Semiconductor Wafers Wafer and Thin Film Instrumentation
from Zygo Corporation
The APM650 ™ packaging metrology system is a new inspection tool for automated measurement of panel-based PCBs and other advanced packaging applications. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral... [See More]
- Applications: Wafer
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: Interferometer
from Daitron Co., Ltd.
The chip testers pick up laser diode chips on a sheet, measure and evaluate various characteristics, and sort them based on the results. The measurement stages are equipped with the temperature control function to characterize devices in the required temperature ranges. Features. ●To bring out... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
from Cosmic Equipment SpA
Complete solution for Wide Bandgap device testing. Cosmic lab systems are built to accelerate how engineers characterize power devices-whether in research, development, or pre-production. From initial setup to high-voltage test execution and result reporting, our platform is comprehensive, precise,... [See More]
- Applications: Wafer
- Form Factor: Monitor or instrument
from Daitron Co., Ltd.
The cleaving machines automatically perform parallel alignment and positioning and cleave with the blade the silicon substrates and compound semiconductor substrates, such as GaAs, InP, and GaN, from the scribed positions. It is capable for processing maximum of 4-inch wafers and wafer-to-bar... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Wafer / Part Size: 102
from Cosmic Equipment SpA
The FTI-1000 is a purpose-built ATE system designed for high-coverage wafer-level testing of power discrete devices, wide-bandgap components, and gate-driver-integrated power ICs. Suitable for both engineering characterization and high-volume wafer sort, the system integrates independent DC and AC... [See More]
- Applications: Wafer
- Form Factor: Monitor or instrument
from Daitron Co., Ltd.
The scribe machines automatically perform parallel alignment and positioning and scribe silicon substrates and compound semiconductor substrates, such as GaAs, InP, and GaN. It is capable for processing maximum of 4-inch wafers and wafer-to-bar scribing, bar-to-chip scribing, and full... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Wafer / Part Size: 102
from Cosmic Equipment SpA
Wide bandgap SiC technology is opening up a whole new generation of high voltage power products for applications in transport, power transmission and green energy. M2 Wafer edition tests these upto 10kV on wafer before singulation, identifying defective product early and saving the expense of... [See More]
- Applications: Wafer
- Form Factor: Monitor or instrument
from Daitron Co., Ltd.
The visual inspection machines capture high-definition images of semiconductor products and transparent objects such as glass and perform the measurements for scratches, particulates and debris, chipping, color unevenness, dimensions of devices and so forth through the image processing technology. [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from Nanotronics Imaging
The Nanotronics Imaging nSpec ® is an inspection device designed for high resolution microscopy and detection of wafer defects. With particular application in silicon carbide and Galium Nitride epi wafers, the nSpec ® offers fast quantification and qualification of defects with detailed... [See More]
- Applications: Wafer
- Mounting / Loading: Manual loading
- Form Factor: ProbingSystem
- Technology: Optical / Imaging
from KEYENCE
SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]
- Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Interferometer
from Rigaku Corporation
Rigaku's WaferX 300 represents the culmination of 25 years of experience in the X-ray fluorescence analysis of thin films on silicon wafers. Specifically developed as an in-process metrology tool, the system incorporates "bridge tool" technology — servicing 6", 8", as well as the latest 12"... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); WDXRF
from TSI Incorporated
This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer handling... [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: Floor
- Form Factor: Wafer Inspection And Metrology
- Wafer / Part Size: 200 to 300
from Hiden Analytical
Static and Dynamic SIMSAuger Electron SpectroscopyIon Beam SputteringSurface Science StudiesRastering / Depth Profiling [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Ion Beam Gun
- Technology: FIB; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
from Advanced Energy Industries, Inc.
A field-proven solution for any dual-magnetron sputtering application with additional capabilities facilitating advanced process innovation. Achieve higher deposition rates with a more stable process through advanced ARC management. Tune your process with variable frequency and duty cycle. Tailor to... [See More]
- Applications: Wafer; Magnetron Sputtering
- Mounting / Loading: Floor
- Form Factor: Controller
from Park Systems, Inc.
Park Systems has revolutionized the AFM with the introduction of the XE-3DM, the fully automated AFM system designed for overhang and trench profiles, sidewall roughness and imaging, and critical angle measurements. The unique design of the XE-3DM, made possible by the XE-series ’ decoupled XY... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Profilometer or AFM
from WDI Wise Device Inc.
WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Photolithography
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Sensor or sensing element
- Technology: Optical / Imaging
from MTI Instruments Inc.
