Chemical / Materials Processing Oxide Ceramics
from CoorsTek
Chamber domes (sometimes referred to as lids) are used to create a clean, inert, and protected environment in deposition chambers. Chemical reactions inside the chamber deposit thin layers of metallic, dielectric, or semiconductive material onto the wafers. Chamber lids and liners are exposed to... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Oxide Type: Alumina
- Shape / Form: Custom Shape
from Aremco Products, Inc.
High fired strength, dense ceramics [See More]
- Applications: Refractory or High Temperature Insulation; Abrasives, ceramics or glass manufacturing; Chemical or material processing; Corrosion resistant; HV / Electrical; Fiberoptics, Radiant Heaters, Temp Probe
- Max Use Temperature: 1649
- Oxide Type: Alumina
- CTE: 7.20E6
from Saint-Gobain Innovative Materials
Saint-Gobain NorPro provides a range of formed, higher surface area catalyst carrier. Surface areas from 10 m2/g to 400 m2g are typically based on high-purity raw materials. When needed, Saint-Gobain NorPro can incorporate unusual pore size distributions, including a high proportion of... [See More]
- Applications: Chemical or material processing; Customer Specified
- Shape / Form: Custom Shape; Ferrule / Eyelet (optional feature); Hollow Stock (Tube, Pipe, Column) (optional feature)
- Oxide Type: Alumina; Al Silicate or Mica Based
- Width / OD: 0.1181 to 19.69
from Saint-Gobain NorPro
Saint-Gobain NorPro cross partition rings are available in proware material. When using 6 in.(150mm) rings as a secondary support, a second layer of 4-in.(100mm) rings is necessary to retain 2-in.(50mm) saddles. [See More]
- Applications: Chemical or material processing; Sulfuric Acid Absorbers, Driers, Coolers
- Length: 1.97 to 3.94
- Shape / Form: Custom Shape
- Mechanical Q: 0.0
from CoorsTek
Rings cover the wafer edge and perimeter, protecting critical chamber components and extending their useful life. Since they are directly exposed to the deposition process, strong plasma durability and high purity are critical to final wafer yield. SEMICONDUCTOR DEPOSITION PROCESSING. Semiconductor... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Oxide Type: Alumina
- Shape / Form: Custom Shape
from Saint-Gobain Innovative Materials
High Surface Area Rings and Extrudates. Saint-Gobain NorPro has a long-standing tradition of supplying top bed solutions to its customers. We can customize a solution based on your plant's performance needs. One of our top bed solutions is the NorPro ® HSA alumina catalyst carrier rings. An HSA... [See More]
- Applications: Chemical or material processing; Refining, Natural Gas, Hydrocracking
- Shape / Form: Custom Shape; Ferrule / Eyelet (optional feature); Hollow Stock (Tube, Pipe, Column); Extrudates, Rings, Pellets
- Oxide Type: Alumina
- Mechanical Q: 0.0
from Saint-Gobain NorPro
Denstone ® deltaP ™ 99 technology utilizes the revolutionary, patent pending Saint-Gobain NorPro Denstone deltaP bed support technology and combines it with a high alumina, low silica composition to produce a media that is engineered to withstand the most severe environments while... [See More]
- Applications: Chemical or material processing; Refining, Petrochemical, Gas Processing
- Composition or ASTM/EN Cement Type : Al2O3 >99%
- Oxide Type: Alumina
- Shape / Form: Custom Shape; Hollow Stock (Tube, Pipe, Column)
from CoorsTek
CoorsTek advanced, high-purity ceramic components are built to withstand the extreme environments in plasma etch (or "dry" etch) chambers — including vapor phase chemical etchants, high voltage RF (radio frequency) and microwave plasma, volatile byproducts, and aggressive cleaning cycles. ETCH... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Oxide Type: Alumina; Yttria
- Shape / Form: Custom Shape
from Saint-Gobain Innovative Materials
Hold-Down Media. Pentaring bed topping is used as a hold-down media at the top of graded reactor beds. The Pentaring shape offers substantial gains in void fraction and surface area when compared to conventional sphere-shaped media or Raschig rings. The immediate benefit of high void fraction is... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : 65-70% SiO2, 23-28% AlO3, Trace Elements
- Oxide Type: Alumina
- Shape / Form: Custom Shape
from Saint-Gobain NorPro
Model 4808 Aludur ® multi-beam gas injection support plates deliver the ultimate ceramic plate performance. The continuous beam-type risers increase gas and liquid handling capacity while providing more than four times greater load bearing capacity than ceramic plates with cylindrical gas... [See More]
- Applications: Chemical or material processing; Corrosion resistant
- Length: 5.98 to 47.99
- Shape / Form: Custom Shape; KilnFurniture
- Width / OD: 5.98 to 47.99
from CoorsTek
Semiconductor deposition processes use a combination of volatile precursor gases, plasma, and high temperature to layer high quality thin films onto wafers. Deposition chambers and wafer handling tools need durable ceramic components to stand up to these challenging environments. CoorsTek provides... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Oxide Type: Alumina
- Shape / Form: Custom Shape
from Saint-Gobain NorPro
Using NorPro grid blocks saves material and shipping costs, as well as installation time. Grid bars placed on 8" centers with NorPro grid blocks also have 15% more free space than a conventional 6" center installation using cross partition rings. Saint-Gobain NorPro manufactures grid blocks of... [See More]
- Applications: Chemical or material processing; Sulfuric Acid Absorbers, Driers, Coolers
- Length: 3.5
- Shape / Form: Custom Shape
- Mechanical Q: 0.0
from CoorsTek
Windows are chamber lids designed to transmit RF (radio frequency) and microwave energy into the plasma etch chamber while resisting erosion from the harsh plasma etch environment. An effective window has a low loss tangent (high transmittance) across RF and microwave frequencies. Otherwise, energy... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Oxide Type: Alumina; Yttria
- Shape / Form: Custom Shape
from Saint-Gobain NorPro
Some catalyst carriers in this series are available in monomodal or bi-modal or pore options. For many years, Saint-Gobain NorPro has been known for its range of very low surface area macroporous alpha-alumina-based carrier materials. Inert to their environment in most circumstances, the carriers... [See More]
- Applications: Chemical or material processing; Customer Specified
- Shape / Form: Custom Shape; Ferrule / Eyelet (optional feature); Grannular Fill; Hollow Stock (Tube, Pipe, Column) (optional feature); Spray Dried Powder
- Oxide Type: Alumina; Al Silicate or Mica Based; Other Material (Ceramic, Glass, Piezoelectric, Refractory); alpha/ Glassy Silica, Bauxite
- Width / OD: 0.1181 to 19.69
from CoorsTek
Focus/edge rings are designed to improve etch uniformity around the wafer edge or perimeter. When used with an electrostatic chuck (e-chuck), the wafer rests on the edge focus ring - held in place by the electrostatic charge. ADVANCED CERAMIC COMPONENTS. CoorsTek advanced, high-purity ceramic... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Oxide Type: Alumina; Yttria
- Shape / Form: Custom Shape
from Saint-Gobain NorPro
WavePak ™ ceramic random packing was developed by Saint-Gobain NorPro and is marketed exclusively by MECS Inc. for sulfuric acid applications. The patented WavePak ™ shape represents a significant improvement over 75mm (3 in.) saddles in capacity and pressure drop. [See More]
- Applications: Chemical or material processing; Sulfuric Acid Applications Specific
- Mechanical Q: 0.0
- Shape / Form: Custom Shape
- Performance Features: Sintered / Fired
from CoorsTek
Advanced ceramic supports from alumina, cordierite, silicon carbide, and mullite materials provides superior chemical, corrosion, and thermal shock resistance. CoorsTek flat and corrugated ceramic supports are optimized for harsh chemical processing environments. High-Performance Ceramic Support... [See More]
- Applications: Chemical or material processing; Corrosion resistant
- Shape / Form: Custom Shape; Honeycomb
- Oxide Type: Alumina; Cordierite; Mullite
from Saint-Gobain NorPro
Hold-Down Media. Pentaring bed topping is used as a hold-down media at the top of graded reactor beds. The Pentaring shape offers substantial gains in void fraction and surface area when compared to conventional sphere-shaped media or Raschig rings. The immediate benefit of high void fraction is... [See More]
- Applications: Chemical or material processing
- Composition or ASTM/EN Cement Type : 65-70% SiO2, 23-28% AlO3, Trace Elements
