Sensor / Sensing Element Wafer and Thin Film Instrumentation
from WDI Wise Device Inc.
WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]
- Form Factor: Sensor or sensing element
- Technology: Optical / Imaging
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD; Flat panel display; Photolithography
from Nor-Cal Products, Inc. - The Vacuum Experts
Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal sensors operate with a pneumatically actuated shutter; only one crystal is used at a time. Both versions are... [See More]
- Form Factor: Sensor or sensing element
- Technology: Quartz crystal microbalance
from Polytec, Inc.
The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]
- Form Factor: Sensor or sensing element
- Technology: Optical / Imaging; Laser Doppler Vibrometry
- Mounting / Loading: Manual loading
- Applications: Surface Topography
from Imego
MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
- Mounting / Loading: In-process, in-situ or system mounted; Floor
- Applications: CVD / PVD; Polymer or photoresist films; BioFilms
from MTI Instruments Inc.
The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII ’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning for thickness, thickness variation, bow,... [See More]
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Capacitance or electromagnetic gage
- Mounting / Loading: Manual loading
- Applications: Wafer
from KEYENCE
SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Interferometer
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
from Nor-Cal Products, Inc. - The Vacuum Experts
Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal sensors operate with a pneumatically actuated shutter; only one crystal is used at a time. Both versions are... [See More]
- Form Factor: Sensor or sensing element
- Technology: Quartz crystal microbalance
from MTI Instruments Inc.
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent... [See More]
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Capacitance or electromagnetic gage
- Mounting / Loading: Manual loading
- Applications: Wafer
from KEYENCE
LT-9000 Surface Scanning Laser Confocal Sensor. The LT-9000 Surface Scanning Laser Confocal Displacement Meter excels in measuring micron-level defects or thicknesses without being affected by target color or angle. The confocal principle requires only that the light reflect off a surface and be... [See More]
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Confocal
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Applications: Wafer; Flat panel display; Packaged IC or substrate
from Nor-Cal Products, Inc. - The Vacuum Experts
Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal sensors operate with a pneumatically actuated shutter; only one crystal is used at a time. Both versions are... [See More]
- Form Factor: Sensor or sensing element
- Technology: Quartz crystal microbalance
from KEYENCE
LK-G5000 High-Speed / High-Accuracy Laser Displacement Sensor. The LK-G5000 is a High-Speed 1D Laser Displacement Sensor for precision displacement measurement. With a sampling speed of 392 kHz, this sensor is able keep up with just about any inline process as well as account for vibration for... [See More]
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Laser Triangulation
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate