X-ray Diffractometer Wafer and Thin Film Instrumentation Datasheets

Metrology Solutions for Semiconductors
from Bruker Corporation

Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker ™s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide... [See More]

  • Technology: Profilometer or AFM (optional feature); X-ray Diffractometer (optional feature)
  • Measurements: Defects, dimples or film residues (optional feature); Roughness / Waviness (optional feature)
  • Applications: Wafer; C-S Thin Film Materials
Process XRR, XRF, and XRD Metrology FAB Tool -- MFM65
from Rigaku Corporation

The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]

  • Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer