Photolithography / Patterning Wafer and Thin Film Instrumentation
from WDI Wise Device Inc.
WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Photolithography
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Sensor or sensing element
- Technology: Optical / Imaging
from Advanced Energy Industries, Inc.
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch ™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution. Highly reliable, effective abatement with minimum utilities usage. Lower cost of ownership than... [See More]
- Applications: Wafer; Photolithography; Etching
- Mounting / Loading: Floor
- Form Factor: Controller
from WDI Wise Device Inc.
This is the only commercially available microscope guaranteeing transmission of more then 80% for all four YAG laser harmonics: 266, 355, 532, and 1064nm - without compromising the review channel fidelity. The MIC4 microscope is instrumental in laser repair of TFT arrays over the wavelength ranging... [See More]
- Applications: CVD / PVD; Electroplate; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography; PV Cell, Laser Micromachining, Photomask
- Mounting / Loading: In-process, in-situ or system mounted (optional feature); Floor (optional feature)
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from WDI Wise Device Inc.
The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging