Controller Wafer and Thin Film Instrumentation Datasheets

Ascent® DMS Advanced Dual-Magnetron Sputtering
from Advanced Energy Industries, Inc.

The Ascent ® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the... [See More]

  • Form Factor: Controller
  • Applications: Wafer; Magnetron Sputtering
  • Mounting / Loading: Floor
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Form Factor: Controller; ProbingSystem
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Etching; Ion/Electron Collection, Ion Flux
In-Line Spectroscopic Ellipsometer -- UVISEL
from HORIBA Scientific

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems. The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data... [See More]

  • Form Factor: Monitor or instrument; Controller
  • Technology: Ellipsometer; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: Floor
  • Applications: Wafer; CVD / PVD
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
from KEYENCE

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Technology: Interferometer
  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate