Semiconductor Manufacturing Mechanical Vacuum Pumps and Systems Datasheets

SCREWLINE Screw Vacuum Pump -- SP 250
from Leybold USA Inc.

SCREWLINE vacuum pumps are dry compressing backing pumps, the operation is based on the screw principle. Besides the integrated oil cooling arrangement for the rotors, the standard versions of the SCREWLINE pumps are air-cooled from the outside. For operation in air conditioned rooms a water-cooled... [See More]

  • Application: Industrial; Manufacturing; Semiconductor; Industrial Furnaces
  • Pumping Speed: 194
  • Configuration: Individual Vacuum Pump
  • Ultimate Vacuum: 0.0075
ESA Series Dry Vacuum Pump -- ESA200W
from EBARA Technologies, Inc.

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed. The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and... [See More]

  • Application: Industrial; Semiconductor
  • Lubrication Style: Dry or Oil-less
  • Configuration: Individual Vacuum Pump
  • Pump Stages: Two Stage
EH Mechanical Booster Pump -- EH1200C
from Edwards Vacuum

The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure... [See More]

  • Application: Industrial; Scientific; Manufacturing; Pharm/Sanitary; Semiconductor; Metallurgy, Coating
  • Pumping Speed: 494 to 844
  • Configuration: Individual Vacuum Pump
  • Technology: Lobed Rotor
Clean to Light Duty Service, Low Power Consumption Vacuum Pump -- LD1000
from LOT Vacuum America

LD Series pumps are designed to sip electricity and back turbo pumps. LD pumps are an excellent choice for entry and exit load locks, PVD Turbos, evaporation chambers, and transfer chambers. LD pumps incorporate the same state-of-the-art energy and communication features as the HD series. [See More]

  • Application: Industrial; Scientific; Semiconductor
  • Pumping Speed: 530
  • Configuration: Individual Vacuum Pump
  • Ultimate Vacuum: ? to 5.00E-4
AI Series Dry (Oil-Free) Vacuum Pump -- ISP- 90
from SynSysCo

ISP- 90. Air Cooled, Oil-Free Performance. The Anest Iwata oil-free ISP scroll vacuum pump is "The Original. ". Anest Iwata was the first manufacturer to bring scroll vacuum pumps to the vacuum market. With over 10 years of field experience and more performance hours than all its competitors... [See More]

  • Application: Industrial; Scientific; Packaging; Semiconductor; Sputtering Systems, Vacuum Deposition, Ion Plating, Accelerator and Synchrotron Radiation, Helium Leak Detection Systems, Gas Recovery Equipment
  • Pumping Speed: 3.2 to 3.8
  • Configuration: Individual Vacuum Pump
  • Ultimate Vacuum: 0.0380
DynaSeal™ Liquid Ring Vacuum -- TRO015H
from Travaini Pumps USA

Travaini high efficiency liquid ring vacuum pump, monoblock design. Heavy duty flexible coupling, no field alignment or lubrication required. NEMA C-face TEFC, motor, 3 phase 60 hz, 230/460 volt, class F, 1.15 service factor. Separator reservoir with level gauge, temperature & pressure gauge and... [See More]

  • Application: Industrial; Chemical; Food; Pharm/Sanitary; Semiconductor; Environmental, Electronics, Petroleum
  • Pumping Speed: 15
  • Configuration: Vacuum Pump System or Station
  • Ultimate Vacuum: 23.4 to 379
Dry Screw Vacuum Pumps -- Model SDV 120 200 TH-012
from Tuthill Corporation / Vacuum & Blower Systems

Applications: Chemical and Pharmaceutical Processing. Solvent Recovery. Forming. Crystallization. Dry Etching. Sputtering. Vapor Recovery. Features: Patented variable pitch rotor design reduces power consumption by up to 30% as compared to fixed pitch designs. No oil or water in contact with process... [See More]

  • Application: Industrial; Chemical; Manufacturing; Medical / Laboratory; Pharm/Sanitary; Semiconductor
  • Pumping Speed: 71 to 106
  • Configuration: Individual Vacuum Pump
  • Ultimate Vacuum: 0.0200 to 0.0400
ER Series -- ER1200
from ULVAC Technologies, Inc.

The ER Series is the latest addition to ULVAC's PDR-C Series, popular for SiN-LPCVD, metal etching and other harsh processes generating sublimated substances. The ER Series is for process applications such as sputter, ashing, and etching requiring corrosion resistance. The ER Series are the most... [See More]

  • Application: Industrial; Chemical; Semiconductor
  • Pumping Speed: 670
  • Configuration: Individual Vacuum Pump
  • Ultimate Vacuum: 0.0050
Chemical-Resistant Diaphragm Pump - 70 mbar -- ME 4C NT

Chemistry-design diaphragm pumps are an excellent solution for continuous, oil-free pumping of corrosive gases and vapors. The one-stage construction provides the advantageous combination of high pumping speed and ultimate vacuum down to 70 mbar. All major parts in contact with pumped media are made... [See More]

  • Application: Industrial; Scientific; Chemical; Medical / Laboratory; Packaging; Pharm/Sanitary; Semiconductor
  • Pumping Speed: 2.53
  • Configuration: Individual Vacuum Pump
  • Ultimate Vacuum: 52.52