Wafer Carrier / Holder Oxide Ceramics
from CoorsTek
Precision ceramic components improve durability and handling of wafer stages and tables used during inspection and processing. CoorsTek components and tables provide precise dimensional stability, ultra-flatness and smoothness, and vacuum holding of wafers during inspection and processing. [See More]
- Shape / Form: Custom Shape; WaferCarrier
- Composition or ASTM/EN Cement Type : Silicon Carbide: UltraClean™ Recrystallized & CeraSiC, UltraSiC™ Direct Sintered; High-Purity Aluminas
- Oxide Type: Alumina
- Applications: Wear resistant parts or tooling; Lithography & Wafer Inspection
from CoorsTek
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components. CoorsTek is your partner for... [See More]
- Shape / Form: WaferCarrier
- Applications: Chemical or material processing; Wear resistant parts or tooling
- Oxide Type: Alumina; Quartz; Yttria
from CoorsTek
Susceptors hold and heat semiconductor wafers during thermal processing. A susceptor is made of a material which absorbs energy by induction, conduction, and/or radiation and heats the wafer. Its thermal shock resistance, thermal conductivity, and purity are critical to rapid thermal processing... [See More]
- Shape / Form: Custom Shape; WaferCarrier
- Composition or ASTM/EN Cement Type : Silicon Carbide: UltraClean™ Recrystallized & PureSiC® CVD; PlasmaPure™ UC Ultra-Pure Alumina, Clear Carbon™ SiC coated graphite
- Oxide Type: Alumina
- Applications: Wear resistant parts or tooling
from CoorsTek
End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without... [See More]
- Shape / Form: WaferCarrier
- Applications: Chemical or material processing; Wear resistant parts or tooling
- Oxide Type: Alumina; Quartz; Yttria