Flat Panel Displays Wafer and Thin Film Instrumentation
from KEYENCE
SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]
- Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Interferometer
from WDI Wise Device Inc.
WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Photolithography
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Sensor or sensing element
- Technology: Optical / Imaging
from KEYENCE
LT-9000 Surface Scanning Laser Confocal Sensor. The LT-9000 Surface Scanning Laser Confocal Displacement Meter excels in measuring micron-level defects or thicknesses without being affected by target color or angle. The confocal principle requires only that the light reflect off a surface and be... [See More]
- Applications: Wafer; Flat panel display; Packaged IC or substrate
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Confocal
from WDI Wise Device Inc.
This is the only commercially available microscope guaranteeing transmission of more then 80% for all four YAG laser harmonics: 266, 355, 532, and 1064nm - without compromising the review channel fidelity. The MIC4 microscope is instrumental in laser repair of TFT arrays over the wavelength ranging... [See More]
- Applications: CVD / PVD; Electroplate; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography; PV Cell, Laser Micromachining, Photomask
- Mounting / Loading: In-process, in-situ or system mounted (optional feature); Floor (optional feature)
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from KEYENCE
LK-G5000 High-Speed / High-Accuracy Laser Displacement Sensor. The LK-G5000 is a High-Speed 1D Laser Displacement Sensor for precision displacement measurement. With a sampling speed of 392 kHz, this sensor is able keep up with just about any inline process as well as account for vibration for... [See More]
- Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
- Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
- Form Factor: Monitor or instrument; Controller; Sensor or sensing element
- Technology: Laser Triangulation
from WDI Wise Device Inc.
The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from WDI Wise Device Inc.
The LLC6 is a precise linear lens changer with 6 lens ports providing ultra fast, automatic lens changing without the need of re-qualifying the lens. It is the ideal tool for TFT-LCD and Photomask Inspection/Repair applications or other tasks where multiple optical magnifications are required. The... [See More]
- Applications: Wafer; Flat panel display
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Lens Changer
- Features: Noncontact; Non-destructive