Air Bearing Linear Slides and Linear Stages
Reviewed by: Jon Lowy, consulting engineer
Description
Air Bearing Linear Slides and Linear Stages are precision motion devices that utilize a thin film of air to support and guide a moving carriage or platform. These devices are designed to provide nearly frictionless motion, allowing for extremely precise positioning and smooth travel.
Working Principle
Air Bearing Linear Slides and Linear Stages operate by creating a thin cushion of air between the moving and stationary components. This air cushion is generated by forcing compressed air through small orifices or porous surfaces, which lifts the moving part slightly off the stationary base. The lack of mechanical contact eliminates friction and wear, resulting in highly accurate and repeatable motion. The absence of friction also minimizes issues like stiction and hysteresis, making these devices highly useful for applications requiring precise positioning and smooth, continuous motion.
Applications
Air Bearing Linear Slides and Linear Stages are commonly used in high-precision applications such as inspection systems, machine tools, and pick-and-place devices. For example, in semiconductor wafer inspection, the frictionless motion and high accuracy of air bearings are crucial for scanning and imaging processes. In metrology, air bearings are used to achieve the precise positioning required for accurate measurements. Additionally, they are employed in laser processing systems where smooth, controlled motion is essential for high-quality results.
Advantages over other Linear Slides and Linear Stages
Air Bearing Linear Slides and Linear Stages offer several advantages over traditional mechanical bearing systems. One significant advantage is their ability to achieve extremely high precision, with positioning accuracies within nanometers for linear applications and tenths of arc-seconds for rotational applications . The frictionless nature of air bearings also allows for higher speeds and smoother motion, which is beneficial in applications requiring constant velocity and minimal vibration . Unlike ball slides or crossed roller slides, air bearings do not suffer from wear and tear, leading to longer operational lifespans and reduced maintenance requirements .
Limitations
Despite their many advantages, Air Bearing Linear Slides and Linear Stages have some limitations. They require a continuous supply of clean, dry compressed air, which can add to the operational complexity and cost . Additionally, air bearings are generally more expensive to manufacture and install compared to mechanical bearings. They are also sensitive to environmental conditions such as dust and humidity, which can affect their performance. Finally, air bearings may not be suitable for applications involving heavy loads or high-impact forces, as they provide support in only one direction .
Considerations
When considering the use of Air Bearing Linear Slides and Linear Stages, several factors should be taken into account. Initial costs are typically higher than those for mechanical bearing systems due to the complexity of the air supply system and the precision manufacturing required. Operating expenses can also be higher, primarily due to the need for a continuous supply of compressed air. However, the lack of friction and wear can result in lower maintenance and replacement costs over time. In terms of durability, air bearings generally have a longer lifespan compared to mechanical bearings, provided they are used in clean environments. Accuracy is one of the primary benefits, with air bearings offering superior precision and repeatability, making them ideal for high-precision applications .
from PI (Physik Instrumente) L.P.
Extended travel air bearings are ideal for high speed, high accuracy, lightly loaded applications. Unlike other long travel air bearings, the bearing slide is supported only on the ends (similar to a gantry) reducing the requirements for expensive precision support surfaces. Inherently frictionless... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 64
- Axis Configuration: X Axis Only
- Positioning Accuracy: 1.00E-4
from PI (Physik Instrumente) L.P.
For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing slides, and are simple to integrate and use. They offer better straightness, angular deviation, and... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.97 to 39.37
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 1.97 to 39.37
from PI (Physik Instrumente) L.P.
The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.97 to 13.78
- Axis Configuration: X Axis Only
- Rated Speed: 0.0394
from PI (Physik Instrumente) L.P.
The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.97 to 29.53
- Axis Configuration: X Axis Only
- Rated Speed: 39.37
from PI (Physik Instrumente) L.P.
PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 3.94 to 15.75
- Axis Configuration: X Axis Only
- Rated Speed: 39.37
from PI (Physik Instrumente) L.P.
The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to the bearing ’s axis of rotation. Adjustments can be made in two linear orthogonal directions (X and Y) and in two... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 0.1181
- Axis Configuration: X-Y Axes; Tip/Tilt Axes
- Device Type: Multi-Axis Configuration
from PI (Physik Instrumente) L.P.
The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package. The combination of non-contact components results in a frictionless motion platform that offers the... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.57
- Axis Configuration: X Axis Only
- Rated Speed: 19.69
from PI (Physik Instrumente) L.P.
The PIglide miniature linear stage with air bearing has a linear motor drive, preloaded air bearings, and an integrated optical linear encoder. This stage provides very high precision with a small footprint. The combination of noncontact components results in frictionless motion that offers... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 0.9843
- Axis Configuration: X Axis Only
- Rated Speed: 394
from PI (Physik Instrumente) L.P.
PIglide VC air bearing positioning stages are voice coil driven with fully preloaded air bearings and optical linear encoders. These stages are ideally suited for many high precision applications where long travels are not required, such as autofocus and scanning applications. The non-contact design... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 0.9843
- Axis Configuration: X Axis Only
- Positioning Accuracy: -2.00E-4 to 2.00E-4
from PI (Physik Instrumente) L.P.
The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for inspection, laser marking, microscopy, scanning, and... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 5.91
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 5.91
from PI (Physik Instrumente) L.P.
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection. The cross-beam... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 13.78
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 19.69
from Aerotech, Inc.
Design Features. Designed for high-performance scanning and inspection. Active air preload on all air-bearing surfaces. Linear encoder feedback provides subnanometer resolution. High stiffness for heavy loads and excellent geometrical performance. Four models with travels from 50 to 200 mm. Integral... [See More]
- Bearing Type: Air Bearing
- Z-Axis Travel: 1.97
- Axis Configuration: Z Axis Only
- Rated Speed: 11.81
from H2W Technologies
The ABS-011-09-030-X air bearing positioning stage uses a brushless linear motor to generate a continuous/peak force of 30.1 lbs [134 N]/790.3 lbs [402 N] with a total stroke length of 10.5 in [267 mm]. The non-contact 1.0-micron resolution encoder allows for precise positioning. It is guided by 5... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 10.5
- Axis Configuration: X Axis Only
- Carriage Load: 5
from ABTech, Inc.
ABTech ’s precision air bearing linear stages address the motion needs for a full range of part sizes and weights. Built for the most demanding applications, every stage provides ultra-smooth motion, sub-micron accuracy and absolute repeatability. Designed and manufactured in-house to... [See More]
- Bearing Type: Air Bearing
- Device Type: Dovetail Slide (optional feature); Multi-Axis Configuration (optional feature)
- Orientation: Horizontal
- Drive Type: Direct Drive
from Aerotech, Inc.
Design Features. Designed for high-performance alignment and assembly. 0.5 nm closed-loop resolution. Fully preloaded air-bearing. Low-noise linear amplifiers. Complete noncontact design [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 0.9843 to 5.91
- Axis Configuration: X Axis Only
- Y-Axis Travel: 0.9843 to 5.91
from H2W Technologies
The ABS-012-12-030-X is a low profile air bearing positioning stage uses a brushless linear motor to generate a continuous/peak force of 29.0 lbs [129 N]/87.0 lbs [387 N] with a total stroke length of 12.3 in [311 mm]. The non-contact 1.0-micron resolution encoder allows for precise positioning. It... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 12.25
- Axis Configuration: X Axis Only
- Carriage Load: 15
from ABTech, Inc.
ABTech ’s line of precision oil hydrostatic bearing linear stages address the motion needs for a full range of part sizes and weights. Built for the most demanding applications, oil hydrostatic fluid film bearings provide high load capacity and extreme stiffness. Every stage provides... [See More]
- Bearing Type: Air Bearing
- Device Type: Dovetail Slide (optional feature); Multi-Axis Configuration (optional feature)
- Orientation: Horizontal
- Drive Type: Direct Drive
from Aerotech, Inc.
Design Features. Designed for high-performance scanning and inspection. 450 mm wafer compatible. Active air preload on all air-bearing surfaces. Linear encoder feedback provides subnanometer resolution. High stiffness for heavy loads and excellent geometric performance. Travel up to 500 mm [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.97 to 7.87
- Axis Configuration: X Axis Only
- Y-Axis Travel: 1.97 to 7.87
from H2W Technologies
The ABS-011-09-030-X air bearing positioning stage uses a brushless linear motor to generate a continuous/peak force of 20.6 lbs [92 N]/61.8 lbs [275 N] with a total stroke length of 31.5 in [800 mm]. The non-contact 1.0-micron resolution encoder allows for precise positioning. It is guided by 5... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 31.5
- Axis Configuration: X Axis Only
- Carriage Load: 10
from Aerotech, Inc.
Design Features. Integral bellows protect the drive and bearing system from contamination. Designed for high-performance scanning and inspection. Air-on-air preload on all air-bearing surfaces. Linear encoder feedback provides nanometer-level. High stiffness for heavy loads and excellent. Travel up... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.97 to 19.69
- Axis Configuration: X Axis Only
- Y-Axis Travel: 1.97 to 7.87
from H2W Technologies
The XR Positioning Stage is a compact, small cross section open or enclosed positioning stage for short stroke linear servo applications (up to 12 inch stroke). It is driven by either an iron core or ironless core 3-phase brushless linear motor and guided by 2 sets of parallel cross roller bearings. [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 4
- Axis Configuration: X Axis Only
- Carriage Load: 20.6 to 61.8
from Aerotech, Inc.
Design Features. Wide base for large offset loads. 450 mm wafer compatible. Powerful dual linear motor drive. Designed for high-performance scanning and inspection. Active air preload on all air-bearing surfaces. Linear encoder feedback provides sub-nanometer resolution. High stiffness for heavy... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 7.87 to 19.69
- Axis Configuration: X Axis Only
- Y-Axis Travel: 7.87 to 19.69
from H2W Technologies
This is a high force, high acceleration, voice coil driven, closed loop XY positioning stage with air bearings system. This minimizes the amount of friction as well as the pitch, yaw, and roll in the system. The stage is driven by three NCC moving coil type linear actuators and is guided by parallel... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 0.8000
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 0.8000
from Aerotech, Inc.
Design Features. Integral bellows protect the drive and bearing system from contamination. Wide base for large offset loads. Powerful dual linear motor drive. Designed for high-performance scanning and inspection. Air-on-air preload on all air-bearing surfaces. Linear encoder feedback provides... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 7.87 to 19.69
- Axis Configuration: X Axis Only
- Y-Axis Travel: 7.87 to 19.69
from H2W Technologies
Features: - Non-contact Air Bearing (Air Bushing). - Frictionless Motion. - No Wearing Parts. - Low Velocity Ripple. - Dual axis on single a motion plane. - Light moving mass. - Horizontal or vertical orientation. - Two axis of coordinated motion [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.5
- Axis Configuration: X Axis Only
- Orientation: Vertical; Horizontal
from Aerotech, Inc.
Design Features. Fully preloaded air-bearing. 450 mm wafer compatible. Travel to 1.2 meter. Linear encoder or laser interferometer feedback. Complete noncontact design. Ultra-smooth design for outstanding velocity stability [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 3.94 to 47.24
- Axis Configuration: X Axis Only
- Y-Axis Travel: 3.94 to 47.24
from H2W Technologies
Features: - Single Plane XY configuration. - Non-contact Air Bearing (Flat Air Bearing). - Frictionless Motion. - No Wearing Parts. - Low Velocity Ripple. - Large Granite Base for Stability. - Two axis of coordinated motion. - Optical Switch Home [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1.6
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 1.6
from Aerotech, Inc.
Design Features. Active air preload on all air-bearing surfaces. Travel to 1 meter. Linear encoder or laser interferometer feedback. High stiffness for heavy loads and excellent geometric performance. Integrated XY subsystems including granite [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 7.87 to 39.37
- Axis Configuration: X Axis Only
- Y-Axis Travel: 7.87 to 39.37
from H2W Technologies
The VCS05-060-AB-01 voice coil positioning stage uses H2W voice coil motor NCC05-18-060-2X to generate a continuous/peak force of 6.0 lbs [26.7 N]/18.0 lbs [80.1 N] with a total stroke length of 0.50 in [12.1mm]. The 1.0-micron resolution encoder allows for precise positioning. It comes supplied... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 2
- Axis Configuration: X Axis Only
- Carriage Load: 6
from Aerotech, Inc.
Design Features. Large clear aperture. Full preload on all axes. Dual linear-motor-driven X and Y axes. Noncontact linear encoder for high accuracy [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 9.84
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 9.84
from H2W Technologies
The VCS05-060-AB-01-MC voice coil positioning stage uses H2W voice coil motor NCC05-18-060-2X to generate a continuous/peak force of 6.0 lbs [26.7 N]/18.0 lbs [80.1 N] with a total stroke length of 0.50 in [12.1mm]. The 1.0-micron resolution encoder allows for precise positioning. It comes supplied... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 0.5000
- Axis Configuration: X Axis Only
- Carriage Load: 6
from Aerotech, Inc.
Design Features. 450 mm wafer compatible. Full preload on all axes. Dual linear-motor-driven Y axes. Travel to 1.2 meter by 1.2 meter. Linear encoder or laser interferometer feedback. Active yaw control [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 11.81 to 47.24
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 11.81 to 47.24
from H2W Technologies
The VCS10-023-AB-01-M voice coil positioning stage uses H2W voice coil motor NCC10-15-023-1X to generate a continuous/peak force of 2.3 lbs [10.2 N]/6.9 lbs [30.7 N] with a total stroke length of 1.0 in [25.4 mm]. The 1.0-micron resolution encoder allows for precise positioning. It comes supplied... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 1
- Axis Configuration: X Axis Only
- Carriage Load: 2.3
from Aerotech, Inc.
Design Features. Advanced silicon-carbide structure for high-dynamics and ultra-precise motion performance. Speeds to 1.5 m/s and accelerations to 5 g. Proprietary reaction-mass design enables fast turnaround and move-and-settle times. Active and passive isolation system options. Encoder or laser... [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 17.72
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 17.72
from H2W Technologies
Features: - Non-contact Porous Carbon Air Bearings (Flat Air Bearing). - Frictionless Motion. - No Wearing Parts. - Low Velocity Ripple. - Split XY configuration. - Built on rigid aluminum extrusion frame. - Shelf to place system electronics. - Two axis of coordinated motion. - Protective Bellows [See More]
- Bearing Type: Air Bearing
- Stroke or X-Axis Travel: 14
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 36