The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII ’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning for thickness, thickness variation, bow,... [See More]
- Applications: Wafer
- Mounting / Loading: Manual loading
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Capacitance or electromagnetic gage
from Phenom-World BV
The Phenom Pro desktop SEM is one of the most advanced imaging models in the Phenom series. With its long-life high-brightness CeB6 electron source, the Phenom Pro creates state-of-the-art images with a minimum of user maintenance intervention. The backscattered-electron detector (BSED) and... [See More]
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: FIB
from Xenemetrix Ltd.
EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Mounting / Loading: Manual loading; Floor
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
from Filmetrics, Inc.
Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments. The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic... [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
from MicroSense, LLC
The Polar Kerr System for MRAM utilizes the polar Magneto-Optical Kerr Effect (MOKE) to characterize the magnetic properties of multi-layer wafers used in the development and manufacturing of perpendicular MRAM. Utilizing a non-contact full-wafer measurement technique, the system creates a map of... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Magnetometer
from Technic, Inc.
Technic ’s EBA (Electroplating Bath Analyzer) provides an easy to implement, accurate and trouble-free analysis of your electroplating solutions. The EBA utilizes a patented combination of processing technique, software and hardware to obtain greater consistency and accuracy in analytical... [See More]
- Applications: Wafer; Electroplate
- Form Factor: Monitor or instrument
from Nikon Metrology
The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: ProbingSystem; Wafer Loading System
- Technology: Optical / Imaging
from Bruker Corporation
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker ™s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide... [See More]
- Applications: Wafer; C-S Thin Film Materials
- Measurements: Defects, dimples or film residues (optional feature); Roughness / Waviness (optional feature)
- Technology: Profilometer or AFM (optional feature); X-ray Diffractometer (optional feature)
from Unitron Ltd.
Modular microscope system that readily adapts to instrumentation [See More]
- Applications: Wafer
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Mask Aligner
- Technology: Optical / Imaging
from KEYENCE
LT-9000 Surface Scanning Laser Confocal Sensor. The LT-9000 Surface Scanning Laser Confocal Displacement Meter excels in measuring micron-level defects or thicknesses without being affected by target color or angle. The confocal principle requires only that the light reflect off a surface and be... [See More]
- Applications: Wafer; Flat panel display; Packaged IC or substrate
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Confocal
from Rigaku Corporation
The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
from TSI Incorporated
This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom wafer calibration standards. Manual loading allows a wide range... [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: Manual loading
- Form Factor: Wafer Inspection And Metrology
- Wafer / Part Size: 150 to 300
from Hiden Analytical
Low power, high brightness, surface ionisation source coupled to a compact ion column, providing high performance in a small package. [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Ion Beam Gun
- Technology: FIB; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
from Advanced Energy Industries, Inc.
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch ™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution. Highly reliable, effective abatement with minimum utilities usage. Lower cost of ownership than... [See More]
- Applications: Wafer; Photolithography; Etching
- Mounting / Loading: Floor
- Form Factor: Controller
from Park Systems, Inc.
XE-HDM is an automatic defect review AFM which revolutionizes the way defects in HDD substrates and media are searched, scanned, and analyzed. The new XE-HDM significantly increases throughput for the defect review process; test runs with real defects demonstrate over 500 - 800% gain in throughput... [See More]
- Applications: Wafer; Memory drive disc or head
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Profilometer or AFM
from WDI Wise Device Inc.
The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from MTI Instruments Inc.
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent... [See More]
- Applications: Wafer
- Mounting / Loading: Manual loading
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Capacitance or electromagnetic gage
from Phenom-World BV
The Phenom ProX desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system. With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Viewing three-dimensional images of microscopic structures... [See More]
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: FIB
from Xenemetrix Ltd.
RoHS Vision. The Fast and Easy Method for Ensuring Compliance. with Regulations for Hazardous Substances. The Restriction of Hazardous Substances Directive (RoHS) restricts toxic metals in electrical and electronic equipment. Xenemetrix ’s new RoHS Vision uses a high resolution detector, a... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Mounting / Loading: Manual loading; Floor
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
from Filmetrics, Inc.
Automated Film Thickness Mapping. The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 450mm in diameter. Map patterns can be polar, rectangular, or linear, or you can create... [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
from MicroSense, LLC
Benchtop, automated Thickness measurement systems. Cassette to cassette or manual loading. Exclusive sensing technology with dual White light chromatic coding probes (10nm resolution). Wafer 2 ” to 4 ” (50 to 100mm). Thickness range: 50um to 3mm. Throughput up to 100W/hours. 2D & 3D... [See More]
- Applications: Wafer
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from Technic, Inc.
The RTA is an automated, on-line, real-time, and in-tank system for monitoring and controlling the levels of chemical constituents of plating baths. The RTA technology is a unique modern approach to metrology combining the advanced, purpose-selected electroanalytical techniques with state-of-the-art... [See More]
- Applications: Wafer; Electroplate
- Form Factor: Monitor or instrument
from KEYENCE
LK-G5000 High-Speed / High-Accuracy Laser Displacement Sensor. The LK-G5000 is a High-Speed 1D Laser Displacement Sensor for precision displacement measurement. With a sampling speed of 392 kHz, this sensor is able keep up with just about any inline process as well as account for vibration for... [See More]
- Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Laser Triangulation
from Rigaku Corporation
The WDA-3650 X-ray fluorescence spectrometer for thin film evaluation continues Rigaku's 30-year history of XRF wafer analyzers that has mirrored the history of thin film device development. This latest XRF metrology tool contributes significantly to the process control of metal film thickness, film... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); WDXRF
from Park Systems, Inc.
Atomic Force Microscopy (AFM) is emerging as an essential tool in many industries. With its ability to accurately measure critical dimensions in the micrometer to nanometer regime, the AFM is becoming an essential tool choice in applications involving surface roughness, trench width, depth, sidewall... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Profilometer or AFM
from WDI Wise Device Inc.
The LLC6 is a precise linear lens changer with 6 lens ports providing ultra fast, automatic lens changing without the need of re-qualifying the lens. It is the ideal tool for TFT-LCD and Photomask Inspection/Repair applications or other tasks where multiple optical magnifications are required. The... [See More]
- Applications: Wafer; Flat panel display
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Lens Changer
- Features: Noncontact; Non-destructive
from Phenom-World BV
The Phenom Pure desktop SEM (scanning electron microscope) is an ideal tool for making the transition from working with a light microscope to operating an electron microscope. The Phenom Pure is equipped with the basic fundamentals for meeting imaging needs. The Phenom Pure provides high-quality... [See More]
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: FIB
from Xenemetrix Ltd.
X-Calibur SDD. Bench Top EDXRF Spectrometer. versatile, high energy resolution. Our X-Calibur SDD EDXRF spectrometer features similar configuration like X-Calibur but with Silicon Drift Detector. Thanks to SDD high count rates the instrument improves its response time thus minimizing down time. The... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Mounting / Loading: Manual loading; Floor
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
from Filmetrics, Inc.
Automated Thickess Mapping for Production Environments. The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board... [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
from MicroSense, LLC
Benchtop automated thickness measurement system with X-Y stage on air bearing for wafers up to 8 ” round and for square wafers up to 156mmx156mm. Dual white light chromatic coding probe technology with 10nm resolution. Thickness range from 50um to 1mm. Automated calibration. Hiscan option for... [See More]
- Applications: Wafer
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from Technic, Inc.
Designer for laboratory testing and sampling, Technic ’s portable tabletop wafer plating test cell features all the tools needed to simulate full scale production. Specifications. 16 ” long, 12 ” wide, 14 ” deep. constructed from ½ ” thick natural polypropylene... [See More]
- Applications: Wafer
- Technology: Wafer sorter or prober
- Form Factor: ProbingSystem
from Rigaku Corporation
TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 3760 can measure elements from Na through U with a single-target, 3-beam X-ray system and a solid-state detector system. The TXRF 3760 includes Rigaku's patented XY θ... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Reflectometer; TXRF
from Park Systems, Inc.
Hard Disk Drive (HDD) manufacturers can now reliably depend on Park Systems ’ XE-PTR, a fully automated industrial in-line AFM for automatic Pole Tip Recession measurements on rowbar-level sliders. As most HDD manufacturers are turning to PMR (Perpendicular Magnetic Recording), sub-nano scale... [See More]
- Applications: Wafer; Memory drive disc or head
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Profilometer or AFM
from Xenemetrix Ltd.
X-Cite. Bench Top EDXRF Spectrometer. economical, accurate, easy to use. Xenemetrix ’s powerful X-Cite benchtop Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer enables system operators to identify the elemental composition of samples. The analyzer performs non-destructive qualitative... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Mounting / Loading: Manual loading; Floor
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
from Filmetrics, Inc.
Turn Your Microscope into a Film Thickness Measurement Tool. The F40 product family is for applications that require a spot size as small as 1 micron. For most microscopes the F40 simply attaches to the c-mount adapter, which is the industry standard for video camera mounting. The F40 comes complete... [See More]
- Applications: Wafer; CVD / PVD
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
from MicroSense, LLC
Automated Wafer Thickness Measurement System. Cassette to cassette or manual loading. Exclusive sensing technology with dual White light chromatic coding probes (10nm resolution). Wafer 4 ” to 12 ” (100 to 300mm). Thickness range: 50um to 3mm. Extended warpage range up to 5mm. Throughput... [See More]
- Applications: Wafer
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging