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WDI Wise Device Inc. - ATF6 Auto Focus & Tracking System
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WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes.
Unlike the ATF4 and ATF5 the ATF6 is designed for reliable operation not only on specular surfaces but defusing surfaces as well. This is accomplished by the projection of a laser line segment onto the specimen. This generates a vast redundancy of focusing information as compared to laser dots and thus assures accurate focusing.
The ATF6 has the same footprint and is "pin to pin" compatible with the ATF4 and ATF5 sensors. It uses the same Motor Controller Module (MCM) and software for setup and testing.
The ATF6 continuously measures the distance and direction towards best focus and thus is effective regardless whether the microscope is still or in motion. This dynamic focusing on a moving target it referred to "Tracking Auto-Focus"
Typical Applications
- Patterned wafer inspection
- Wafer processing
- Photo-mask inspection and repair
- CVD TFT repair
- Laser micro-machining
- OLED inspection
- Photovoltaics fabrication
- Metallurgical applications
Special Application
- For 3D periodical structures, such as MEMs or touch screens, user may select whether to keep focus on the substrate or tops of the bumps
ATF6 Special Features
- The Sensor operates on almost all types of surfaces:
- Reflective and diffusing
- Low reflectivity surfaces (down to 1%)
- Transparent and opaque
- Plain, patterned (silicon wafer) and textured
- ATF6 covers microscope objectives ranges from 2x to 100x
- Focusing with programmable offset function
Available in 2 Versions
- ATF6 SA -- Stand alone sensor, with AO
- ATF6 SYS -- Autonomous autofocus servo system with controller
The SYS version can be integrated with either an MCM controller for driving z-stages powered by any type of stepper motor (user provides drive) or MCZ which is a fully integrated controller and drive, which operates 2 phase stepper motors.
Downloads
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