In-line Wafer and Thin Film Instrumentation Datasheets

Thin Film Deposition Monitor -- F30 Series
from Filmetrics, Inc.

The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]

  • Mounting / Loading: In-line
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
  • Form Factor: Monitor or instrument
  • Applications: Wafer; CVD / PVD
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Technology: Interferometer
  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
IRIS DIE & Wafer Inspection Systems -- FA Fully Automatic Inspection System
from SemiProbe

SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]

  • Mounting / Loading: In-line
  • Technology: Optical / Imaging
  • Form Factor: ProbingSystem
  • Applications: Wafer (optional feature)