DC Brushless Servo Linear Slides and Linear Stages
from PI (Physik Instrumente) L.P.
The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 1.97 to 13.78
- Axis Configuration: X Axis Only
- Rated Speed: 0.0394
from PI (Physik Instrumente) L.P.
The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 1.97 to 29.53
- Axis Configuration: X Axis Only
- Rated Speed: 39.37
from PI (Physik Instrumente) L.P.
PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 3.94 to 15.75
- Axis Configuration: X Axis Only
- Rated Speed: 39.37
from PI (Physik Instrumente) L.P.
The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package. The combination of non-contact components results in a frictionless motion platform that offers the... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 1.57
- Axis Configuration: X Axis Only
- Rated Speed: 19.69
from PI (Physik Instrumente) L.P.
The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for inspection, laser marking, microscopy, scanning, and... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 5.91
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 5.91
from PI (Physik Instrumente) L.P.
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection. The cross-beam... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 13.78
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 19.69
from PI (Physik Instrumente) L.P.
The XYZ stage is based on the A-311 series planar XY air bearing stage and the L-310 series precision lift Z-stage. The air bearing stage is available in different travel ranges from 100x100mm to 300x400mm to match your application. Encoder options include incremental and BiSS type absolute... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 3.94
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 11.81 to 15.75
from Aerotech, Inc.
Design Features. Designed for high-performance scanning and inspection. Active air preload on all air-bearing surfaces. Linear encoder feedback provides subnanometer resolution. High stiffness for heavy loads and excellent geometrical performance. Four models with travels from 50 to 200 mm. Integral... [See More]
- Motor Type: DC Brushless Servo
- Z-Axis Travel: 1.97
- Axis Configuration: Z Axis Only
- Rated Speed: 11.81
from ABTech, Inc.
ABTech ’s precision air bearing linear stages address the motion needs for a full range of part sizes and weights. Built for the most demanding applications, every stage provides ultra-smooth motion, sub-micron accuracy and absolute repeatability. Designed and manufactured in-house to... [See More]
- Motor Type: DC Brushless Servo
- Device Type: Dovetail Slide (optional feature); Multi-Axis Configuration (optional feature)
- Orientation: Horizontal
- Bearing Type: Air Bearing
from H2W Technologies
The SRS-002-007/003-003-01-XY is a low profile XY single rail positioning stage that uses brushless linear motors to generate a continuous/peak force of 5.1 lbs [22.6 N]/20.4 lbs [90.4 N] (bottom axis), 2.7 lbs [11.9 N]/10.7 lbs [47.7 N] (top axis), with a total stroke length of 1.8 in [45.5 mm]... [See More]
- Motor Type: DC Brushless Servo; Linear Motor
- Stroke or X-Axis Travel: 1.75
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 2.75
from Velmex, Inc.
Motorized BiSlides Assemblies are Modular, Compact, and Durable. • 45 degree opposing way guides carry high loads. in all directions. • Long life anodized ways standard. • Biggest lead screw drive for higher thrust capacity. • Improved modular design eliminates adapter plates. [See More]
- Motor Type: DC Brushless Servo; DC Servo; Stepper; AC
- Stroke or X-Axis Travel: 5
- Axis Configuration: X Axis Only
- Rated Speed: 7
from Aerotech, Inc.
Design Features. Large clear aperture. Full preload on all axes. Dual linear-motor-driven X and Y axes. Noncontact linear encoder for high accuracy [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 9.84
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 9.84
from ABTech, Inc.
ABTech ’s line of precision mechanical bearing linear stages address the motion needs for a full range of part sizes and weights. High precision cross roller linear guide rails are incorporated into stages that are designed and manufactured in-house to extremely tight geometric tolerances. The... [See More]
- Motor Type: DC Brushless Servo
- Device Type: Crossed Roller Slide; Dovetail Slide (optional feature); Multi-Axis Configuration
- Orientation: Horizontal
- Drive Type: Direct Drive (optional feature); Handwheel/Crank (optional feature); Micrometer (optional feature)
from Velmex, Inc.
Motorized BiSlides Assemblies are Modular, Compact, and Durable. • 45 degree opposing way guides carry high loads. in all directions. • Long life anodized ways standard. • Biggest lead screw drive for higher thrust capacity. • Improved modular design eliminates adapter plates. [See More]
- Motor Type: DC Brushless Servo; DC Servo; Stepper; AC
- Stroke or X-Axis Travel: 10
- Axis Configuration: X Axis Only
- Rated Speed: 6
from Aerotech, Inc.
Design Features. 450 mm wafer compatible. Full preload on all axes. Dual linear-motor-driven Y axes. Travel to 1.2 meter by 1.2 meter. Linear encoder or laser interferometer feedback. Active yaw control [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 11.81 to 47.24
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 11.81 to 47.24
from ABTech, Inc.
ABTech ’s line of precision oil hydrostatic bearing linear stages address the motion needs for a full range of part sizes and weights. Built for the most demanding applications, oil hydrostatic fluid film bearings provide high load capacity and extreme stiffness. Every stage provides... [See More]
- Motor Type: DC Brushless Servo
- Device Type: Dovetail Slide (optional feature); Multi-Axis Configuration (optional feature)
- Orientation: Horizontal
- Bearing Type: Air Bearing
from Velmex, Inc.
Motorized BiSlides Assemblies are Modular, Compact, and Durable. • 45 degree opposing way guides carry high loads. in all directions. • Long life anodized ways standard. • Biggest lead screw drive for higher thrust capacity. • Improved modular design eliminates adapter plates. [See More]
- Motor Type: DC Brushless Servo; DC Servo; Stepper; AC
- Stroke or X-Axis Travel: 15
- Axis Configuration: X Axis Only
- Rated Speed: 5
from Aerotech, Inc.
Design Features. 450 mm wafer compatible. Maximize throughput with 2 m/s scan velocity and 5 g acceleration. Faster turnaround and minimized settling times. Active yaw control. Linear encoder or laser interferometer feedback. Travel to 1.2 m by 1.2 m [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 19.69
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 19.69
from Velmex, Inc.
Motorized BiSlides Assemblies are Modular, Compact, and Durable. • 45 degree opposing way guides carry high loads. in all directions. • Long life anodized ways standard. • Biggest lead screw drive for higher thrust capacity. • Improved modular design eliminates adapter plates. [See More]
- Motor Type: DC Brushless Servo; DC Servo; Stepper; AC
- Stroke or X-Axis Travel: 20
- Axis Configuration: X Axis Only
- Rated Speed: 5
from Aerotech, Inc.
Design Features. Air bearings for ultra-smooth motion. All axes are fully preloaded. Dual linear-motor-driven lower axis. Travel to 1 m x 1 m. Options include Z axis, vibration isolation, machine base and control enclosure [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 9.84 to 39.37
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 9.84 to 39.37
from Velmex, Inc.
Features for all Models: 45 lbs. horizontal load capacity. Large top plate. Twin parallel bearings for each axis for maximum stability. The standard lead screw advance is 0.100"/revolution. Accuracy is < 0.007"/10" length. [See More]
- Motor Type: DC Brushless Servo; Stepper (optional feature); AC (optional feature)
- Stroke or X-Axis Travel: 1.5
- Axis Configuration: X Axis Only
- Rated Speed: 4
from Aerotech, Inc.
Design Features. Unique Z stage design incorporates fully preloaded air bearings. Less than or equal to ??2 arc sec roll, pitch and yaw over full travel. Submicron closed-loop positioning. Travel options from 50 to 150 mm. Precision-ground ball-screw-drive eliminates the need for special... [See More]
- Motor Type: DC Brushless Servo
- Z-Axis Travel: 1.97 to 5.91
- Axis Configuration: Z Axis Only
- Rated Speed: 1.97
from Aerotech, Inc.
Design Features. Integrated low-profile XY linear motor stage. Nanometer-level performance in a large travel format. High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis. In-position stability of <1 nm. Anti-creep crossed-roller bearings. High dynamic performance [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 2.36 to 6.3
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 2.36 to 6.3
from Aerotech, Inc.
Design Features. Integrated, low-profile, XY linear motor stage. 25 mm x 25 mm or 50 mm x 50 mm travel. Nanometer-level performance in a large travel format. High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis. In-position stability of <1 nm. Anti-creep crossed-roller... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 0.9843 to 1.97
- Axis Configuration: X-Y Axes
- Y-Axis Travel: 0.9843 to 1.97
from Aerotech, Inc.
Design Features. Linear brushless servomotors for superior performance and longevity. Customizable Z and theta axes for increased flexibility. Optional machine base and risers. Optional electroless nickel for ESD protection and medical applications. Compact design reduces overall machine size. Ideal... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 7.87 to 19.69
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 7.87 to 19.69
from Aerotech, Inc.
Design Features. High velocity to 3 m/s and high acceleration to 3 g. High-power linear brushless servomotors. Customizable Z and theta axes. Noncontact linear encoders. Optional machine base and risers [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 19.69 to 39.37
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 19.69 to 39.37
from Aerotech, Inc.
Design Features. Optimized design for precise contouring in a compact footprint. Velocity to 3 m/s and acceleration to 5 g. High power brushless linear servomotors for smooth motion. Travels up to 500 mm X 500 mm. Optional electroless nickel for ESD protection. Customizable Z and theta axes for... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 7.87 to 19.69
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 19.69
from Aerotech, Inc.
Design Features. Optimized design for precise contouring. Velocity to 3 m/s and acceleration to 5 g. High power brushless linear servomotors for smooth motion. Travels up to 1.3 m X 1.3 m. Customizable Z and theta axes for flexible configurations. Noncontact linear encoders. Configurable cable... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 19.69 to 49.21
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 19.69 to 49.21
from Aerotech, Inc.
Design Features. Configurable T-style robot up to 1.5 m x 0.5 m x 0.3 m travel. Velocities up to 1.4 m/s provide high throughput. Integrated Cable Management System (CMS) shortens your machine build. 3-axis load up to 25 kg for demanding applications. Customizable Z and/or theta axis for easy... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 5.91 to 59.06
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 5.91 to 23.62
from Aerotech, Inc.
Design Features. Closed-loop laser interferometer or linear encoder feedback. Fully preloaded air bearing. Advanced PCI-bus-based or Automation 3200 software-only controller. Low-noise linear amplifiers. Complete noncontact design. Includes granite base and optional vibration isolation system. [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 3.94 to 47.24
- Axis Configuration: X Axis Only
- Rated Speed: 19.69
from Aerotech, Inc.
Design Features. Dual carriage on common bearing. Independent or coordinated motion. 2.5 nm resolution. Noncontact linear motor drive. Turnkey drive and control electronics. Auxiliary axes available [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 5.51
- Axis Configuration: X Axis Only
- Rated Speed: 11.81
from Aerotech, Inc.
Design Features. Designed for high-performance photonics alignment and assembly. Linear encoder feedback provides up to 2 nm resolution. 62 picometer resolution available with the Automation 3200. Fully-preloaded air bearing. Complete noncontact design. Ultra-smooth velocity control [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 0.9843 to 5.91
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 0.9843 to 5.91
from Aerotech, Inc.
Design Features. 3- to 6-axis photonics alignment. Noncontact linear motor drive. 2.5 nm resolution linear motion. 0.027 to 0.058 arc second angular resolution. Turnkey drive and control electronics. Direct-drive rotary axes. Raster, spiral, or power peaking algorithms. Interface to... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 1.97 to 5.91
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 1.97 to 5.91
from Aerotech, Inc.
Design Features. 3-axis photonics alignment. Noncontact linear motor drive. 2.5 nm resolution linear motion. Low C.T.E. construction. Insensitive to environmental changes [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 5.91
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 5.91
from Aerotech, Inc.
Design Features. 450 mm wafer compatible. Air-bearing scan axis; mechanical-bearing step axis. Dual linear-motor-driven step axis. Travel to 1.2 meter by 1.2 meter. Linear encoder or laser interferometer feedback [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 13.78
- Axis Configuration: X-Y Open Frame
- Y-Axis Travel: 13.78
from Aerotech, Inc.
Design Features. Three-axis photomask alignment stage. Standard interface for six or eight-inch masks. Integral vacuum groove for mask retention. Low profile for easy integration into optics train. Direct-drive brushless servomotors [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 3.94
- Axis Configuration: X-Y-Z Axes
- Y-Axis Travel: 3.94
from Aerotech, Inc.
Design Features. Improved second-generation design. High-performance in a cost-effective package. Rugged mechanical construction. Optional linear encoder. 18 models with travels from 50 mm to 600 mm. Vacuum and cleanroom versions available. The PRO115SL and PRO115SLE are Aerotech ’s... [See More]
- Motor Type: DC Brushless Servo
- Stroke or X-Axis Travel: 1.97 to 23.62
- Axis Configuration: X Axis Only
- Positioning Accuracy: 1.00E-3 to 0.0155
from Aerotech, Inc.
Design Features. Improved second-generation design. High-performance in a cost-effective package. Rugged mechanical construction. Optional linear encoder. 18 models with travels from 50 mm to 600 mm. Vacuum and cleanroom versions available. The PRO165SL and PRO165SLE are Aerotech ’s... [See More]
- Motor Type: DC Brushless Servo
- Positioning Accuracy: 1.00E-3 to 0.0155
- Stroke or X-Axis Travel: 1.97 to 23.62
- Orientation: Horizontal
from Aerotech, Inc.
Design Features. Improved second-generation design. High-performance in a cost-effective package. Rugged mechanical construction. Optional linear encoder. 20 models with travels from 100 mm to 1000 mm. Vacuum and cleanroom versions available. The PRO225SL and PRO225SLE are Aerotech ’s... [See More]
- Motor Type: DC Brushless Servo
- Positioning Accuracy: 1.00E-3 to 0.0180
- Stroke or X-Axis Travel: 3.94 to 39.37
- Orientation: Horizontal
from Aerotech, Inc.
Design Features. Improved second-generation design. High-performance in a cost-effective package. Rugged mechanical construction. Optional linear encoder. 12 models with travels from 300 mm to 1000 mm. Vacuum and cleanroom versions available. The PRO280SL and PRO280SLE are Aerotech ’s... [See More]
- Motor Type: DC Brushless Servo
- Positioning Accuracy: 1.00E-3 to 0.0180
- Stroke or X-Axis Travel: 11.81 to 39.37
- Orientation: Horizontal
from Aerotech, Inc.
Design Features. Improved second-generation design. High-performance in a cost-effective package. Rugged mechanical construction. Optional linear encoder. 12 models with travels from 300 mm to 1000 mm. Vacuum and cleanroom versions available. The PRO560SL and PRO560SLE are Aerotech ’s... [See More]
- Motor Type: DC Brushless Servo
- Positioning Accuracy: 1.00E-3 to 0.0180
- Stroke or X-Axis Travel: 11.81 to 39.37
- Orientation: Horizontal