Semiconductor Manufacturing Vacuum Pumps and Vacuum Generators

81 Results
Air-cooled Dry Screw Vacuum Pump, Flying Bearing System -- COBRA BA 0100 C
from Busch Vacuum Solutions

Advanced Screw Design: bell shaped construction, patented self-balancing screws. Efficient: air cooled, low cost of ownership, minimal maintenance, high uptime. Reliable: operationally reliable. Flexible: application-oriented. Quiet: low sound and vibration level. Compact Design. The COBRA BA 0100 C... [See More]

  • Application: Industrial; Manufacturing; Semiconductor; Evacuation of Powder and Particle-laden Media
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 61.74
Dry Screw Vacuum Pump -- COBRA DS 0080 / 0160 G
from Busch Vacuum Solutions

Advanced Screw Design. Efficient: cost-effective, minimal maintenance, high uptime. Flexible: application-oriented. Short Process Times: due to high pumping speeds. Robust: anti-corrosion coating on internal components. Compact Design. COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven... [See More]

  • Application: Industrial; Manufacturing; Semiconductor; Evacuation of Powder and Particle-laden Media
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 49.98 to 94.08
Dry Screw Vacuum Pump -- COBRA DS 0600 E
from Busch Vacuum Solutions

Advanced Screw Design. Efficient: low operating costs, minimal maintenance, high uptime. Flexible: application-oriented. Short Process Times: due to high pumping speeds. Compact Design. COBRA DS 0600 E is a dry screw vacuum pump in the proven COBRA DS series. Their high pumping speeds, even under... [See More]

  • Application: Industrial; Manufacturing; Semiconductor; Evacuation of Powder and Particle-laden Media
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 353
Dry Screw Vacuum Pump with Integrated Vacuum Booster -- COBRA DS 0700, 1000, 2000 G
from Busch Vacuum Solutions

Advanced Screw Design. Efficient: cost-effective, minimal maintenance, high uptime. Flexible: application-oriented. Short Process Times: due to high pumping speeds. Robust: anti-corrosion coating on internal components. Compact Design. COBRA DS 0700 – 2000 G are dry screw vacuum pumps in the... [See More]

  • Application: Industrial; Manufacturing; Semiconductor; Evacuation of Powder and Particle-laden Media
  • Configuration: Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 294 to 964
Oil-Lubricated Rotary Vane Vacuum Pump -- R5 RA 1000/1600 A PLUS
from Busch Vacuum Solutions

With the invention of the R5 oil-lubricated rotary vane vacuum pump, Dr Karl Busch has revolutionized food packaging. And today, we are the market leader in vacuum packaging. However, the R5 is not limited to this application but represents the industry standard for a wide range of applications. [See More]

  • Application: Industrial; Chemical; Food; Manufacturing; Packaging; Semiconductor
  • Mechanical: Rotary Vane
  • Configuration: Individual Vacuum Pump; Combination
  • Pump Stages: Single Stage
Water-cooled Dry Screw Vacuum Pump with Flying Bearing System -- COBRA BC 0100 / 0200 F
from Busch Vacuum Solutions

Advanced Screw Design: bell shaped construction, patented self-balancing screws. Efficient: low operating costs, energy-efficient, minimal maintenance, high uptime. Reliable: operationally reliable. Flexible: application-oriented. Quiet: sound level < 60 dB(A). Compact Design. The COBRA BC... [See More]

  • Application: Industrial; Scientific; Manufacturing; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 58.8 to 97.02
Water-cooled Dry Screw Vacuum Pump with Flying Bearing System -- COBRA BC 0101 G
from Busch Vacuum Solutions

Advanced Screw Design: bell shaped construction, patented self-balancing screws. Compact Design: integrated control panel. Efficient: low cost of ownership, minimal maintenance, high uptime. Reliable: operationally reliable. Flexible: application-oriented. Quiet: noise level < 58 dB(A). The COBRA... [See More]

  • Application: Industrial; Scientific; Manufacturing; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 58.8
Water-cooled Dry Screw Vacuum Pump with Flying Bearing System -- COBRA BC 1000 / 2000 F
from Busch Vacuum Solutions

Efficient: cost-effective, long uptime, energy-efficient. Easy servicing: long service intervals. Reliable: operationally reliable. Flexible: application-oriented. Quiet: sound level < 62 dB(A). The COBRA BC 1000 F and BC 2000 F are two dry screw vacuum pumps from the proven COBRA BC series. [See More]

  • Application: Industrial; Scientific; Manufacturing; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 929
Oil-Free Turbomolecular Pumping Station -- FJ-700E
from Drytek Distribution

FJ –700E pumping station is a ready-to-run pumping system with oil-free design. It consists of a KYKY 700 turbomolecular pump (grease lubrication bearing), a scroll pump (oil-free backing pump), a controller system, a vacuum measurement ,valves and pipelines. Applications: surface... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Configuration: Vacuum Pump System or Station
  • Vacuum Pump Type: HighVac
  • Pumping Speed: 1483
AI Series Dry (Oil-Free) Vacuum Pump -- ISP- 90
from SynSysCo

ISP- 90. Air Cooled, Oil-Free Performance. The Anest Iwata oil-free ISP scroll vacuum pump is "The Original. ". Anest Iwata was the first manufacturer to bring scroll vacuum pumps to the vacuum market. With over 10 years of field experience and more performance hours than all its competitors... [See More]

  • Application: Industrial; Scientific; Packaging; Semiconductor; Sputtering Systems, Vacuum Deposition, Ion Plating, Accelerator and Synchrotron Radiation, Helium Leak Detection Systems, Gas Recovery Equipment
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 3.2 to 3.8
EH Mechanical Booster Pump -- EH1200C
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 494 to 844
Dry Screw Vacuum Pumps -- Model SDV 120 200 TH-012
from Tuthill Corporation / Vacuum & Blower Systems

Applications: Chemical and Pharmaceutical Processing. Solvent Recovery. Forming. Crystallization. Dry Etching. Sputtering. Vapor Recovery. Features: Patented variable pitch rotor design reduces power consumption by up to 30% as compared to fixed pitch designs. No oil or water in contact with process... [See More]

  • Application: Industrial; Chemical; Manufacturing; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 71 to 106
Clean to Light Duty Service, Low Power Consumption Vacuum Pump -- LD120
from LOT Vacuum America

LD Series pumps are designed to sip electricity and back turbo pumps. LD pumps are an excellent choice for entry and exit load locks, PVD Turbos, evaporation chambers, and transfer chambers. LD pumps incorporate the same state-of-the-art energy and communication features as the HD series. [See More]

  • Application: Industrial; Scientific; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 70
DynaSeal™ Liquid Ring Vacuum -- TRO015H
from Travaini Pumps USA

Travaini high efficiency liquid ring vacuum pump, monoblock design. Heavy duty flexible coupling, no field alignment or lubrication required. NEMA C-face TEFC, motor, 3 phase 60 hz, 230/460 volt, class F, 1.15 service factor. Separator reservoir with level gauge, temperature & pressure gauge and... [See More]

  • Application: Industrial; Chemical; Food; Pharm/Sanitary; Semiconductor; Environmental, Electronics, Petroleum
  • Configuration: Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 15
Chemical-Resistant Diaphragm Pump - 70 mbar -- ME 4C NT
from VACUUBRAND, Inc.

Chemistry-design diaphragm pumps are an excellent solution for continuous, oil-free pumping of corrosive gases and vapors. The one-stage construction provides the advantageous combination of high pumping speed and ultimate vacuum down to 70 mbar. All major parts in contact with pumped media are made... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2.53
EMT Series Turbomolecular Pump -- EMT390
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • Application: Industrial; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: HighVac
  • Pumping Speed: 340 to 720
Turbomolecular Pumping Station -- FJ-110E
from Drytek Distribution

FJ –100E pumping station is a ready-to-run pumping system. It consists of a KYKY 100 turbomolecular pump, a rotary pump, a controller system, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research & development and other vacuum... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Configuration: Vacuum Pump System or Station
  • Vacuum Pump Type: HighVac
  • Pumping Speed: 233
DD Series Split Dual-Helical Dry Vacuum Pump -- DD105
from SynSysCo

DD Series Pumps. Excellent Performance in Aggressive, High Demand, High Flow Applications. DD Series Pumps are application proven on all Semiconductor processes. The DD255 series is well suited for all FPD, 300mm, and 200mm applications by supporting high particulate loads, aggressive chemistries,... [See More]

  • Application: Industrial; Semiconductor; Crystal Pulling, Lamination, PECVD Anti-reflective Coating Deposition, CdTe and CIGS Processes
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 53 to 62
EH Mechanical Booster Pump -- EH1200FX
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 494 to 844
Engineered Dry Screw Vacuum Systems
from Tuthill Corporation / Vacuum & Blower Systems

Kinney ® Engineered Dry Screw vacuum systems incorporate Kinney Dry Screw vacuum pumps into complete vacuum systems with vacuum boosters, custom controls and accessories to combine high pumping speed with deep vacuum levels. Flows range to 10000 CFM (17000 m ³/h) with vacuum levels to 10... [See More]

  • Application: Industrial; Scientific; Chemical; Food; Manufacturing; Packaging; Power; Pharm/Sanitary; Semiconductor
  • Configuration: Combination
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1600 to 10000
Harsh Duty Service, Low Power Consumption Vacuum Pump -- HD120
from LOT Vacuum America

HD Series Pumps are application proven pumps providing world class energy efficiency, low CoO, and excellent reliability. HD series are a good selection for PECVD and LPCD applications involving corrosive, condensable and particulate by-products. They are very compact, quiet and have... [See More]

  • Application: Industrial; Scientific; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 70
Single Stage Medium Vacuum Pump -- TRSA 200-1950
from Travaini Pumps USA

Pumps are provided with threaded connections for service liquid,. pump draining, grease and anticavitation valve and companion flanges. Pumps are also provided, by request, with auxiliary threaded connections,. flanged air-liquid separator tank, non return valve,. vacuum relief valve, flow valve to... [See More]

  • Application: Industrial; Chemical; Food; Pharm/Sanitary; Semiconductor; Environmental, Electronics, Petroleum
  • Configuration: Individual Vacuum Pump; Vacuum Pump System or Station (optional feature)
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1147
Chemical-Resistant Diaphragm Pump - 70 mbar -- ME 8C NT
from VACUUBRAND, Inc.

Chemistry-design diaphragm pumps are an excellent solution for continuous, oil-free pumping of corrosive gases and vapors. The one-stage design of the ME 8C NT pump provides high pumping speed and ultimate vacuum down to 70 mbar. All major parts in contact with pumped media are made of chemically... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 4.59
ESA Series Dry Vacuum Pump -- ESA25S
from EBARA Technologies, Inc.

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed. The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and... [See More]

  • Application: Industrial; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pump Stages: Two Stage
Turbomolecular Pumping Station -- FJ-620E
from Drytek Distribution

FJ –620E pumping station is a ready-to-run pumping system. It consists of a KYKY 620 turbomolecular pump, a rotary pump, a controller system, water break protector, valves and pipelines. Applications: surface analyses, accelerator, semiconductor, plasma, vacuum parts, research &... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Configuration: Vacuum Pump System or Station
  • Vacuum Pump Type: HighVac
  • Pumping Speed: 1271
DD Series Split Dual-Helical Dry Vacuum Pump -- DD255
from SynSysCo

DD Series Pumps. Excellent Performance in Aggressive, High Demand, High Flow Applications. DD Series Pumps are application proven on all Semiconductor processes. The DD255 series is well suited for all FPD, 300mm, and 200mm applications by supporting high particulate loads, aggressive chemistries,... [See More]

  • Application: Industrial; Semiconductor; Crystal Pulling, Lamination, PECVD Anti-reflective Coating Deposition, CdTe and CIGS Processes
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 53 to 150
EH Mechanical Booster Pump -- EH1200IND
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 494 to 844
Kinney® Booster/Rotary and Piston Vacuum Pumping Systems
from Tuthill Corporation / Vacuum & Blower Systems

Kinney ® Booster/Rotary Piston Vacuum Pumping Systems pump high volumes at very low pressures. A high-capacity dry rotary lobe vacuum booster is matched to a smaller rotary piston vacuum pump. For continuous operation below 1 Torr (1.3 mbar a), the vacuum booster can increase the pumping speed... [See More]

  • Application: Industrial; Scientific; Chemical; Manufacturing; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Combination
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 10000
Herringbone Type Split-flow Hybrid-screw Rotor -- GD400
from LOT Vacuum America

The GD Series builds upon the proven Dura-Dry dual screw design introduced by LOT Vacuum in 2002 and provides world class conservation of operating resources. The GD Series is well suited for demanding applications in Flat Panel Display, OLED / LED, Solar PV, and 450mm Semiconductor manufacturing. [See More]

  • Application: Industrial; Scientific; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 212
Water Sealed Liquid Ring System -- TRW 04H-NR/PR
from Travaini Pumps USA

Standard Components. ♦ Travaini base mounted liquid ring vacuum pump. ♦ Heavy duty flexible coupling, requires no field alignment or lubrication. ♦ NEMA C-face, TEFC, 3 phase. 60 hz, 230/460 volt, class F, 1.15 service factor motor. ♦ Separator reservoir. ♦ Seal liquid... [See More]

  • Application: Industrial; Chemical; Food; Pharm/Sanitary; Semiconductor; Environmental, Electronics, Petroleum
  • Configuration: Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2.35
Chemical-Resistant Diaphragm Vacuum Pump - 2 mbar -- MD 1C
from VACUUBRAND, Inc.

Three-stage chemistry-design diaphragm pumps are an excellent solution for continuous, oil-free pumping of corrosive gases and vapors and meet the highest requirements down to 2 mbar. The three-stage construction provides the advantageous combination of high pumping speed and very low ultimate... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 0.8820
EST Series Dry Vacuum Pump -- EST25N
from EBARA Technologies, Inc.

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed. The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and... [See More]

  • Application: Industrial; Semiconductor; Harsh Duty Processes
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 88
HD Series Hybrid Dual-Helical Dry Pump -- HD120
from SynSysCo

HD Series Pumps. World Class CoO for Harsh Applications. HD Series Pumps are application proven pumps providing world class energy efficiency, low CoO, and excellent reliability. HD series are a good selection for PECVD and LPCD applications involving corrosive, condensable and particulate... [See More]

  • Application: Industrial; Semiconductor; CVD, PVD, Etch, High Particulate, High Water Vapor Vacuum Ovens, Heat Treating, Lamination
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 70
EH Mechanical Booster Pump -- EH1200T160
from Edwards Vacuum

The EH1200T160 mechanical booster pump has been certified for use in EX II 2G c IIB T160 classified areas. The temperature classification of the mechanical booster pump is based on the outlet pressure of the pump being maintained below the critical backing pressure of 10 mbar (1 x 103 Pa) at zero... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 494 to 844
Kinney® KLRC™ Two Stage Liquid Ring Vauum Pumps -- Model KLRC 950 951
from Tuthill Corporation / Vacuum & Blower Systems

Kinney ® KLRC ™ liquid ring vacuum pumps are ideally suited for pumping wet mixtures and even slugs of liquid. KLRC pumps are available in standard, all iron construction (no yellow metals) and 316 stainless steel. Complete engineered system solutions, including instrumentation, controls,... [See More]

  • Application: Industrial; Chemical; Food; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Ultimate Vacuum: 4
Largest Standing Single Stage Duty Screw Vacuum Pump -- GHD800
from LOT Vacuum America

The GHD Series provides large capacity dry pumps for Industrial, and large scale LCD and Solar applications. Custom GHD configurations provide single stage pumping capacity up to 2,200 M3/Hr and added booster blowers increase capacities to over 10,000 M3/Hr. Features. No sealing oil or sealing water... [See More]

  • Application: Industrial; Scientific; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 376
Chemical-Resistant Diaphragm Vacuum Pump - 7 mbar -- MZ 2C NT
from VACUUBRAND, Inc.

Chemistry-design diaphragm pumps are an excellent solution for continuous, oil-free pumping of corrosive gases and vapors. The two-stage pumping of the MZ 2C NT provides high pumping speed and low ultimate vacuum of 7 mbar. All major parts in contact with pumped media are made of chemically... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.35
ET-WS Series Turbo Pump -- ET-300WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • Application: Industrial; Semiconductor
  • Configuration: Combination
  • Vacuum Pump Type: HighVac
  • Pumping Speed: 636 to 3390
LD Series Clean to Light Duty Service Dry Pump -- LD120
from SynSysCo

LD Series Pumps. World Class Energy Efficiency for Light Duty Applications. LD Series pumps are designed to sip electricity and back turbo pumps. LD pumps are an excellent choice for entry and exit load locks, PVD Turbos, evaporation chambers, and transfer chambers. LD Pumps incorporate the same... [See More]

  • Application: Industrial; Semiconductor; Load Lock, General Vacuum, PVD, Preclean, Transfer, Metrology & Inspection, Etch, Implant
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 70
EH Mechanical Booster Pump -- EH250C
from Edwards Vacuum

The EH250C mechanical booster pump has been certified for use in CSA Division 1 area Gas Class I Group C D and Dust Class II Group F G, Temperature Class T3C. The temperature classification of the pump is based on the outlet pressure of the pump being maintained below the critical backing pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 141 to 220
Kinney® KTC™ Rotary Piston Compound Vacuum Pumps -- Model KTC-21
from Tuthill Corporation / Vacuum & Blower Systems

Kinney ® KTC ™ rotary piston vacuum pumps achieve the lowest possible pressures from. mechanical pumps and are recommended for applications where the operating pressure is. below 0.1 Torr (0.13 mbar). As there is no metal-to-metal contact from the clearances being filled with oil, these. [See More]

  • Application: Industrial; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 21
Vacuum Pump; Exceptional Pumping Speed for Solar PV, 300mm, and Flat Panel Display Applications -- DD255
from LOT Vacuum America

DD Series Pumps are application proven on all Semiconductor processes. The DD255 series is well suited for all FPD, 450mm, 300mm, and 200mm applications by supporting high particulate loads, aggressive chemistries, and high process gas flows. All DD series pumps can be combined with VFD Driven... [See More]

  • Application: Industrial; Scientific; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 109 to 150
Chemical-Resistant Diaphragm VacuumPump - 1.5 mbar -- MD 4C NT
from VACUUBRAND, Inc.

Three-stage chemistry-design diaphragm pumps are an excellent solution for continuous, oil-free pumping of corrosive gases and vapors and meet many difficult requirements down to 1.5 mbar. The three-stage construction provides the advantageous combination of high pumping speed and very low ultimate... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2.23
VOS Series Dry Vacuum Pump -- VOS100
from EBARA Technologies, Inc.

The VOS Series has the highest pumping speed to footprint ratio in the industry. The VOS is a multistage lobe pump designed for installation on or very close to the process tool for clean and light duty applications such as Load Lock and SEM. [See More]

  • Application: Industrial; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 63.56
EH Mechanical Booster Pump -- EH250FX
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 141 to 220
KT-LP Rotary Piston Vacuum Pump -- Model KT505LP
from Tuthill Corporation / Vacuum & Blower Systems

KT-LP pumps are quiet running vacuum pumps with high pumping capacity at both high and low pressures. The triplex piston design is practically vibration-free. All KT-LP models include an integral, positive pressure lubrication system to insure reliable lubrication at all pressure levels. Adjustable... [See More]

  • Application: Industrial; Manufacturing; Packaging; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 300
Oil-free Diaphragm Vacuum & Pressure Pump - 70 mbar -- ME 4R NT
from VACUUBRAND, Inc.

This one-stage diaphragm pump works simultaneously as a vacuum generator and as compressor. All parts in contact with pumped media are made of aluminum and selected plastics (PTFE diaphragms and valves). They enable a wide range of applications for non-corrosive gases. The inlet and outlet... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2.23
EH Mechanical Booster Pump -- EH250IND
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 141 to 220
KVA Rotary Vane Vacuum Pumps -- Model KVA100
from Tuthill Corporation / Vacuum & Blower Systems

Kinney oil-flooded, multi-vane vacuum pumps are single stage, air cooled and direct driven. This simple design ensures the reliability and durability that is required in the vacuum industry. Applications: Vacuum Packaging. Meat Packing. Vacuum Chucking & Holding. Central Vacuum Systems. [See More]

  • Application: Industrial; Food; Manufacturing; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Ultimate Vacuum: 0.5000
Oil-free Diaphragm Vacuum Pump - 0.5 mbar -- MV 2 NT
from VACUUBRAND, Inc.

The MV 2 NT four-stage diaphragm vacuum pumps are an excellent solution for continuous, oil-free pumping of gases when the need is to reach fractional millibar ultimate vacuums. All parts in contact with pumped vapors or gases are made of aluminum, stainless steel and carefully selected plastics... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.29
EH Mechanical Booster Pump -- EH250T160
from Edwards Vacuum

The EH250T160 mechanical booster pump has been certified for use in Ex II 2G c IIB T160 classified areas. The temperature classification of the mechanical booster pump is based on the outlet pressure of the pump being maintained below the critical backing pressure of 10 mbar (1 x 103 Pa) at zero... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 141 to 220
Oil-free Diaphragm Vacuum Pump - 1.5 mbar -- MD 4 NT
from VACUUBRAND, Inc.

The MD 4 NT diaphragm pump is an excellent choice for oil-free evacuation and pumping of larger volume of non-corrosive gases down to 1.5 mbar ultimate vacuum. All parts in contact with pumped gases and vapors are made of aluminum, stainless steel and carefully selected plastics suitable for a wide... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2.23
EH Mechanical Booster Pump -- EH2600C
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1029 to 1829
Oil-free Diaphragm Vacuum Pump - 2 mbar -- MD 1
from VACUUBRAND, Inc.

The MD 1 diaphragm pump is an excellent choice for oil-free evacuation and pumping of non-corrosive gases down to 1.5 mbar ultimate vacuum. The three-stage design with precisely guided flat diaphragms provides outstanding pumping speed even close to the ultimate vacuum, especially when compared with... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 0.7056
EH Mechanical Booster Pump -- EH2600FX
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1029 to 1829
Oil-free Diaphragm Vacuum Pump - 4 mbar -- MZ 2D NT
from VACUUBRAND, Inc.

Diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts in these MZ 2 series pumps that are in contact with pumped media are made of aluminum, stainless steel and selected plastics, allowing a wide range of applications for non-corrosive gases. [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.35
EH Mechanical Booster Pump -- EH2600IND
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1029 to 1829
Oil-free Diaphragm Vacuum Pump - 7 mbar -- MZ 2 NT
from VACUUBRAND, Inc.

The MZ 2 NT diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts in contact with pumped media are made of aluminum and selected plastics and allow a wide range of applications for non corrosive gases. The two-stage construction combines high... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.29
EH Mechanical Booster Pump -- EH2600T160
from Edwards Vacuum

The EH2600T160 mechanical booster pump has been certified for use in EX II 2G c IIB T160 classified areas. The temperature classification of the mechanical booster pump is based on the outlet pressure of the pump being maintained below the critical backing pressure of 10 mbar (1 x 103 Pa) at zero... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1029 to 1829
Oil-free Diaphragm Vacuum Pump - 70 mbar -- ME 2 NT
from VACUUBRAND, Inc.

Diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts of the ME 2 NT diaphragm vacuum pump in contact with pumped media are made of aluminum and selected plastics, allowing a wide range of applications for non-corrosive gases. The one-stage... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.12
EH Mechanical Booster Pump -- EH2600T3
from Edwards Vacuum

The EH2600T3 mechanical booster pump has been certified for use in EX II 2G c IIB T3 classified areas. The temperature classification of the mechanical booster pump is based on the outlet pressure of the pump being maintained below the critical backing pressure of 10 mbar (1 x 103 Pa) at zero flow. [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1029 to 1829
Oil-free Diaphragm Vacuum Pump - 70 mbar -- ME 4 NT
from VACUUBRAND, Inc.

ME 4 NT diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts in contact with pumped media are made of aluminum and selected plastics, and allow a wide range of applications for non-corrosive gases. The highly flexible, fabric-reinforced double... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2352
EH Mechanical Booster Pump -- EH4200C
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1823 to 2931
Oil-free Diaphragm Vacuum Pump - 70 mbar -- ME 8 NT
from VACUUBRAND, Inc.

ME 8 NT diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts in contact with pumped media are made of aluminum and selected plastics, and allow a wide range of applications for non-corrosive gases. The highly flexible, fabric-reinforced double... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 4.29
EH Mechanical Booster Pump -- EH4200IND
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1823 to 2931
Oil-free, Variable Speed Diaphragm Vacuum Pump - 0.3 mbar -- MV 2 NT VARIO
from VACUUBRAND, Inc.

The MV 2 NT VARIO ® four-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of gases when the need is to reach fractional millibar ultimate vacuums. All parts in contact with pumped vapors or gases are made of aluminum, stainless steel and carefully selected... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump; Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.94
EH Mechanical Booster Pump -- EH4200T160
from Edwards Vacuum

The EH4200T160 mechanical booster pump has been certified for use in EX II 2G c IIB T160 classified areas. The temperature classification of the mechanical booster pump is based on the outlet pressure of the pump being maintained below the critical backing pressure of 10 mbar (1 x 103 Pa) at zero... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1823 to 2931
Oil-free, Variable Speed Diaphragm Vacuum Pump - 1.5 mbar -- MD 4 NT VARIO
from VACUUBRAND, Inc.

