Capacitance / EM Gage Wafer and Thin Film Instrumentation Datasheets

Semi-Automated Wafer Measurement System -- Proforma™ 300SA
from MTI Instruments Inc.

The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII ’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning for thickness, thickness variation, bow,... [See More]

  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Applications: Wafer
Ultra Gage -- 9500
from KLA-Tencor Corporation

Multi-tool functionality including thickness, shape stress, global and site flatness measurements. Measures 8,700 data points in under 60 seconds. Thin film stress on patterned or monitor wafers. Wide range of options including wafer typing. The 9500 UltraGage is a versatile, multifunctional... [See More]

  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem
  • Applications: Wafer; Polishing / CMP; Photolithography