Controller Wafer and Thin Film Instrumentation Datasheets

Ascent® DMS Advanced Dual-Magnetron Sputtering
from Advanced Energy Industries, Inc.

The Ascent ® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the... [See More]

  • Form Factor: Controller
  • Applications: Wafer; Magnetron Sputtering
  • Mounting / Loading: Floor
In-Line Spectroscopic Ellipsometer -- UVISEL
from HORIBA Scientific

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems. The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data... [See More]

  • Form Factor: Monitor or instrument; Controller
  • Technology: Ellipsometer; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: Floor
  • Applications: Wafer; CVD / PVD
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Form Factor: Controller; ProbingSystem
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Etching; Ion/Electron Collection, Ion Flux
Thin Film Monitor -- PV-1000
from MTI Instruments Inc.

Using MTII ’s exclusive Push/Pull capacitance probe technology, each PV-1000 module provides up to three pairs of probes for measurement of maximum, minimum and average thickness, as well as total thickness variation (TTV) and wafer bow. For applications requiring additional thickness... [See More]

  • Form Factor: Controller; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: In-line; Manual loading; Floor
  • Applications: Etching
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Form Factor: Monitor or instrument; Controller
  • Technology: Quartz crystal microbalance
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses