Area Mapping Wafer and Thin Film Instrumentation
from Zygo Corporation
The APM650 ™ packaging metrology system is a new inspection tool for automated measurement of panel-based PCBs and other advanced packaging applications. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral... [See More]
- Form Factor: Monitor or instrument
- Technology: Interferometer
- Mounting / Loading: Manual loading
- Applications: Wafer
from WDI Wise Device Inc.
The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
from Filmetrics, Inc.
Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments. The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic... [See More]
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
from SemiProbe
SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]
- Form Factor: ProbingSystem
- Technology: Optical / Imaging
- Mounting / Loading: Manual loading
- Applications: Wafer (optional feature)
from Phenom-World BV
The Phenom Pro desktop SEM is one of the most advanced imaging models in the Phenom series. With its long-life high-brightness CeB6 electron source, the Phenom Pro creates state-of-the-art images with a minimum of user maintenance intervention. The backscattered-electron detector (BSED) and... [See More]
- Form Factor: Monitor or instrument
- Technology: FIB
- Mounting / Loading: Manual loading
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
from MTI Instruments Inc.
The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII ’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning for thickness, thickness variation, bow,... [See More]
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Capacitance or electromagnetic gage
- Mounting / Loading: Manual loading
- Applications: Wafer
from Rigaku Corporation
TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 3760 can measure elements from Na through U with a single-target, 3-beam X-ray system and a solid-state detector system. The TXRF 3760 includes Rigaku's patented XY θ... [See More]
- Form Factor: Monitor or instrument
- Technology: Reflectometer; TXRF
- Mounting / Loading: Floor
- Applications: Wafer
from Filmetrics, Inc.
Automated Film Thickness Mapping. The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 450mm in diameter. Map patterns can be polar, rectangular, or linear, or you can create... [See More]
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
from SemiProbe
SA-8VP Semiautomatic Vacuum Probing System. The ONLY vacuum probing system designed to grow with your requirements and your business. Easily customized to meet a variety of applications and budgets. Ideal for MEMS, Sensors, Switches, Microbolometers, or any product that is vacuum-packaged. [See More]
- Form Factor: ProbingSystem
- Technology: Optical / Imaging
- Mounting / Loading: Manual loading
- Applications: Wafer (optional feature)
from Phenom-World BV
The Phenom ProX desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system. With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Viewing three-dimensional images of microscopic structures... [See More]
- Form Factor: Monitor or instrument
- Technology: FIB
- Mounting / Loading: Manual loading
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
from MTI Instruments Inc.
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent... [See More]
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Capacitance or electromagnetic gage
- Mounting / Loading: Manual loading
- Applications: Wafer
from Rigaku Corporation
TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 3800e can measure elements from S through U with a single-target, dual-beam X-ray system and a new liquid nitrogen-free detector system. The TXRF 3800e includes Rigaku's patent... [See More]
- Form Factor: Monitor or instrument
- Technology: Reflectometer; TXRF
- Mounting / Loading: Floor
- Applications: Wafer
from Filmetrics, Inc.
Automated Thickess Mapping for Production Environments. The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board... [See More]
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
from SemiProbe
Manual Prober for contacting of active devices on both sides of the wafer. Precision controls enable the user to probe from the top side of the wafer, the bottom side of the wafer, or to simultaneously probe the top and bottom sides of the wafer. [See More]
- Form Factor: ProbingSystem
- Technology: Optical / Imaging
- Mounting / Loading: Manual loading
- Applications: Wafer (optional feature)
from Phenom-World BV
The Phenom Pure desktop SEM (scanning electron microscope) is an ideal tool for making the transition from working with a light microscope to operating an electron microscope. The Phenom Pure is equipped with the basic fundamentals for meeting imaging needs. The Phenom Pure provides high-quality... [See More]
- Form Factor: Monitor or instrument
- Technology: FIB
- Mounting / Loading: Manual loading
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
from Rigaku Corporation
TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF-310 can measure elements from Na through U with a single-target, 3-beam X-ray system and a solid-state detector system. The TXRF-310 includes Rigaku's patented XY θ sample... [See More]
- Form Factor: Monitor or instrument
- Technology: Reflectometer; TXRF
- Mounting / Loading: Floor
- Applications: Wafer