Crystal Microbalance (QCM) Wafer and Thin Film Instrumentation Datasheets

Deposition Monitor, 2 Channels
from Nor-Cal Products, Inc.

Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor... [See More]

  • Technology: Quartz crystal microbalance
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: CVD / PVD
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
High Temp Microbalance Sensor Crystal -- Type R-20
from Piezocryst Advanced Sensorics GmbH

High temp stability up to 850 °C, high Q factor around 70000 [See More]

  • Technology: Quartz crystal microbalance
  • Applications: CVD / PVD
  • Form Factor: Sensor or sensing element
  • Measurements: Deposition rate; FilmThickness
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Technology: Quartz crystal microbalance
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument; Controller
  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses