Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
from KEYENCE

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Technology: Interferometer
  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Mounting / Loading: In-process, in-situ or system mounted
  • Technology: Reflectometer
  • Form Factor: Monitor or instrument
  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Mounting / Loading: In-process, in-situ or system mounted
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Form Factor: Controller; ProbingSystem
  • Applications: Etching; Ion/Electron Collection, Ion Flux
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
APTI Buttons
from KLA-Tencor Corporation

APTI (Arrays of Peak Temperature Indicators) buttons are a unique temperature measurement tool from SensArray for measuring and profiling peak temperature using non-reversible temperature indicators. APTI buttons are ideally suited for plasma and other semiconductor and flat panel display processes... [See More]

  • Mounting / Loading: In-process, in-situ or system mounted
  • Technology: Arrays of Peak Temperature Indicators
  • Form Factor: Sensor or sensing element
  • Applications: Flat panel display
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Mounting / Loading: In-process, in-situ or system mounted
  • Technology: Quartz crystal microbalance
  • Form Factor: Monitor or instrument; Controller
  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses
Mask Aligner -- 15912
from Unitron Ltd.

Modular microscope system that readily adapts to instrumentation [See More]

  • Mounting / Loading: In-process, in-situ or system mounted
  • Technology: Optical / Imaging
  • Form Factor: Mask Aligner
  • Applications: Wafer
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Mounting / Loading: In-process, in-situ or system mounted
  • Technology: Optical / Imaging
  • Form Factor: Sensor or sensing element
  • Applications: Wafer; CVD / PVD; Flat panel display; Photolithography