Deposition Rate Wafer and Thin Film Instrumentation
from Hiden Analytical
The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]
- Measurements: Deposition rate
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Controller; ProbingSystem
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
from Filmetrics, Inc.
The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]
- Measurements: Deposition rate; Optical constants (n or k); FilmThickness
- Mounting / Loading: In-line
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor... [See More]
- Measurements: Deposition rate; FilmThickness
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument
- Technology: Quartz crystal microbalance
from Imego
MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]
- Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness; Curing Rate
- Mounting / Loading: In-process, in-situ or system mounted; Floor
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
from Hiden Analytical
The Hiden Plasma Workstation, an integrated RF-ICP reactor / plasma analyser system for all you plasma process studies. [See More]
- Measurements: Deposition rate
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument; Controller
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
from Filmetrics, Inc.
Measure film thickness in-line and in real-time at up to seven locations with the F37. Example Layers. Almost any smooth and at-least-partially transparent films may be measured. This includes virtually any semiconducting material, including those used in thin-film photovoltaics. Example Layers. MBE... [See More]
- Measurements: Deposition rate; FilmThickness
- Mounting / Loading: In-line
- Form Factor: Monitor or instrument
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance