Magnetic Bearing Vacuum Pumps and Vacuum Generators

Last Updated: April 1, 2025

Description

Magnetic Bearing Vacuum Pumps are designed to create a vacuum by utilizing magnetic levitation to support the pump rotor. This eliminates physical contact and friction between moving parts, allowing for smoother operation and reduced wear. Vacuum Generators, on the other hand, are devices that create a vacuum by removing air or gas molecules from a sealed volume, often using various mechanisms such as venturi effects or mechanical pumps.

Working Principle

Magnetic Bearing Vacuum Pumps operate by using magnetic fields to levitate the rotor, which is a critical component in the pump. This magnetic levitation eliminates contact friction, which not only reduces wear and tear but also enhances the efficiency and longevity of the pump. The absence of mechanical contact means that these pumps can operate at higher speeds and with greater precision. Vacuum Generators typically work by creating a pressure differential, often using a venturi effect or mechanical means, to evacuate air or gas from a chamber, thereby creating a vacuum.

Applications

Specific applications for Magnetic Bearing Vacuum Pumps include environments where contamination must be minimized, such as in semiconductor manufacturing or in cleanroom settings. Vacuum Generators are often used in industrial automation for tasks like material handling, where they can be employed to pick and place objects using suction.

Advantages over other Vacuum Pumps and Vacuum Generators

Magnetic Bearing Vacuum Pumps offer significant advantages over traditional pumps due to their lack of mechanical contact, which reduces maintenance needs and increases operational lifespan. They also provide higher precision and efficiency, making them ideal for sensitive applications. Vacuum Generators, particularly those using the venturi effect, are advantageous in applications requiring rapid vacuum generation without the need for moving parts, which can reduce maintenance and increase reliability.

Limitations

One limitation of Magnetic Bearing Vacuum Pumps is their initial cost, which can be higher than traditional pumps due to the complexity of the magnetic levitation technology. Additionally, they may require specialized maintenance and expertise to ensure proper operation. Vacuum Generators may have limitations in terms of the maximum vacuum level they can achieve compared to more robust mechanical pumps.

Considerations

When considering Magnetic Bearing Vacuum Pumps, it is important to evaluate the initial investment against the long-term savings in maintenance and operational efficiency. These pumps are generally more durable and accurate, but the upfront cost can be a barrier. For Vacuum Generators, considerations should include the specific application requirements, such as the desired vacuum level and the speed of vacuum generation, as well as the operating expenses related to energy consumption and maintenance.

13 Results
EXT Compound Turbomolecular Vacuum Pump -- EXT556H
from Edwards Vacuum

The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumping technologies with turbomolecular pump stages on a single rotor. The result is a highly reliable pump well suited to applications requiring excellent light gas performance and ultimate pressures <10-10 mbar. With the... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1059 to 1229
EMT Series Turbomolecular Pump -- EMT390
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 340 to 720
EXT Compound Turbomolecular Vacuum Pump -- EXT75DX
from Edwards Vacuum

The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible without TIC... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 88.99 to 140
ET-WS Series Turbo Pump -- ET-1600WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Semiconductor
  • Configuration: Combination
  • Pumping Speed: 636 to 3390
nEXT Turbomolecular Pump -- nEXT240D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Scientific
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 350 to 509
nEXT Turbomolecular Pump -- nEXT300D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Scientific
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 593 to 720
nEXT Turbomolecular Pump -- nEXT400D
from Edwards Vacuum

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Scientific
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 689 to 848
STP Turbomolecular Pump -- STP-L301
from Edwards Vacuum

Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Scientific; Semiconductor; Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 551 to 614
STP Turbomolecular Pump -- STP301
from Edwards Vacuum

Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Semiconductor; Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 636
STP-XA Turbomolecular Pump -- STP-XA2703C
from Edwards Vacuum

The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4344 to 5615
STP-XA Turbomolecular Pump -- STP-XA3203C
from Edwards Vacuum

The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes,... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 4873 to 6780
STPA Turbomolecular Pump -- STPA1603C
from Edwards Vacuum

The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2543 to 3390
STPA Turbomolecular Pump -- STPA2203C
from Edwards Vacuum

Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for... [See More]

  • Vacuum Pump Type: HighVac
  • Application: Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 3602 to 4662