Endpoint Detection / Plasma Diagnostics Wafer and Thin Film Instrumentation

2 Results

Mass and Energy Analyzer -- EQP
from Hiden Analytical

The Hiden EQP is a combined Mass / Energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes. [See More]

Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics
Mounting / Loading: In-process, in-situ or system mounted

Form Factor: Monitor or instrument; Controller
Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)

MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness; Curing Rate
Mounting / Loading: In-process, in-situ or system mounted; Floor

Form Factor: ProbingSystem; Sensor or sensing element
Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)