Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
from KEYENCE

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Technology: Interferometer
  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
Thin Film Monitors -- PV-1000
from MTI Instruments Inc.

Using MTII ’s exclusive Push/Pull capacitance probe technology, each PV-1000 module provides up to three pairs of probes for measurement of maximum, minimum and average thickness, as well as total thickness variation (TTV) and wafer bow. For applications requiring additional thickness... [See More]

  • Mounting / Loading: In-line; Manual loading; Floor
  • Technology: Capacitance or electromagnetic gage
  • Form Factor: Controller; Sensor or sensing element
  • Applications: Etching
MPX
from KLA-Tencor Corporation

The MPX Focus/Exposure Line Monitor provides an innovative methodology to monitor photo excursions of focus and exposure on production wafers. An option on the Archer series advanced overlay metrology systems, MPX improves overlay tool cost of ownership (CoO) as a single solution that monitors all... [See More]

  • Mounting / Loading: In-line
  • Technology: Optical / Imaging
  • Form Factor: Monitor or instrument
  • Applications: Photolithography
Wafer Inspection System -- MX51
from Olympus America Inc.

The Olympus MX51 industrial inspection microscope is optimized for the inspection requirements of a variety of electronic components including semiconductor wafer inspection. Its compact size, ease of operation, 6"x6" stage travel and cost effectiveness make the MX51 an ideal inspection microscope... [See More]

  • Mounting / Loading: In-line (optional feature); Manual loading
  • Technology: Optical / Imaging
  • Form Factor: Monitor or instrument
  • Applications: Wafer
IRIS DIE & Wafer Inspection Systems -- FA Fully Automatic Inspection System
from SemiProbe

SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]

  • Mounting / Loading: In-line
  • Technology: Optical / Imaging
  • Form Factor: ProbingSystem
  • Applications: Wafer (optional feature)
Metrology System -- Z3D-7000 Series
from Zygo Corporation

Simultaneously measures multiple parameters [See More]

  • Mounting / Loading: In-line; Floor
  • Technology: Profilometer or AFM; Optical / Imaging; Interferometer
  • Form Factor: Monitor or instrument
  • Applications: Wafer; CVD / PVD; Electroplate; Polishing / CMP; Photolithography; Etching; Bumping Processes