Reflectometer Wafer and Thin Film Instrumentation Datasheets

Aleris Family -- 8330
from KLA-Tencor Corporation

The Aleris Family of film metrology tools provides reliable and precise measurement of film thickness, refractive index, stress and composition for the 32nm node and beyond. Utilizing Broadband Spectroscopic Ellipsometry (BBSE) technology, the Aleris systems form a comprehensive metrology solution,... [See More]

  • Technology: Reflectometer
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: CVD / PVD
Process XRR, XRF, and XRD Metrology FAB Tool -- MFM65
from Rigaku Corporation

The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]

  • Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Texture Measurement System -- Microscan
from ULVAC Technologies, Inc.

Provides a broad range of specs suitable for various R & D applications [See More]

  • Technology: Reflectometer; Optical / Imaging
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument; Controller
  • Applications: Wafer; CVD / PVD