DC Brushless Servo Multi-axis Positioning Systems
from PI (Physik Instrumente) L.P.
The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for inspection, laser marking, microscopy, scanning, and... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 5.91
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 5.91
from PI (Physik Instrumente) L.P.
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection. The cross-beam... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 13.78
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 19.69
from PI (Physik Instrumente) L.P.
The XYZ stage is based on the A-311 series planar XY air bearing stage and the L-310 series precision lift Z-stage. The air bearing stage is available in different travel ranges from 100x100mm to 300x400mm to match your application. Encoder options include incremental and BiSS type absolute... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 3.94
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 11.81 to 15.75
from Aerotech, Inc.
Design Features. Large clear aperture. Full preload on all axes. Dual linear-motor-driven X and Y axes. Noncontact linear encoder for high accuracy [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 9.84
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 9.84
from H2W Technologies
The SRS-002-007/003-003-01-XY is a low profile XY single rail positioning stage that uses brushless linear motors to generate a continuous/peak force of 5.1 lbs [22.6 N]/20.4 lbs [90.4 N] (bottom axis), 2.7 lbs [11.9 N]/10.7 lbs [47.7 N] (top axis), with a total stroke length of 1.8 in [45.5 mm]... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 1.75
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 2.75
from ABTech, Inc.
ABTech ’s precision air bearing linear stages address the motion needs for a full range of part sizes and weights. Built for the most demanding applications, every stage provides ultra-smooth motion, sub-micron accuracy and absolute repeatability. Designed and manufactured in-house to... [See More]
- Motor Type: DC Brushless Servo
- Drive Type: Direct Drive
- Bearing Type: Air Bearing; Dovetail Slide (optional feature)
from Aerotech, Inc.
Design Features. 450 mm wafer compatible. Full preload on all axes. Dual linear-motor-driven Y axes. Travel to 1.2 meter by 1.2 meter. Linear encoder or laser interferometer feedback. Active yaw control [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 11.81 to 47.24
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 11.81 to 47.24
from ABTech, Inc.
ABTech ’s line of precision mechanical bearing linear stages address the motion needs for a full range of part sizes and weights. High precision cross roller linear guide rails are incorporated into stages that are designed and manufactured in-house to extremely tight geometric tolerances. The... [See More]
- Motor Type: DC Brushless Servo
- Drive Type: Direct Drive (optional feature); Handwheel/Crank (optional feature); Micrometer (optional feature)
- Bearing Type: Crossed Roller Slide; Dovetail Slide (optional feature)
from Aerotech, Inc.
Design Features. 450 mm wafer compatible. Maximize throughput with 2 m/s scan velocity and 5 g acceleration. Faster turnaround and minimized settling times. Active yaw control. Linear encoder or laser interferometer feedback. Travel to 1.2 m by 1.2 m [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 19.69
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 19.69
from ABTech, Inc.
ABTech ’s line of precision oil hydrostatic bearing linear stages address the motion needs for a full range of part sizes and weights. Built for the most demanding applications, oil hydrostatic fluid film bearings provide high load capacity and extreme stiffness. Every stage provides... [See More]
- Motor Type: DC Brushless Servo
- Drive Type: Direct Drive
- Bearing Type: Air Bearing; Dovetail Slide (optional feature)
from Aerotech, Inc.
Design Features. Air bearings for ultra-smooth motion. All axes are fully preloaded. Dual linear-motor-driven lower axis. Travel to 1 m x 1 m. Options include Z axis, vibration isolation, machine base and control enclosure [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 9.84 to 39.37
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 9.84 to 39.37
from Aerotech, Inc.
Design Features. Integrated low-profile XY linear motor stage. Nanometer-level performance in a large travel format. High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis. In-position stability of <1 nm. Anti-creep crossed-roller bearings. High dynamic performance [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 2.36 to 6.3
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 2.36 to 6.3
from Aerotech, Inc.
Design Features. Integrated, low-profile, XY linear motor stage. 25 mm x 25 mm or 50 mm x 50 mm travel. Nanometer-level performance in a large travel format. High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis. In-position stability of <1 nm. Anti-creep crossed-roller... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 0.9843 to 1.97
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 0.9843 to 1.97
from Aerotech, Inc.
Design Features. Linear brushless servomotors for superior performance and longevity. Customizable Z and theta axes for increased flexibility. Optional machine base and risers. Optional electroless nickel for ESD protection and medical applications. Compact design reduces overall machine size. Ideal... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 7.87 to 19.69
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 7.87 to 19.69