Yttria Oxide Ceramics
from CoorsTek
CoorsTek advanced, high-purity ceramic components are built to withstand the extreme environments in plasma etch (or "dry" etch) chambers — including vapor phase chemical etchants, high voltage RF (radio frequency) and microwave plasma, volatile byproducts, and aggressive cleaning cycles. ETCH... [See More]
- Oxide Type: Alumina; Yttria
- Shape / Form: Custom Shape
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Applications: Chemical or material processing
from San Jose Delta Associates, Inc.
While the same design features common to alumina ceramics; blind holes, threads etc. are easily produced in Zirconia the grinding time required is about fifty percent more. The post-grinding surface finish is significantly better than a comparable feature in most aluminas. Zirconia is much more... [See More]
- Oxide Type: Yttria; Zirconia
- Max Use Temperature: 1500
- Shape / Form: Custom Shape
- Thermal Conductivity: 2.2
from CoorsTek
Windows are chamber lids designed to transmit RF (radio frequency) and microwave energy into the plasma etch chamber while resisting erosion from the harsh plasma etch environment. An effective window has a low loss tangent (high transmittance) across RF and microwave frequencies. Otherwise, energy... [See More]
- Oxide Type: Alumina; Yttria
- Shape / Form: Custom Shape
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Applications: Chemical or material processing
from CoorsTek
Focus/edge rings are designed to improve etch uniformity around the wafer edge or perimeter. When used with an electrostatic chuck (e-chuck), the wafer rests on the edge focus ring - held in place by the electrostatic charge. ADVANCED CERAMIC COMPONENTS. CoorsTek advanced, high-purity ceramic... [See More]
- Oxide Type: Alumina; Yttria
- Shape / Form: Custom Shape
- Composition or ASTM/EN Cement Type : Aluminas (Al2O3): PlasmaPure™, Sapphal™ Aluminum Nitride; PureSiC® Silicon Carbide
- Applications: Chemical or material processing
from CoorsTek
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components. CoorsTek is your partner for... [See More]
- Oxide Type: Alumina; Quartz; Yttria
- Applications: Chemical or material processing; Wear resistant parts or tooling
- Shape / Form: WaferCarrier
from CoorsTek
CoorsTek leads the market in ceramic sensor components - delivering over 100,000,000 advanced ceramic sensor components every year. For over three decades, CoorsTek has helped OEMs and their suppliers select the best design, material, process, and secondary services to ensure exceptional quality and... [See More]
- Oxide Type: Alumina; Alumina-Zirconia; Yttria; Zirconia
- Thermal Conductivity: 12 to 35
- Composition or ASTM/EN Cement Type : Alumina, Zirconia-Toughened Alumina, Yttria Fully-Stabilized Zirconia
- CTE: 7.2 to 11
from CoorsTek
Zirconias have a unique crystal structure which combines extreme strength, high fracture toughness, and excellent wear resistance. CoorsTek has engineered transformation toughened formulations with zirconia crystal structures which expand when a micro-crack is formed — preventing further crack... [See More]
- Oxide Type: Yttria; Zirconia
- Thermal Conductivity: 2.2
- Composition or ASTM/EN Cement Type : HIPped Yttria Tetragonal Zirconia Polycrystal
- CTE: 10.3
from CoorsTek
End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without... [See More]
- Oxide Type: Alumina; Quartz; Yttria
- Applications: Chemical or material processing; Wear resistant parts or tooling
- Shape / Form: WaferCarrier
from CoorsTek
CoorsTek uses its deep expertise in translucent and transparent ceramics to produce tens of millions of these ceramic components each year. Translucent and transparent ceramics have a higher thermal resistance than glass or resin, and they are stronger and harder. Their unique combination of wear... [See More]
- Oxide Type: Alumina; Garnet; Yttria; Other Material (Ceramic, Glass, Piezoelectric, Refractory); Spinel
- Applications: Armor / Ballistic Protection; High-Intensity Discharge (HID) lighting, Semiconductor processing
- Composition or ASTM/EN Cement Type : High-purity Alumina, Yttria (Y2O3), Yttrium aluminum garnet (YAG), Spinel (MgAl2O4)