.
Limitations
One of the primary limitations of diffusion pumps is the potential for process contamination and backstreaming of oil, particularly in oil diffusion pumps. This can be mitigated by using baffles and traps, but it remains a consideration for sensitive applications. Additionally, diffusion pumps require a backing pump to operate effectively, which can add to the complexity and cost of the system.
Considerations
When considering diffusion pumps, it is important to account for initial costs, which can be higher due to the need for a backing pump and additional components like baffles and traps. Operating expenses are generally low due to the absence of moving parts, which reduces maintenance requirements. However, the potential for oil contamination may necessitate additional maintenance and cleaning. Durability is a strong point for diffusion pumps, as their simple design and lack of mechanical components contribute to a long operational life.
from Edwards Vacuum
The model EO50/60 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for easy cleaning. It meets the need for a low-cost, high vacuum pump for use in desk top or mobile... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Scientific; Medical / Laboratory
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a manually operated... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a manually operated... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a manually operated... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. This pump has a pneumatically... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT10 (ANSI10/ISO320 inlet) diffusion pump is designed for all light and heavy duty industrial applications. The robust construction gives high pumping speed... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Coating Systems & Furnaces
from Edwards Vacuum
The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT16B (ANSI16/ISO5000 inlet) diffusion pump is designed for all light and heavy duty industrial applications. The robust construction gives high pumping speed... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Coating Systems & Furnaces
from Edwards Vacuum
The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT20B (ANSI20/ISO630 inlet) diffusion pump is designed for all light and heavy duty industrial applications. The robust construction gives high pumping speed... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Coating Systems & Furnaces
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 100 (ISO100 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 100 (ISO100 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 160 (ISO160 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 160 (ISO160 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 250 (ISO250 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 250 (ISO250 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 63 (ISO63 inlet) design has been proven over many... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 63 (ISO 63 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak (ISO100 inlet) design has been proven over many... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak (ISO100 inlet) design has been proven over many... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 160 (ISO160 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 160 (ISO160 inlet) design has been proven over... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps
from Edwards Vacuum
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 63 (ISO63 inlet) design has been proven over many... [See More]
- High Vacuum: Diffusion or Vapor
- Configuration: Individual Vacuum Pump
- Vacuum Pump Type: HighVac
- Application: Industrial; Thin Film, Surface Physics UHV Apps