- Oxide Type: Alumina
- Shape / Form: Custom Shape
from CoorsTek
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components. CoorsTek is your partner for... [See More]
- Applications: Chemical or material processing; Wear resistant parts or tooling
- Shape / Form: WaferCarrier
- Oxide Type: Alumina; Quartz; Yttria
from Saint-Gobain NorPro
AF38 ™ Heat Transfer Media -- Easier Wash Outs. AF38 ™ media has significantly larger individual void spaces than traditional saddles, providing improved resistance to particulate fouling/plugging. Its unique design orientates the void space vertically, providing for easier wash outs, if... [See More]
- Applications: Chemical or material processing; Regenerative Thermal Oxidizer (RTOs)
- Shape / Form: Custom Shape
- Oxide Type: Other Material (Ceramic, Glass, Piezoelectric, Refractory); Proprietary
- Mechanical Q: 0.0
from CoorsTek
Utilizing core extrusion and ceramic injection molding technologies developed over decades, CoorsTek manufactures high-quality alumina protection tubes. Using a special drying process after extrusion enables us to produce tubes and rods with the highest accuracy in radial dimensions. By combining... [See More]
- Applications: Chemical or material processing; Glass, Oil Refineries, Laboratories
- Composition or ASTM/EN Cement Type : 99.9%Alumina
- Oxide Type: Alumina
- Shape / Form: Rod; Tube
from Saint-Gobain NorPro
Saint-Gobain NorPro's Process Ceramics group has developed and manufactured more heat transfer media than any other company in the world. In fact, we were the first company to supply a media, Norton ™ Proware ™ saddles, for regenerative thermal oxidizers (RTO). Since then, we have... [See More]
- Applications: Chemical or material processing; Regenerative Thermal Oxidizer (RTOs)
- Shape / Form: Custom Shape
- Oxide Type: Other Material (Ceramic, Glass, Piezoelectric, Refractory); Proprietary
- Mechanical Q: 0.0
from CoorsTek
End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without... [See More]
- Applications: Chemical or material processing; Wear resistant parts or tooling
- Shape / Form: WaferCarrier
- Oxide Type: Alumina; Quartz; Yttria
from Saint-Gobain NorPro
HexPak ™ Heat Transfer Media for Regenerative Thermal Oxidizers. Reduce Energy Costs and Increase RTO Capacity. HexPak ™ is the latest development in RTO heat transfer media which is designed to improve thermal efficiency. The unique engineered shape of HexPak media provides superior... [See More]
- Applications: Chemical or material processing; Regenerative Thermal Oxidizer (RTOs)
- Shape / Form: Custom Shape
- Oxide Type: Other Material (Ceramic, Glass, Piezoelectric, Refractory); Proprietary
- Mechanical Q: 0.0
from Saint-Gobain NorPro
Norton ™ Saddles -- A Proven History. Norton ™ saddles have been used in industrial applications for well over 50 years. In fact, Saint-Gobain NorPro was the first company to supply a ceramic random packing media for RTOs. They say that imitation is the sincerest form of flattery. If so,... [See More]
- Applications: Chemical or material processing; Regenerative Thermal Oxidizer (RTOs)
- Shape / Form: Custom Shape
- Oxide Type: Other Material (Ceramic, Glass, Piezoelectric, Refractory); Proprietary
- Length: 0.2362 to 2.95
from Saint-Gobain NorPro
Snowflake ™ Heat Transfer Media -- Highest Cost Savings. Snowflake ™ media reduces pressure drop over saddles and Ty-Pak ® media for greater cost savings. Due to its open structure and short channel path length, Snowflake ™ media's engineered shape has primarily been used in... [See More]
- Applications: Chemical or material processing; Regenerative Thermal Oxidizer (RTOs)
- Shape / Form: Custom Shape
- Oxide Type: Other Material (Ceramic, Glass, Piezoelectric, Refractory); Proprietary
- Mechanical Q: 0.0
from Saint-Gobain NorPro
Ty-Pak ® Heat Transfer Media -- Economical, Lower Pressure Drop. The first random media designed specifically for heat transfer applications, Ty-Pak ® media provides a 20% lower pressure drop when compared to saddles. Ty-Pak ® media's unique engineered shape prevents channeling, permits... [See More]
- Applications: Chemical or material processing; Regenerative Thermal Oxidizer (RTOs)
- Shape / Form: Custom Shape
- Oxide Type: Other Material (Ceramic, Glass, Piezoelectric, Refractory); Proprietary
- Mechanical Q: 0.0