The MD 4 NT VARIO ® three-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of non-corrosive gases. They reach an excellent ultimate vacuum of 1 mbar. All parts in contact with pumped gases and vapors are made of aluminum, stainless steel and carefully selected... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump; Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 3.35
EH Mechanical Booster Pump -- EH4200T3
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1823 to 2931
Variable Speed Chemistry Diaphragm Vacuum Pump - 1.5 mbar -- MD 4C NT VARIO
from VACUUBRAND, Inc.

NT VARIO ® pumps provide precise vacuum control by adaptation of the diaphragm pump's motor speed. The three-stage chemistry MD 4C NT VARIO diaphragm pump provides vacuum to 1.5 mbar suitable for most high boiling solvents. The on-demand motor speed control results in unsurpassed lifetimes of... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump; Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 2.7
EH Mechanical Booster Pump -- EH500AFX
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 206 to 356
Variable Speed Chemistry Diaphragm Vacuum Pump - 7 mbar -- MZ 2C NT VARIO
from VACUUBRAND, Inc.

NT VARIO ® pumps provide precise vacuum control by adaptation of the diaphragm pump's motor speed. The MZ 2C NT VARIO two-stage chemistry diaphragm pump meets medium vacuum requirements for most solvents, reaching a vacuum of 7 mbar. The on-demand motor speed control results in unparalleled... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump; Vacuum Pump System or Station
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 1.65
EH Mechanical Booster Pump -- EH500C
from Edwards Vacuum

The EH500C mechanical booster pump has been certified for use in CSA Division 1 area Gas Class I Group C D and Dust Class II Group F G, Temperature Class T3C. The temperature classification of the pump is based on the outlet pressure of the pump being maintained below the critical backing pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 206 to 356
Variable speed, 24 V Diaphragm Vacuum Pump for OEM Use -- MD 1 VARIO-SP
from VACUUBRAND, Inc.

The three-stage MD 1 VARIO-SP diaphragm pump, with its variable speed drive system, attains significantly higher pumping speed and a better ultimate vacuum at 1 mbar than the corresponding fixed speed pump. The brushless 24V DC motor (maintenance-free) enables easy integration of the pump into other... [See More]

  • Application: Industrial; Scientific; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 0.9996
EPX On-tool High Vacuum Pump -- EPX180L
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical; HighVac
  • Pumping Speed: 99.96
Variable Speed, Chemical-Resistant OEM Vacuum Pump -- MD 1C VARIO-SP
from VACUUBRAND, Inc.

The three-stage MD 1C VARIO-SP diaphragm pump, with its variable speed drive system, attains significantly higher pumping speed and a better ultimate vacuum at 2 mbar than the corresponding fixed speed pump. The brushless 24V DC motor (maintenance-free) enables easy integration of the pump into... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 0.9996
GX Dry Pump -- GX100L
from Edwards Vacuum

The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages,... [See More]

  • Application: Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 61.74
HV Mechanical Booster Pump -- HV8000
from Edwards Vacuum

The Edwards HV8000 high vacuum mechanical booster has been developed to provide high reliability operation in aggressive environments. With a nominal pumping speed of 7200 m3h-1 (4241 ft3 min-1) at 50Hz, it is ideal for large industrial and chemical applications including, steel degassing,... [See More]

  • Application: Industrial; Scientific; Chemical; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 4234 to 5080
iGX Dry Pump -- iGX100L
from Edwards Vacuum

The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX drypumps include Ethernet connectivity allowing key data to be viewed via web... [See More]

  • Application: Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 61.74
iH Dry Pump -- iH80
from Edwards Vacuum

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series... [See More]

  • Application: Semiconductor
  • Configuration: Combination
  • Vacuum Pump Type: Mechanical
  • Pumping Speed: 60.56
pHMB Mechanical Booster -- pHMB1800
from Edwards Vacuum

The pHMB Proximity Booster Pump is a water-cooled, positive displacement Roots vacuum pump which is driven through an a.c. inverter. Each pump must be backed using a suitable Edwards dry pump selected to match process and performance specifications. [See More]

  • Application: Semiconductor
  • Configuration: Individual Vacuum Pump
  • Vacuum Pump Type: Mechanical
  • Mechanical: Lobed Rotor